DE3118632A1 - Belichtungsprojektionsgeraet - Google Patents

Belichtungsprojektionsgeraet

Info

Publication number
DE3118632A1
DE3118632A1 DE19813118632 DE3118632A DE3118632A1 DE 3118632 A1 DE3118632 A1 DE 3118632A1 DE 19813118632 DE19813118632 DE 19813118632 DE 3118632 A DE3118632 A DE 3118632A DE 3118632 A1 DE3118632 A1 DE 3118632A1
Authority
DE
Germany
Prior art keywords
mask
munich
guide
dipl
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19813118632
Other languages
German (de)
English (en)
Other versions
DE3118632C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Junji Ohta Tokyo Isohata
Hironori Chigasaki Kanagawa Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP56050364A external-priority patent/JPS57164731A/ja
Priority claimed from JP56052211A external-priority patent/JPS57165831A/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE3118632A1 publication Critical patent/DE3118632A1/de
Application granted granted Critical
Publication of DE3118632C2 publication Critical patent/DE3118632C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE19813118632 1981-04-02 1981-05-11 Belichtungsprojektionsgeraet Granted DE3118632A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP56050364A JPS57164731A (en) 1981-04-02 1981-04-02 Projecting and printing device
JP56052211A JPS57165831A (en) 1981-04-07 1981-04-07 Projection printing device

Publications (2)

Publication Number Publication Date
DE3118632A1 true DE3118632A1 (de) 1982-10-21
DE3118632C2 DE3118632C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-05

Family

ID=26390833

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813118632 Granted DE3118632A1 (de) 1981-04-02 1981-05-11 Belichtungsprojektionsgeraet

Country Status (3)

Country Link
US (1) US4370054A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3118632A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2096334B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3342995A1 (de) * 1982-11-29 1984-05-30 Canon K.K., Tokio/Tokyo Belichtungsvorrichtung

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116735A (ja) * 1981-12-29 1983-07-12 Canon Inc 投影焼付方法
JPS5978533A (ja) * 1982-10-27 1984-05-07 Canon Inc 露光装置
US4588288A (en) * 1983-07-01 1986-05-13 Canon Kabushiki Kaisha Static pressure bearing and transport device utilizing the same
JPS6018918A (ja) * 1983-07-13 1985-01-31 Canon Inc ステージ装置
JPS60140722A (ja) * 1983-12-27 1985-07-25 Canon Inc 精密移動装置
US4676630A (en) * 1985-04-25 1987-06-30 Canon Kabushiki Kaisha Exposure apparatus
US4748477A (en) * 1985-04-30 1988-05-31 Canon Kabushiki Kaisha Exposure apparatus
US5003345A (en) * 1989-12-27 1991-03-26 General Signal Corporation Apparatus and method for aligning and focusing an image of a reticle onto a semiconductor wafer
JPH04122013A (ja) * 1990-09-13 1992-04-22 Canon Inc 露光装置
US5329825A (en) * 1992-11-25 1994-07-19 Eastman Kodak Company Precision moving stage
JP3506158B2 (ja) 1995-04-14 2004-03-15 株式会社ニコン 露光装置及び走査型露光装置、並びに走査露光方法
WO1999033725A1 (en) * 1997-12-30 1999-07-08 Krytek Corporation Contactless wafer pick-up chuck
WO2010064219A1 (en) 2008-12-04 2010-06-10 Ranbaxy Laboratories Limited Process for the preparation of a novel intermediate for caspofungin
KR101962487B1 (ko) 2011-02-22 2019-07-17 가부시키가이샤 니콘 유지 장치, 노광 장치, 및 디바이스의 제조 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1803947A1 (de) * 1967-10-18 1970-06-04 Texas Instruments Inc Kamera fuer wiederholten stufenweisen Betrieb

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3563648A (en) * 1967-10-18 1971-02-16 Texas Instruments Inc Step and repeat camera with computer controlled film table
US3722996A (en) * 1971-01-04 1973-03-27 Electromask Inc Optical pattern generator or repeating projector or the like
US3927939A (en) * 1973-12-27 1975-12-23 Bell Telephone Labor Inc Apparatus for reducing rotation components in table translation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1803947A1 (de) * 1967-10-18 1970-06-04 Texas Instruments Inc Kamera fuer wiederholten stufenweisen Betrieb

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DE-Z.: Feingerätetechnik, Juli 1957, S. 291-298 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3342995A1 (de) * 1982-11-29 1984-05-30 Canon K.K., Tokio/Tokyo Belichtungsvorrichtung

Also Published As

Publication number Publication date
DE3118632C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-05
US4370054A (en) 1983-01-25
GB2096334A (en) 1982-10-13
GB2096334B (en) 1985-02-20

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: G03F 7/22

D2 Grant after examination
8364 No opposition during term of opposition