DE3032708C2 - Verfahren zur Herstellung eines Dünnschicht-Magnetfeld-Sensors - Google Patents

Verfahren zur Herstellung eines Dünnschicht-Magnetfeld-Sensors

Info

Publication number
DE3032708C2
DE3032708C2 DE3032708A DE3032708A DE3032708C2 DE 3032708 C2 DE3032708 C2 DE 3032708C2 DE 3032708 A DE3032708 A DE 3032708A DE 3032708 A DE3032708 A DE 3032708A DE 3032708 C2 DE3032708 C2 DE 3032708C2
Authority
DE
Germany
Prior art keywords
layer
magnetic
strips
magnetic layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3032708A
Other languages
German (de)
English (en)
Other versions
DE3032708A1 (de
Inventor
Margret 2000 Hamburg Harms
Holger 2083 Halstenbek Lüthje
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Original Assignee
Philips Patentverwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH filed Critical Philips Patentverwaltung GmbH
Priority to DE3032708A priority Critical patent/DE3032708C2/de
Priority to US06/295,052 priority patent/US4386114A/en
Priority to GB8125987A priority patent/GB2083230B/en
Priority to FR8116310A priority patent/FR2495333A1/fr
Priority to JP56133438A priority patent/JPS5776891A/ja
Priority to SE8105077A priority patent/SE453336B/sv
Publication of DE3032708A1 publication Critical patent/DE3032708A1/de
Application granted granted Critical
Publication of DE3032708C2 publication Critical patent/DE3032708C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/22—Heat treatment; Thermal decomposition; Chemical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Thin Magnetic Films (AREA)
DE3032708A 1980-08-30 1980-08-30 Verfahren zur Herstellung eines Dünnschicht-Magnetfeld-Sensors Expired DE3032708C2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE3032708A DE3032708C2 (de) 1980-08-30 1980-08-30 Verfahren zur Herstellung eines Dünnschicht-Magnetfeld-Sensors
US06/295,052 US4386114A (en) 1980-08-30 1981-08-21 Method of manufacturing a thin-film magnetic field sensor
GB8125987A GB2083230B (en) 1980-08-30 1981-08-26 Method of manufacturing a thin film magnetic field sensor
FR8116310A FR2495333A1 (fr) 1980-08-30 1981-08-26 Procede de realisation d'un capteur de champ magnetique sous forme d'une couche mince
JP56133438A JPS5776891A (en) 1980-08-30 1981-08-27 Method of fabricating thin film magnetic field sensor
SE8105077A SE453336B (sv) 1980-08-30 1981-08-27 Forfarande for framstellning av en tunnfilmsmagnetfeltssensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3032708A DE3032708C2 (de) 1980-08-30 1980-08-30 Verfahren zur Herstellung eines Dünnschicht-Magnetfeld-Sensors

Publications (2)

Publication Number Publication Date
DE3032708A1 DE3032708A1 (de) 1982-04-29
DE3032708C2 true DE3032708C2 (de) 1987-01-22

Family

ID=6110738

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3032708A Expired DE3032708C2 (de) 1980-08-30 1980-08-30 Verfahren zur Herstellung eines Dünnschicht-Magnetfeld-Sensors

Country Status (6)

Country Link
US (1) US4386114A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5776891A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3032708C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2495333A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2083230B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SE (1) SE453336B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3613619A1 (de) * 1985-04-26 1986-10-30 Sharp K.K., Osaka Duennfilm-magnetkopf

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3229774C2 (de) * 1981-08-10 1987-05-07 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka Magnetoresistives Bauelement
JPS60127527A (ja) * 1983-12-15 1985-07-08 Saiteku Kk 膜状積重磁気記録媒体およびその製造方法
GB2201786B (en) * 1987-03-06 1990-11-28 Gen Electric Plc Magnetometers
US4906858A (en) * 1987-11-13 1990-03-06 Honeywell Inc. Controlled switching circuit
US5236735A (en) * 1989-05-27 1993-08-17 Tdk Corporation Method of producing a thin film magnetic head
DE4013016C2 (de) * 1990-04-24 1996-04-18 Siemens Ag Magnetfeldsensor einer Schalteinrichtung mit Teilen unterschiedlicher Koerzitivfeldstärke
EP0640840B1 (en) * 1993-08-25 2002-10-30 Nippon Telegraph And Telephone Corporation Magnetic field sensing method and apparatus
JPH09508466A (ja) * 1994-01-31 1997-08-26 フラウンホーファー−ゲゼルシャフト・ツール・フェルデルング・デア・アンゲヴァンテン・フォルシュング・エー・ファウ 強磁性材料を検出する平坦化技術で作製された超小型コイル装置
RU2150712C1 (ru) * 1999-05-07 2000-06-10 Институт физики им. Л.В. Киренского СО РАН Датчик магнитного поля
US6743639B1 (en) * 1999-10-13 2004-06-01 Nve Corporation Magnetizable bead detector
RU2190862C2 (ru) * 2000-07-11 2002-10-10 Адамович Борис Андреевич Способ измерения напряженности постоянного магнитного поля и устройство для его осуществления
RU2298202C1 (ru) * 2005-10-17 2007-04-27 Институт химии Дальневосточного отделения Российской академии наук (статус государственного учреждения) (Институт химии ДВО РАН) Способ измерения напряженности магнитного поля
US20110175603A1 (en) * 2008-06-13 2011-07-21 Vladimir Burtman Method and Apparatus for Measuring Magnetic Fields
RU2381515C1 (ru) * 2008-07-30 2010-02-10 Институт физики им. Л.В. Киренского Сибирского отделения РАН Датчик магнитного поля
JP6027819B2 (ja) * 2012-08-20 2016-11-16 日東電工株式会社 配線回路基板
RU2734448C1 (ru) * 2020-02-05 2020-10-16 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" (ФИЦ КНЦ СО РАН, КНЦ СО РАН) Умножитель частоты
RU2756841C1 (ru) * 2021-03-26 2021-10-06 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" Умножитель частоты на полосковом резонаторе с магнитной плёнкой
RU2758540C1 (ru) * 2021-03-29 2021-10-29 Федеральное государственное бюджетное научное учреждение «Федеральный исследовательский центр «Красноярский научный центр Сибирского отделения Российской академии наук» Умножитель частоты на тонкой магнитной пленке

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL239586A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1958-05-28
US3374113A (en) * 1965-01-13 1968-03-19 Bell Telephone Labor Inc Method for controlled aging of thin magnetic films by means of an easy axis annealing treatment
US3677843A (en) * 1970-02-02 1972-07-18 Sylvania Electric Prod Method for fabricating multilayer magnetic devices
DE2223123A1 (de) * 1972-05-12 1973-11-22 Philips Patentverwaltung Magnetische speicherschicht
JPS4965742A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-10-26 1974-06-26
JPS52119879A (en) * 1976-04-02 1977-10-07 Hitachi Ltd Magnetic resistance element
NL7608002A (nl) * 1976-07-20 1978-01-24 Philips Nv Werkwijze ter vervaardiging van een magnetische inrichting.
DE2701296C2 (de) * 1977-01-14 1978-12-07 Philips Patentverwaltung Gmbh, 2000 Hamburg Dünnschicht-Magnetfeld-Sensor
NL7701559A (nl) * 1977-02-15 1978-08-17 Philips Nv Het maken van schuine hellingen aan metaal- patronen, alsmede substraat voor een geinte- greerde schakeling voorzien van een dergelijk patroon.
DE2804127C2 (de) 1978-01-31 1984-03-08 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung eines planen oder in einer Richtung gekrümmten Leuchtstoffschirmes für flache Farbbildanzeigegeräte

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3613619A1 (de) * 1985-04-26 1986-10-30 Sharp K.K., Osaka Duennfilm-magnetkopf

Also Published As

Publication number Publication date
US4386114A (en) 1983-05-31
FR2495333B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-03-23
FR2495333A1 (fr) 1982-06-04
SE453336B (sv) 1988-01-25
JPH022313B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-17
GB2083230A (en) 1982-03-17
JPS5776891A (en) 1982-05-14
DE3032708A1 (de) 1982-04-29
SE8105077L (sv) 1982-03-01
GB2083230B (en) 1984-05-31

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee