JPS5776891A - Method of fabricating thin film magnetic field sensor - Google Patents

Method of fabricating thin film magnetic field sensor

Info

Publication number
JPS5776891A
JPS5776891A JP56133438A JP13343881A JPS5776891A JP S5776891 A JPS5776891 A JP S5776891A JP 56133438 A JP56133438 A JP 56133438A JP 13343881 A JP13343881 A JP 13343881A JP S5776891 A JPS5776891 A JP S5776891A
Authority
JP
Japan
Prior art keywords
thin film
magnetic field
field sensor
film magnetic
fabricating thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56133438A
Other languages
English (en)
Japanese (ja)
Other versions
JPH022313B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Harumusu Maruguretsuto
Ruuchie Horugeru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of JPS5776891A publication Critical patent/JPS5776891A/ja
Publication of JPH022313B2 publication Critical patent/JPH022313B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/22—Heat treatment; Thermal decomposition; Chemical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Thin Magnetic Films (AREA)
JP56133438A 1980-08-30 1981-08-27 Method of fabricating thin film magnetic field sensor Granted JPS5776891A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3032708A DE3032708C2 (de) 1980-08-30 1980-08-30 Verfahren zur Herstellung eines Dünnschicht-Magnetfeld-Sensors

Publications (2)

Publication Number Publication Date
JPS5776891A true JPS5776891A (en) 1982-05-14
JPH022313B2 JPH022313B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-17

Family

ID=6110738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56133438A Granted JPS5776891A (en) 1980-08-30 1981-08-27 Method of fabricating thin film magnetic field sensor

Country Status (6)

Country Link
US (1) US4386114A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5776891A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3032708C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2495333A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2083230B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SE (1) SE453336B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014038681A (ja) * 2012-08-20 2014-02-27 Nitto Denko Corp 配線回路基板

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3229774C2 (de) * 1981-08-10 1987-05-07 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka Magnetoresistives Bauelement
JPS60127527A (ja) * 1983-12-15 1985-07-08 Saiteku Kk 膜状積重磁気記録媒体およびその製造方法
DE3613619A1 (de) * 1985-04-26 1986-10-30 Sharp K.K., Osaka Duennfilm-magnetkopf
GB2201786B (en) * 1987-03-06 1990-11-28 Gen Electric Plc Magnetometers
US4906858A (en) * 1987-11-13 1990-03-06 Honeywell Inc. Controlled switching circuit
US5236735A (en) * 1989-05-27 1993-08-17 Tdk Corporation Method of producing a thin film magnetic head
DE4013016C2 (de) * 1990-04-24 1996-04-18 Siemens Ag Magnetfeldsensor einer Schalteinrichtung mit Teilen unterschiedlicher Koerzitivfeldstärke
EP0640840B1 (en) * 1993-08-25 2002-10-30 Nippon Telegraph And Telephone Corporation Magnetic field sensing method and apparatus
JPH09508466A (ja) * 1994-01-31 1997-08-26 フラウンホーファー−ゲゼルシャフト・ツール・フェルデルング・デア・アンゲヴァンテン・フォルシュング・エー・ファウ 強磁性材料を検出する平坦化技術で作製された超小型コイル装置
RU2150712C1 (ru) * 1999-05-07 2000-06-10 Институт физики им. Л.В. Киренского СО РАН Датчик магнитного поля
US6743639B1 (en) * 1999-10-13 2004-06-01 Nve Corporation Magnetizable bead detector
RU2190862C2 (ru) * 2000-07-11 2002-10-10 Адамович Борис Андреевич Способ измерения напряженности постоянного магнитного поля и устройство для его осуществления
RU2298202C1 (ru) * 2005-10-17 2007-04-27 Институт химии Дальневосточного отделения Российской академии наук (статус государственного учреждения) (Институт химии ДВО РАН) Способ измерения напряженности магнитного поля
US20110175603A1 (en) * 2008-06-13 2011-07-21 Vladimir Burtman Method and Apparatus for Measuring Magnetic Fields
RU2381515C1 (ru) * 2008-07-30 2010-02-10 Институт физики им. Л.В. Киренского Сибирского отделения РАН Датчик магнитного поля
RU2734448C1 (ru) * 2020-02-05 2020-10-16 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" (ФИЦ КНЦ СО РАН, КНЦ СО РАН) Умножитель частоты
RU2756841C1 (ru) * 2021-03-26 2021-10-06 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" Умножитель частоты на полосковом резонаторе с магнитной плёнкой
RU2758540C1 (ru) * 2021-03-29 2021-10-29 Федеральное государственное бюджетное научное учреждение «Федеральный исследовательский центр «Красноярский научный центр Сибирского отделения Российской академии наук» Умножитель частоты на тонкой магнитной пленке

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119879A (en) * 1976-04-02 1977-10-07 Hitachi Ltd Magnetic resistance element

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL239586A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1958-05-28
US3374113A (en) * 1965-01-13 1968-03-19 Bell Telephone Labor Inc Method for controlled aging of thin magnetic films by means of an easy axis annealing treatment
US3677843A (en) * 1970-02-02 1972-07-18 Sylvania Electric Prod Method for fabricating multilayer magnetic devices
DE2223123A1 (de) * 1972-05-12 1973-11-22 Philips Patentverwaltung Magnetische speicherschicht
JPS4965742A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-10-26 1974-06-26
NL7608002A (nl) * 1976-07-20 1978-01-24 Philips Nv Werkwijze ter vervaardiging van een magnetische inrichting.
DE2701296C2 (de) * 1977-01-14 1978-12-07 Philips Patentverwaltung Gmbh, 2000 Hamburg Dünnschicht-Magnetfeld-Sensor
NL7701559A (nl) * 1977-02-15 1978-08-17 Philips Nv Het maken van schuine hellingen aan metaal- patronen, alsmede substraat voor een geinte- greerde schakeling voorzien van een dergelijk patroon.
DE2804127C2 (de) 1978-01-31 1984-03-08 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung eines planen oder in einer Richtung gekrümmten Leuchtstoffschirmes für flache Farbbildanzeigegeräte

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119879A (en) * 1976-04-02 1977-10-07 Hitachi Ltd Magnetic resistance element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014038681A (ja) * 2012-08-20 2014-02-27 Nitto Denko Corp 配線回路基板

Also Published As

Publication number Publication date
DE3032708C2 (de) 1987-01-22
US4386114A (en) 1983-05-31
FR2495333B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-03-23
FR2495333A1 (fr) 1982-06-04
SE453336B (sv) 1988-01-25
JPH022313B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-17
GB2083230A (en) 1982-03-17
DE3032708A1 (de) 1982-04-29
SE8105077L (sv) 1982-03-01
GB2083230B (en) 1984-05-31

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