JPS56147312A - Method of manufacturing ferrodielectric thin film - Google Patents
Method of manufacturing ferrodielectric thin filmInfo
- Publication number
- JPS56147312A JPS56147312A JP4978980A JP4978980A JPS56147312A JP S56147312 A JPS56147312 A JP S56147312A JP 4978980 A JP4978980 A JP 4978980A JP 4978980 A JP4978980 A JP 4978980A JP S56147312 A JPS56147312 A JP S56147312A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- thin film
- ferrodielectric
- ferrodielectric thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Landscapes
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4978980A JPS56147312A (en) | 1980-04-15 | 1980-04-15 | Method of manufacturing ferrodielectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4978980A JPS56147312A (en) | 1980-04-15 | 1980-04-15 | Method of manufacturing ferrodielectric thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56147312A true JPS56147312A (en) | 1981-11-16 |
Family
ID=12840916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4978980A Pending JPS56147312A (en) | 1980-04-15 | 1980-04-15 | Method of manufacturing ferrodielectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56147312A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59220913A (en) * | 1983-05-31 | 1984-12-12 | 日本曹達株式会社 | Titanium zirconate lead dielectric thin film and method of producing same |
JPS61274342A (en) * | 1985-05-29 | 1986-12-04 | Ube Ind Ltd | Ferroelectric element and manufacture thereof |
-
1980
- 1980-04-15 JP JP4978980A patent/JPS56147312A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59220913A (en) * | 1983-05-31 | 1984-12-12 | 日本曹達株式会社 | Titanium zirconate lead dielectric thin film and method of producing same |
JPH0318281B2 (en) * | 1983-05-31 | 1991-03-12 | Nippon Soda Co | |
JPS61274342A (en) * | 1985-05-29 | 1986-12-04 | Ube Ind Ltd | Ferroelectric element and manufacture thereof |
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