DE3020411C2 - Vorrichtung zum Messen der Verschiebung zweier Körper - Google Patents

Vorrichtung zum Messen der Verschiebung zweier Körper

Info

Publication number
DE3020411C2
DE3020411C2 DE3020411A DE3020411A DE3020411C2 DE 3020411 C2 DE3020411 C2 DE 3020411C2 DE 3020411 A DE3020411 A DE 3020411A DE 3020411 A DE3020411 A DE 3020411A DE 3020411 C2 DE3020411 C2 DE 3020411C2
Authority
DE
Germany
Prior art keywords
electrodes
electrode
measuring
window
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3020411A
Other languages
German (de)
English (en)
Other versions
DE3020411A1 (de
Inventor
Hans Ulrich St.Sulpice Waadt Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE3020411A priority Critical patent/DE3020411C2/de
Priority to CH331681A priority patent/CH643652A5/fr
Priority to FR8110347A priority patent/FR2483603B1/fr
Priority to US06/267,040 priority patent/US4449179A/en
Priority to JP56080680A priority patent/JPS5761914A/ja
Priority to GB8116126A priority patent/GB2078966B/en
Publication of DE3020411A1 publication Critical patent/DE3020411A1/de
Application granted granted Critical
Publication of DE3020411C2 publication Critical patent/DE3020411C2/de
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
DE3020411A 1980-05-27 1980-05-27 Vorrichtung zum Messen der Verschiebung zweier Körper Expired DE3020411C2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE3020411A DE3020411C2 (de) 1980-05-27 1980-05-27 Vorrichtung zum Messen der Verschiebung zweier Körper
CH331681A CH643652A5 (fr) 1980-05-27 1981-05-21 Dispositif pour la mesure capacitive de deplacements.
FR8110347A FR2483603B1 (fr) 1980-05-27 1981-05-25 Dispositif pour la mesure capacitive de deplacements
US06/267,040 US4449179A (en) 1980-05-27 1981-05-26 Means for capacitive measurement of displacements
JP56080680A JPS5761914A (en) 1980-05-27 1981-05-27 Means of measuring deviation capacitywise
GB8116126A GB2078966B (en) 1980-05-27 1981-05-27 Capacitive displacement measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3020411A DE3020411C2 (de) 1980-05-27 1980-05-27 Vorrichtung zum Messen der Verschiebung zweier Körper

Publications (2)

Publication Number Publication Date
DE3020411A1 DE3020411A1 (de) 1981-12-24
DE3020411C2 true DE3020411C2 (de) 1983-09-22

Family

ID=6103514

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3020411A Expired DE3020411C2 (de) 1980-05-27 1980-05-27 Vorrichtung zum Messen der Verschiebung zweier Körper

Country Status (6)

Country Link
US (1) US4449179A (US07582779-20090901-C00044.png)
JP (1) JPS5761914A (US07582779-20090901-C00044.png)
CH (1) CH643652A5 (US07582779-20090901-C00044.png)
DE (1) DE3020411C2 (US07582779-20090901-C00044.png)
FR (1) FR2483603B1 (US07582779-20090901-C00044.png)
GB (1) GB2078966B (US07582779-20090901-C00044.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3440221A1 (de) * 1984-11-03 1986-05-07 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Messuhr mit digitaler anzeigeeinheit
DE10008093B4 (de) * 2000-02-22 2007-07-05 Ifm Electronic Gmbh Kapazitives Füllstandsmessgerät

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1152526B (it) * 1982-09-03 1987-01-07 Giacomo Giacomello Trasdutture a nastro metallico per misure micrometriche di grandezze lineari
DE3301741A1 (de) * 1983-01-20 1984-07-26 Bosch Gmbh Robert Kraftstoffpumpe mit permanentmagnetischer vorerregung und geregeltem kolbenhub
US4606008A (en) * 1983-07-25 1986-08-12 Cain Encoder Company Angular position detector
AT383212B (de) * 1985-07-10 1987-06-10 Rsf Elektronik Gmbh Laengenmesssystem fuer werkzeugmaschinen
CH665714A5 (fr) * 1985-11-22 1988-05-31 Hans Ulrich Meyer Dispositif de mesure capacitif de longueurs et d'angles.
JPS62156519A (ja) * 1985-12-27 1987-07-11 Mitsutoyo Mfg Corp 静電容量型エンコ−ダ
CH670306A5 (US07582779-20090901-C00044.png) * 1986-11-13 1989-05-31 Hans Ulrich Meyer
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
CH677044A5 (US07582779-20090901-C00044.png) * 1988-06-20 1991-03-28 Weber Hans R
US5049824A (en) * 1988-12-12 1991-09-17 Mitutoyo Corp. Phase discrimination type electrostatic capacity detector
US5070302A (en) * 1989-09-05 1991-12-03 Eastman Kodak Company Capacitance probe for measuring a width of a clearance between parts
CH685214A5 (fr) * 1991-10-15 1995-04-28 Hans Ulrich Meyer Capteur capacitif de position.
US5237307A (en) * 1991-11-27 1993-08-17 The United States Of America As Represented By The United States Department Of Energy Non-contact tamper sensing by electronic means
US5406715A (en) * 1992-07-07 1995-04-18 Mitutoyo Corporation Tape measure device
US5477621A (en) * 1993-04-26 1995-12-26 Mitutoyo Corporation Electrical capacitance instrument and manufacturing method of the same
US5731707A (en) * 1996-04-17 1998-03-24 Mitutoyo Corporation Method and apparatus for synthesizing spatial waveforms in an electronic position encoder
DE69621334T2 (de) * 1996-10-11 2003-01-09 Tesa Brown & Sharpe Sa Kapazitive Dimensionsmesseinrichtung
CN1064754C (zh) * 1998-12-18 2001-04-18 赵飙 改进型电容性位移传感器
JP4350220B2 (ja) * 1999-08-06 2009-10-21 株式会社ミツトヨ 変位測定装置
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
US6892590B1 (en) * 2003-11-04 2005-05-17 Andermotion Technologies Llc Single-balanced shield electrode configuration for use in capacitive displacement sensing systems and methods
US7574950B2 (en) 2004-04-15 2009-08-18 Milwaukee Electric Tool Corporation Bevel adjustment assembly for a saw
US7259695B2 (en) * 2004-09-17 2007-08-21 Andermotion Technologies Llc Low-profile multi-turn encoder systems and methods
CN102988054A (zh) * 2012-11-23 2013-03-27 东华大学 一种柔性无线电子卷尺的智能化测量人体的装置及方法
CN103822571B (zh) * 2014-03-19 2016-11-02 重庆理工大学 基于单排多层结构的电场式时栅直线位移传感器
DE102022117186A1 (de) 2022-07-11 2024-01-11 Ewellix AB Positionsgeber, Linearaktuator und Verfahren zur Positionsbestimmung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2925590A (en) * 1957-08-01 1960-02-16 North American Aviation Inc Capacitive pickoff
US3039051A (en) * 1959-08-12 1962-06-12 Zellweger Uster Ag Apparatus for gaging textile materials
US3312892A (en) * 1964-05-04 1967-04-04 Technology Instr Corp Of Calif Contactless electrical transducer having moving parts
US3487402A (en) * 1966-09-08 1969-12-30 Gen Electric Digital capacitance motion transducer
DE2149881B1 (de) * 1971-10-06 1973-02-01 Hartmann & Braun Ag Kapazitiver geber
GB1370233A (en) * 1972-01-06 1974-10-16 Goring Kerr Ltd Electrical sorting apparatus
CH539837A (de) * 1972-03-22 1973-07-31 Ulrich Meyer Hans Kapazitive Längenmesseinrichtung
JPS5412824B2 (US07582779-20090901-C00044.png) * 1972-04-20 1979-05-25
FR2213480B1 (US07582779-20090901-C00044.png) * 1973-01-08 1979-01-12 Cii
US3824460A (en) * 1973-04-02 1974-07-16 R Gustafson Leakage sensor
JPS5263361A (en) * 1975-11-19 1977-05-25 Fujitsu Ltd Static electricity angle detection device
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
FR2457003A1 (fr) * 1979-05-15 1980-12-12 Herve Marcel Capteur capacitif a dielectrique mobile

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3440221A1 (de) * 1984-11-03 1986-05-07 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Messuhr mit digitaler anzeigeeinheit
DE10008093B4 (de) * 2000-02-22 2007-07-05 Ifm Electronic Gmbh Kapazitives Füllstandsmessgerät

Also Published As

Publication number Publication date
FR2483603A1 (fr) 1981-12-04
FR2483603B1 (fr) 1986-01-03
GB2078966B (en) 1984-04-18
CH643652A5 (fr) 1984-06-15
US4449179A (en) 1984-05-15
JPS5761914A (en) 1982-04-14
JPH0136563B2 (US07582779-20090901-C00044.png) 1989-08-01
GB2078966A (en) 1982-01-13
DE3020411A1 (de) 1981-12-24

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee