DE2944083C2 - - Google Patents
Info
- Publication number
- DE2944083C2 DE2944083C2 DE19792944083 DE2944083A DE2944083C2 DE 2944083 C2 DE2944083 C2 DE 2944083C2 DE 19792944083 DE19792944083 DE 19792944083 DE 2944083 A DE2944083 A DE 2944083A DE 2944083 C2 DE2944083 C2 DE 2944083C2
- Authority
- DE
- Germany
- Prior art keywords
- cathode
- carbon material
- contact surfaces
- layer structure
- cathode tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 34
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 16
- 229910002804 graphite Inorganic materials 0.000 claims description 14
- 239000010439 graphite Substances 0.000 claims description 14
- 239000003245 coal Substances 0.000 claims description 12
- 238000007731 hot pressing Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000003575 carbonaceous material Substances 0.000 claims description 6
- 238000005266 casting Methods 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000007849 furan resin Substances 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 229910021397 glassy carbon Inorganic materials 0.000 description 10
- 238000005259 measurement Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000000197 pyrolysis Methods 0.000 description 4
- 239000012071 phase Substances 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 229910021469 graphitizable carbon Inorganic materials 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000013081 microcrystal Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910021383 artificial graphite Inorganic materials 0.000 description 1
- WZTQWXKHLAJTRC-UHFFFAOYSA-N benzyl 2-amino-6,7-dihydro-4h-[1,3]thiazolo[5,4-c]pyridine-5-carboxylate Chemical compound C1C=2SC(N)=NC=2CCN1C(=O)OCC1=CC=CC=C1 WZTQWXKHLAJTRC-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 238000010000 carbonizing Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 238000005087 graphitization Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
- H01J1/18—Supports; Vibration-damping arrangements
Landscapes
- Solid Thermionic Cathode (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53133795A JPS6023456B2 (ja) | 1978-11-01 | 1978-11-01 | 熱電子陰極装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2944083A1 DE2944083A1 (de) | 1980-05-14 |
| DE2944083C2 true DE2944083C2 (en:Method) | 1987-09-17 |
Family
ID=15113190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19792944083 Granted DE2944083A1 (de) | 1978-11-01 | 1979-10-31 | Kathodeneinrichtung zur abgabe von thermionen |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS6023456B2 (en:Method) |
| DE (1) | DE2944083A1 (en:Method) |
| FR (1) | FR2440610A1 (en:Method) |
| GB (1) | GB2038541B (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240347311A1 (en) * | 2021-07-22 | 2024-10-17 | Asml Netherlands B.V. | System and apparatus for stabilizing electron sources in charged particle systems |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58147945A (ja) * | 1982-02-25 | 1983-09-02 | Toshiba Corp | 電子銃の使用方法 |
| JP4951477B2 (ja) | 2006-12-04 | 2012-06-13 | 電気化学工業株式会社 | 電子放出源 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3532923A (en) * | 1969-03-17 | 1970-10-06 | Ibm | Pyrolytic graphite support for lanthanum hexaboride cathode emitter |
| JPS5277661A (en) * | 1975-12-24 | 1977-06-30 | Jeol Ltd | Electron gun |
| US4054946A (en) * | 1976-09-28 | 1977-10-18 | Bell Telephone Laboratories, Incorporated | Electron source of a single crystal of lanthanum hexaboride emitting surface of (110) crystal plane |
| JPS53128971A (en) * | 1977-04-18 | 1978-11-10 | Hitachi Ltd | Manufacture of electron radiation cathode |
| CH617793A5 (en:Method) * | 1977-09-02 | 1980-06-13 | Balzers Hochvakuum |
-
1978
- 1978-11-01 JP JP53133795A patent/JPS6023456B2/ja not_active Expired
-
1979
- 1979-10-31 GB GB7937723A patent/GB2038541B/en not_active Expired
- 1979-10-31 DE DE19792944083 patent/DE2944083A1/de active Granted
- 1979-10-31 FR FR7926977A patent/FR2440610A1/fr active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240347311A1 (en) * | 2021-07-22 | 2024-10-17 | Asml Netherlands B.V. | System and apparatus for stabilizing electron sources in charged particle systems |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2440610B1 (en:Method) | 1984-03-16 |
| GB2038541A (en) | 1980-07-23 |
| FR2440610A1 (fr) | 1980-05-30 |
| DE2944083A1 (de) | 1980-05-14 |
| JPS6023456B2 (ja) | 1985-06-07 |
| GB2038541B (en) | 1983-03-23 |
| JPS5562639A (en) | 1980-05-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8125 | Change of the main classification |
Ipc: H01J 9/04 |
|
| 8181 | Inventor (new situation) |
Free format text: TANJI, HIROAKI SAITO, MITSUAKI ISHII, MASAJI, MACHIDA, TOKIO/TOKYO, JP |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |