DE2940064A1 - Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer - Google Patents

Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer

Info

Publication number
DE2940064A1
DE2940064A1 DE19792940064 DE2940064A DE2940064A1 DE 2940064 A1 DE2940064 A1 DE 2940064A1 DE 19792940064 DE19792940064 DE 19792940064 DE 2940064 A DE2940064 A DE 2940064A DE 2940064 A1 DE2940064 A1 DE 2940064A1
Authority
DE
Germany
Prior art keywords
chamber
valve
vacuum
evaporator
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19792940064
Other languages
German (de)
English (en)
Inventor
Peter 6053 Obertshausen Mahler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19792940064 priority Critical patent/DE2940064A1/de
Priority to CH460080A priority patent/CH643598A5/de
Priority to US06/181,456 priority patent/US4338883A/en
Priority to GB8030547A priority patent/GB2062690B/en
Priority to JP13590280A priority patent/JPS5658966A/ja
Priority to FR8021160A priority patent/FR2466513A1/fr
Publication of DE2940064A1 publication Critical patent/DE2940064A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE19792940064 1979-10-03 1979-10-03 Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer Withdrawn DE2940064A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19792940064 DE2940064A1 (de) 1979-10-03 1979-10-03 Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer
CH460080A CH643598A5 (de) 1979-10-03 1980-06-16 Vakuumaufdampfanlage mit einer ventilkammer, einer bedampfungskammer und einer verdampferkammer.
US06/181,456 US4338883A (en) 1979-10-03 1980-08-25 Vacuum vapor-deposition installation with a vacuum chamber, a vaporizing chamber and an evaporizing chamber
GB8030547A GB2062690B (en) 1979-10-03 1980-09-22 Vacuum vapour-deposition apparatus
JP13590280A JPS5658966A (en) 1979-10-03 1980-10-01 Portioning operation type vacuum vapor depositing apparatus
FR8021160A FR2466513A1 (fr) 1979-10-03 1980-10-02 Installation de depot de materiaux vaporises sous vide, possedant une chambre a soupape et des chambres de depot et d'evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792940064 DE2940064A1 (de) 1979-10-03 1979-10-03 Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer

Publications (1)

Publication Number Publication Date
DE2940064A1 true DE2940064A1 (de) 1981-04-16

Family

ID=6082573

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792940064 Withdrawn DE2940064A1 (de) 1979-10-03 1979-10-03 Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer

Country Status (6)

Country Link
US (1) US4338883A (OSRAM)
JP (1) JPS5658966A (OSRAM)
CH (1) CH643598A5 (OSRAM)
DE (1) DE2940064A1 (OSRAM)
FR (1) FR2466513A1 (OSRAM)
GB (1) GB2062690B (OSRAM)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4418646A (en) * 1982-03-29 1983-12-06 Eaton Corporation Load lock valve
US4464342A (en) * 1982-05-14 1984-08-07 At&T Bell Laboratories Molecular beam epitaxy apparatus for handling phosphorus
US4478174A (en) * 1983-02-25 1984-10-23 Canadian Patents & Development Limited Vacuum coating vessel with movable shutter plate
FR2549857B1 (fr) * 1983-07-26 1985-10-04 Allovon Michel Dispositif d'evaporation sous vide
US4607593A (en) * 1983-12-23 1986-08-26 U.S. Philips Corporation Apparatus for processing articles in a controlled environment
US4592926A (en) * 1984-05-21 1986-06-03 Machine Technology, Inc. Processing apparatus and method
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.
US4966519A (en) * 1985-10-24 1990-10-30 Texas Instruments Incorporated Integrated circuit processing system
US4923584A (en) * 1988-10-31 1990-05-08 Eaton Corporation Sealing apparatus for a vacuum processing system
US5002010A (en) * 1989-10-18 1991-03-26 Varian Associates, Inc. Vacuum vessel
JP2644912B2 (ja) * 1990-08-29 1997-08-25 株式会社日立製作所 真空処理装置及びその運転方法
JPH0936198A (ja) * 1995-07-19 1997-02-07 Hitachi Ltd 真空処理装置およびそれを用いた半導体製造ライン
US6103069A (en) * 1997-03-31 2000-08-15 Applied Materials, Inc. Chamber design with isolation valve to preserve vacuum during maintenance
WO2013074345A1 (en) 2011-11-18 2013-05-23 First Solar, Inc. Vapor transport deposition method and system for material co-deposition

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3206322A (en) * 1960-10-31 1965-09-14 Morgan John Robert Vacuum deposition means and methods for manufacture of electronic components
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus
US3656454A (en) * 1970-11-23 1972-04-18 Air Reduction Vacuum coating apparatus
DE2207957A1 (de) * 1971-03-15 1972-09-28 Balzers Hochvakuum Gmbh, 6000 Frankfurt Vakuumanlage mit zwei getrennt evakuierbaren Kammern zum Behandeln von Gut
DE2330710A1 (de) * 1973-06-16 1975-01-09 Leybold Heraeus Gmbh & Co Kg Vakuumaufdampfvorrichtung mit mehreren kammern
DE2454544A1 (de) * 1973-11-22 1975-07-31 Balzers Hochvakuum Vakuumbeschichtungsanlage

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3524426A (en) * 1968-02-29 1970-08-18 Libbey Owens Ford Glass Co Apparatus for coating by thermal evaporation
US3649339A (en) * 1969-09-05 1972-03-14 Eugene C Smith Apparatus and method for securing a high vacuum for particle coating process
US3921572A (en) * 1974-02-25 1975-11-25 Ibm Vacuum coating apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3206322A (en) * 1960-10-31 1965-09-14 Morgan John Robert Vacuum deposition means and methods for manufacture of electronic components
US3656454A (en) * 1970-11-23 1972-04-18 Air Reduction Vacuum coating apparatus
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus
DE2207957A1 (de) * 1971-03-15 1972-09-28 Balzers Hochvakuum Gmbh, 6000 Frankfurt Vakuumanlage mit zwei getrennt evakuierbaren Kammern zum Behandeln von Gut
DE2330710A1 (de) * 1973-06-16 1975-01-09 Leybold Heraeus Gmbh & Co Kg Vakuumaufdampfvorrichtung mit mehreren kammern
DE2454544A1 (de) * 1973-11-22 1975-07-31 Balzers Hochvakuum Vakuumbeschichtungsanlage

Also Published As

Publication number Publication date
JPS5658966A (en) 1981-05-22
CH643598A5 (de) 1984-06-15
US4338883A (en) 1982-07-13
GB2062690A (en) 1981-05-28
FR2466513A1 (fr) 1981-04-10
GB2062690B (en) 1984-05-02
FR2466513B1 (OSRAM) 1984-04-27

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8139 Disposal/non-payment of the annual fee