DE2939844C2 - - Google Patents
Info
- Publication number
- DE2939844C2 DE2939844C2 DE2939844A DE2939844A DE2939844C2 DE 2939844 C2 DE2939844 C2 DE 2939844C2 DE 2939844 A DE2939844 A DE 2939844A DE 2939844 A DE2939844 A DE 2939844A DE 2939844 C2 DE2939844 C2 DE 2939844C2
- Authority
- DE
- Germany
- Prior art keywords
- section
- vibration
- vibrator
- bearing
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010453 quartz Substances 0.000 claims description 63
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 63
- 239000013078 crystal Substances 0.000 claims description 19
- 238000013016 damping Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 36
- 238000003860 storage Methods 0.000 description 21
- 230000010355 oscillation Effects 0.000 description 15
- 229910000679 solder Inorganic materials 0.000 description 15
- 238000006073 displacement reaction Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 230000035939 shock Effects 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 229960002050 hydrofluoric acid Drugs 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/0211—Means for compensation or elimination of undesirable effects of reflections
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0509—Holders; Supports for bulk acoustic wave devices consisting of adhesive elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16073778A JPS5585119A (en) | 1978-12-21 | 1978-12-21 | Piezoelectric oscillator of profile oscillation mode |
| JP16057178A JPS5585120A (en) | 1978-12-22 | 1978-12-22 | Small sized crystal oscillator of profile oscillation mode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2939844A1 DE2939844A1 (de) | 1980-07-10 |
| DE2939844C2 true DE2939844C2 (US06566495-20030520-M00011.png) | 1987-07-30 |
Family
ID=26487043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19792939844 Granted DE2939844A1 (de) | 1978-12-21 | 1979-10-02 | Quarzschwinger |
Country Status (6)
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4321949A1 (de) * | 1992-07-03 | 1994-01-05 | Murata Manufacturing Co | Vibratoreinheit |
| DE4322144A1 (de) * | 1992-07-03 | 1994-01-05 | Murata Manufacturing Co | Vibratoreinheit |
| DE4403949A1 (de) * | 1993-02-09 | 1994-08-11 | Murata Manufacturing Co | Baukomponente mit piezoelektrischer Resonanz |
| DE4412963A1 (de) * | 1993-04-14 | 1994-10-20 | Murata Manufacturing Co | Resonator mit Breiten-Dehnungsmode |
| DE4412964A1 (de) * | 1993-04-14 | 1994-10-27 | Murata Manufacturing Co | Vibrator |
| DE4427993A1 (de) * | 1993-08-09 | 1995-02-16 | Murata Manufacturing Co | Piezoelektrische Resonanzkomponente |
| DE4429139A1 (de) * | 1993-08-17 | 1995-02-23 | Murata Manufacturing Co | Abzweigfilter |
| DE4429132A1 (de) * | 1993-08-17 | 1995-02-23 | Murata Manufacturing Co | Abzweigfilter |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH641632B (fr) * | 1981-01-15 | Asulab Sa | Micro-resonateur piezo-electrique. | |
| US4447753A (en) * | 1981-03-25 | 1984-05-08 | Seiko Instruments & Electronics Ltd. | Miniature GT-cut quartz resonator |
| JPS57197906A (en) * | 1981-05-29 | 1982-12-04 | Seiko Instr & Electronics Ltd | Gt cut quartz oscillator |
| JPS5833308A (ja) * | 1981-08-21 | 1983-02-26 | Seiko Instr & Electronics Ltd | 結合水晶振動子 |
| US4445065A (en) * | 1981-09-14 | 1984-04-24 | The Singer Company | Non-prismal beam resonator |
| US4633124A (en) * | 1982-03-16 | 1986-12-30 | Kabushiki Kaisha Daini Seikosha | Mount for quartz crystal resonator |
| GB2125211A (en) * | 1982-08-03 | 1984-02-29 | Standard Telephones Cables Ltd | Mechanical support of piezoelectric devices |
| GB2146839B (en) * | 1983-07-27 | 1987-04-01 | Nihon Dempa Kogyo Co | Piezoelectric resonator |
| JPS60129717U (ja) * | 1984-02-08 | 1985-08-30 | 日本電波工業株式会社 | 圧電振動子 |
| CH655224GA3 (US06566495-20030520-M00011.png) * | 1984-04-06 | 1986-04-15 | ||
| JPS6146609A (ja) * | 1984-08-10 | 1986-03-06 | Murata Mfg Co Ltd | 圧電振動子 |
| JPS61131607A (ja) * | 1984-11-29 | 1986-06-19 | Murata Mfg Co Ltd | 圧電振動子ウエハおよび圧電振動子の製造方法 |
| JPS61288132A (ja) * | 1985-06-17 | 1986-12-18 | Yokogawa Electric Corp | 水晶温度計 |
| US4900971A (en) * | 1988-03-10 | 1990-02-13 | Seiko Electronic Components Ltd. | Face shear mode quartz crystal resonator |
| GB2224159B (en) * | 1988-09-09 | 1992-07-08 | Seiko Electronic Components | Resonator |
| US5311096A (en) * | 1991-01-25 | 1994-05-10 | Seiko Electronic Components Ltd. | KT cut width-extensional mode quartz crystal resonator |
| JPH0522070A (ja) * | 1991-07-10 | 1993-01-29 | Seiko Electronic Components Ltd | 縦水晶振動子 |
| US5391844A (en) * | 1992-04-03 | 1995-02-21 | Weigh-Tronix Inc | Load cell |
| US5442146A (en) * | 1992-04-03 | 1995-08-15 | Weigh-Tronix, Inc. | Counting scale and load cell assembly therefor |
| US5336854A (en) * | 1992-04-03 | 1994-08-09 | Weigh-Tronix, Inc. | Electronic force sensing load cell |
| US5313023A (en) * | 1992-04-03 | 1994-05-17 | Weigh-Tronix, Inc. | Load cell |
| US5420472A (en) * | 1992-06-11 | 1995-05-30 | Motorola, Inc. | Method and apparatus for thermal coefficient of expansion matched substrate attachment |
| DE4419085C2 (de) * | 1993-05-31 | 1999-09-02 | Murata Manufacturing Co | Chipförmiger Baustein mit piezoelektrischer Resonanz |
| US5481154A (en) * | 1993-09-28 | 1996-01-02 | Murata Manufacturing Co., Ltd. | Piezo-resonator |
| JP3114526B2 (ja) * | 1994-10-17 | 2000-12-04 | 株式会社村田製作所 | チップ型圧電共振部品 |
| US5978972A (en) * | 1996-06-14 | 1999-11-09 | Johns Hopkins University | Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head |
| JP2000270574A (ja) * | 1999-03-16 | 2000-09-29 | Seiko Instruments Inc | 圧電アクチュエータおよびその製造方法 |
| JP3620024B2 (ja) * | 2001-07-06 | 2005-02-16 | 有限会社ピエデック技術研究所 | 幅縦圧電結晶振動子 |
| US6707234B1 (en) * | 2002-09-19 | 2004-03-16 | Piedek Technical Laboratory | Quartz crystal unit, its manufacturing method and quartz crystal oscillator |
| US20050073078A1 (en) | 2003-10-03 | 2005-04-07 | Markus Lutz | Frequency compensated oscillator design for process tolerances |
| US8349611B2 (en) * | 2009-02-17 | 2013-01-08 | Leversense Llc | Resonant sensors and methods of use thereof for the determination of analytes |
| US8513863B2 (en) | 2009-06-11 | 2013-08-20 | Qualcomm Mems Technologies, Inc. | Piezoelectric resonator with two layers |
| US8106724B1 (en) * | 2009-07-23 | 2012-01-31 | Integrated Device Technologies, Inc. | Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor |
| US8624471B1 (en) | 2010-07-30 | 2014-01-07 | Georgia Tech Research Corporation | Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethers |
| US20120241876A1 (en) * | 2011-03-25 | 2012-09-27 | Still Charles A | System and method for improving frequency response |
| US9083263B2 (en) * | 2012-12-13 | 2015-07-14 | Schlumberger Technology Corporation | Apparatus to provide a time reference |
| FR3002095B1 (fr) | 2013-02-14 | 2015-02-20 | Onera (Off Nat Aerospatiale) | Structure plane de resonateur mecanique decouple par des vibrations de flexion et d'extension-compression |
| JP6338367B2 (ja) * | 2013-12-24 | 2018-06-06 | 日本電波工業株式会社 | 水晶振動子 |
| US9503048B2 (en) * | 2014-11-21 | 2016-11-22 | Sii Crystal Technology Inc. | Piezoelectric vibrating reed and piezoelectric vibrator |
| WO2016158048A1 (ja) | 2015-03-31 | 2016-10-06 | 株式会社村田製作所 | 共振子 |
| US10938375B2 (en) | 2015-03-31 | 2021-03-02 | Murata Manufacturing Co, Ltd. | Resonator |
| US10778182B2 (en) | 2015-03-31 | 2020-09-15 | Murata Manufacturing Co., Ltd. | Resonator |
| JP6646899B2 (ja) * | 2015-09-21 | 2020-02-14 | 株式会社村田製作所 | 共振子及び共振装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2009379C3 (de) * | 1970-02-27 | 1975-01-30 | Gebrueder Junghans Gmbh, 7230 Schramberg | Piezoelektrischer Oszillator in Form einer Stimmgabel als Zeitnormal für zeithaltende Geräte |
| US3828210A (en) * | 1973-01-22 | 1974-08-06 | Motorola Inc | Temperature compensated mounting structure for coupled resonator crystals |
| CH578803A5 (US06566495-20030520-M00011.png) * | 1974-05-14 | 1976-08-13 | Suisse Horlogerie | |
| JPS583602B2 (ja) * | 1974-11-09 | 1983-01-22 | セイコーエプソン株式会社 | スイシヨウシンドウシ |
| JPS5227394A (en) * | 1975-08-27 | 1977-03-01 | Seiko Instr & Electronics Ltd | Crystal oscillator |
| JPS5818808B2 (ja) * | 1975-10-28 | 1983-04-14 | セイコーインスツルメンツ株式会社 | アツミスベリスイシヨウシンドウシ |
| JPS5253690A (en) * | 1975-10-28 | 1977-04-30 | Seiko Instr & Electronics Ltd | Thickness sliding crystal vibrator |
| JPS5852366B2 (ja) * | 1975-11-06 | 1983-11-22 | セイコーエプソン株式会社 | ハバスベリアツデンシンドウシ |
| CH608335B (de) * | 1976-09-14 | Ebauches Sa | Microresonateur piezoelectrique. |
-
1979
- 1979-10-02 DE DE19792939844 patent/DE2939844A1/de active Granted
- 1979-10-24 US US06/087,751 patent/US4350918A/en not_active Expired - Lifetime
- 1979-10-24 GB GB7936856A patent/GB2043995B/en not_active Expired
- 1979-12-21 CH CH1143179A patent/CH639529B/fr unknown
-
1984
- 1984-03-09 SG SG217/84A patent/SG21784G/en unknown
-
1986
- 1986-08-28 HK HK644/86A patent/HK64486A/xx not_active IP Right Cessation
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4322144A1 (de) * | 1992-07-03 | 1994-01-05 | Murata Manufacturing Co | Vibratoreinheit |
| DE4321949A1 (de) * | 1992-07-03 | 1994-01-05 | Murata Manufacturing Co | Vibratoreinheit |
| DE4403949A1 (de) * | 1993-02-09 | 1994-08-11 | Murata Manufacturing Co | Baukomponente mit piezoelektrischer Resonanz |
| DE4403949C2 (de) * | 1993-02-09 | 1999-10-14 | Murata Manufacturing Co | Piezoelektrische Resonanzkomponente vom Energiefalle-Typ |
| DE4412963C2 (de) * | 1993-04-14 | 1999-04-01 | Murata Manufacturing Co | Resonator mit Breiten-Dehnungsmode |
| DE4412963A1 (de) * | 1993-04-14 | 1994-10-20 | Murata Manufacturing Co | Resonator mit Breiten-Dehnungsmode |
| DE4412964A1 (de) * | 1993-04-14 | 1994-10-27 | Murata Manufacturing Co | Vibrator |
| DE4427993A1 (de) * | 1993-08-09 | 1995-02-16 | Murata Manufacturing Co | Piezoelektrische Resonanzkomponente |
| DE4427993C2 (de) * | 1993-08-09 | 1999-04-29 | Murata Manufacturing Co | Piezoelektrische Resonanzkomponente |
| DE4429139A1 (de) * | 1993-08-17 | 1995-02-23 | Murata Manufacturing Co | Abzweigfilter |
| DE4429132C2 (de) * | 1993-08-17 | 1998-06-04 | Murata Manufacturing Co | Abzweigfilter |
| DE4429139C2 (de) * | 1993-08-17 | 1998-06-04 | Murata Manufacturing Co | Abzweigfilter |
| DE4429132A1 (de) * | 1993-08-17 | 1995-02-23 | Murata Manufacturing Co | Abzweigfilter |
Also Published As
| Publication number | Publication date |
|---|---|
| US4350918A (en) | 1982-09-21 |
| GB2043995B (en) | 1983-06-15 |
| DE2939844A1 (de) | 1980-07-10 |
| CH639529GA3 (US06566495-20030520-M00011.png) | 1983-11-30 |
| GB2043995A (en) | 1980-10-08 |
| SG21784G (en) | 1990-07-06 |
| CH639529B (fr) | |
| HK64486A (en) | 1986-09-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8127 | New person/name/address of the applicant |
Owner name: SEIKO INSTRUMENTS AND ELECTRONICS LTD., TOKIO, JP |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |