DE2904801A1 - Verfahren zur herstellung eines zwischenproduktes vom polamidsaeuretyp fuer die herstellung von halbleitern - Google Patents

Verfahren zur herstellung eines zwischenproduktes vom polamidsaeuretyp fuer die herstellung von halbleitern

Info

Publication number
DE2904801A1
DE2904801A1 DE19792904801 DE2904801A DE2904801A1 DE 2904801 A1 DE2904801 A1 DE 2904801A1 DE 19792904801 DE19792904801 DE 19792904801 DE 2904801 A DE2904801 A DE 2904801A DE 2904801 A1 DE2904801 A1 DE 2904801A1
Authority
DE
Germany
Prior art keywords
semiconductors
purified
acid type
acid dianhydride
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19792904801
Other languages
German (de)
English (en)
Inventor
Seiki Harada
Daisuke Makino
Yasuo Miyadera
Atsushi Saiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of DE2904801A1 publication Critical patent/DE2904801A1/de
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1003—Preparatory processes
    • C08G73/1007—Preparatory processes from tetracarboxylic acids or derivatives and diamines
    • C08G73/1028—Preparatory processes from tetracarboxylic acids or derivatives and diamines characterised by the process itself, e.g. steps, continuous
    • C08G73/1032—Preparatory processes from tetracarboxylic acids or derivatives and diamines characterised by the process itself, e.g. steps, continuous characterised by the solvent(s) used
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H01B3/303—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups H01B3/38 or H01B3/302

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Polyamides (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
DE19792904801 1978-02-09 1979-02-08 Verfahren zur herstellung eines zwischenproduktes vom polamidsaeuretyp fuer die herstellung von halbleitern Ceased DE2904801A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1377378A JPS54106599A (en) 1978-02-09 1978-02-09 Preparation of polyamide intermediate for semiconductor processing

Publications (1)

Publication Number Publication Date
DE2904801A1 true DE2904801A1 (de) 1979-08-16

Family

ID=11842559

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792904801 Ceased DE2904801A1 (de) 1978-02-09 1979-02-08 Verfahren zur herstellung eines zwischenproduktes vom polamidsaeuretyp fuer die herstellung von halbleitern

Country Status (6)

Country Link
US (1) US4225702A (enExample)
JP (1) JPS54106599A (enExample)
DE (1) DE2904801A1 (enExample)
FR (1) FR2416913A1 (enExample)
GB (1) GB2014167B (enExample)
NL (1) NL176952C (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0033015A1 (de) * 1980-01-04 1981-08-05 Bayer Ag Elektrisch leitende cyclische Polyimide

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4454310A (en) * 1981-12-21 1984-06-12 Japan Synthetic Rubber Co., Ltd. Polyamide acid, process for producing same and polyimide obtained therefrom
US4376195A (en) * 1982-01-07 1983-03-08 E. I. Du Pont De Nemours And Company Method of preparing high purity polyamic acids for use in electronic circuitry
FR2568258B1 (fr) * 1984-07-25 1987-02-13 Inst Francais Du Petrole Compositions de precurseurs de polyimides, leur preparation, les polyimides en derivant et leurs utilisations, notamment dans la fabrication de vernis d'emaillage pour conducteurs electriques
US4755555A (en) * 1985-04-26 1988-07-05 E. I. Du Pont De Nemours And Company Polyimide molding resins and molded articles
US4622384A (en) * 1985-04-26 1986-11-11 E. I. Du Pont De Nemours And Company Polyimide molding resins and molded articles
EP0262446B1 (en) * 1986-09-04 1993-07-21 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Photosensitive amphiphilic high polymers and process for their production
JP2712549B2 (ja) * 1989-05-16 1998-02-16 東レ株式会社 Ｍｏｓ半導体装置用パッシベーション膜
JP2712548B2 (ja) * 1989-05-16 1998-02-16 東レ株式会社 表面実装型樹脂封止半導体装置
JPH03133162A (ja) * 1989-10-18 1991-06-06 Toray Ind Inc 半導体用パッシベーション膜
US5260413A (en) * 1990-02-05 1993-11-09 E. I. Du Pont De Nemours And Company Coated, heat-sealable aromatic polyimide film having superior compressive strength
US5420232A (en) * 1992-04-29 1995-05-30 International Business Machines Corporation Process for making polyamic esters
TWI304835B (en) * 2003-06-10 2009-01-01 Hitachi Chemical Co Ltd Film adhesive and manufacturing method thereof,adhesive sheet and semiconductor device
JP6047864B2 (ja) * 2011-07-21 2016-12-21 宇部興産株式会社 ポリイミド前駆体ワニス、およびポリイミドワニスの製造方法
JP6111171B2 (ja) * 2013-09-02 2017-04-05 東京エレクトロン株式会社 成膜方法及び成膜装置
FR3029407B1 (fr) 2014-12-08 2016-12-09 Oreal Procede de coloration capillaire mettant en œuvre au moins un colorant direct et/ou naturel, un sel de titane, un polysaccharide cellulosique et eventuellement un solvant organique particulier
JP2019529596A (ja) 2016-07-28 2019-10-17 スリーエム イノベイティブ プロパティズ カンパニー セグメント化シリコーンポリアミドブロックコポリマー及びそれを含む物品
WO2018022680A1 (en) 2016-07-28 2018-02-01 3M Innovative Properties Company Segmented silicone polyamide block copolymers and articles containing the same
CN109438701B (zh) * 2018-09-21 2021-06-29 深圳市大分子科技有限公司 应用于聚酰亚胺提纯的导电容器、电子级聚酰亚胺产品
CN113817167A (zh) * 2021-10-27 2021-12-21 长沙新材料产业研究院有限公司 一种聚酰亚胺树脂的纯化方法及聚酰亚胺树脂

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4001870A (en) * 1972-08-18 1977-01-04 Hitachi, Ltd. Isolating protective film for semiconductor devices and method for making the same
DE2618937A1 (de) * 1975-08-13 1977-02-17 Hitachi Ltd Verfahren zur herstellung von halbleiterbauelementen und aetzmittel dafuer
DE2716419A1 (de) * 1976-04-14 1977-11-03 Ates Componenti Elettron Verfahren zum passivieren von leistungs-halbleiterbauelementen

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3179614A (en) * 1961-03-13 1965-04-20 Du Pont Polyamide-acids, compositions thereof, and process for their preparation
DE1570260A1 (de) * 1965-04-27 1970-02-12 Beck & Co Gmbh Dr Verfahren zur Herstellung von Elektroisolierstoffen fuer die Isolierung thermisch hochbeanspruchbarer Teile
FR1574843A (enExample) * 1968-05-09 1969-07-18
FR2036936B1 (enExample) * 1969-04-18 1976-10-01 Inst Francais Du Petrole

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4001870A (en) * 1972-08-18 1977-01-04 Hitachi, Ltd. Isolating protective film for semiconductor devices and method for making the same
DE2618937A1 (de) * 1975-08-13 1977-02-17 Hitachi Ltd Verfahren zur herstellung von halbleiterbauelementen und aetzmittel dafuer
DE2716419A1 (de) * 1976-04-14 1977-11-03 Ates Componenti Elettron Verfahren zum passivieren von leistungs-halbleiterbauelementen

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
"Chemikal Abstracts", Vol. 86 (1977), Nr. 26 Referat 190620y *
"IBM Technical Disclosure Bulletin", Vol. 19, Nr. 2, Juli 1976, S. 409 *
"IEEE Journal of Solid-State Circuits", Vol. SC-13, Nr. 4, August 1978, S.462-467 *
"Journal of Polymer Sci", Part A, Vol. 1 (1963), S. 3135-3143 *
"Journal of Polymer Sci", Part C, Nr. 23 (1968), S. 45 und 46 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0033015A1 (de) * 1980-01-04 1981-08-05 Bayer Ag Elektrisch leitende cyclische Polyimide
US4368319A (en) 1980-01-04 1983-01-11 Bayer Aktiengesellschaft Electrically conductive cyclic polyimides

Also Published As

Publication number Publication date
NL176952C (nl) 1985-07-01
FR2416913B1 (enExample) 1984-12-14
FR2416913A1 (fr) 1979-09-07
US4225702A (en) 1980-09-30
JPS54106599A (en) 1979-08-21
NL176952B (nl) 1985-02-01
NL7900994A (nl) 1979-08-13
GB2014167A (en) 1979-08-22
GB2014167B (en) 1983-01-12

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Legal Events

Date Code Title Description
OAP Request for examination filed
OD Request for examination
8125 Change of the main classification
8131 Rejection