DE2741523C2 - - Google Patents
Info
- Publication number
- DE2741523C2 DE2741523C2 DE19772741523 DE2741523A DE2741523C2 DE 2741523 C2 DE2741523 C2 DE 2741523C2 DE 19772741523 DE19772741523 DE 19772741523 DE 2741523 A DE2741523 A DE 2741523A DE 2741523 C2 DE2741523 C2 DE 2741523C2
- Authority
- DE
- Germany
- Prior art keywords
- pressure sensor
- measuring device
- pressure measuring
- recess
- support surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 13
- 239000012528 membrane Substances 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 26
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000001419 dependent effect Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 239000012876 carrier material Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 235000012773 waffles Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/724,827 US4125820A (en) | 1975-10-06 | 1976-09-20 | Stress sensor apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE2741523A1 DE2741523A1 (de) | 1978-03-23 |
DE2741523C2 true DE2741523C2 (enrdf_load_stackoverflow) | 1988-09-22 |
Family
ID=24912077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19772741523 Granted DE2741523A1 (de) | 1976-09-20 | 1977-09-15 | Druckmesseinrichtung |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5339172A (enrdf_load_stackoverflow) |
DE (1) | DE2741523A1 (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57125827A (en) * | 1981-01-29 | 1982-08-05 | Mitsubishi Electric Corp | Semiconductor pressure sensor for car |
JP6155648B2 (ja) * | 2013-01-10 | 2017-07-05 | ミツミ電機株式会社 | ピエゾ抵抗素子及び半導体センサ |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1088723A (en) * | 1964-03-18 | 1967-10-25 | Ether Eng Ltd | Improvements in and relating to transducers |
US3513430A (en) * | 1968-06-19 | 1970-05-19 | Tyco Laboratories Inc | Semiconductor strain gage transducer and method of making same |
US3739315A (en) * | 1972-05-18 | 1973-06-12 | Kulite Semiconductors Prod Inc | Semiconductor transducers having h shaped cross-sectional configurations |
US3873956A (en) * | 1973-09-04 | 1975-03-25 | Kulite Semiconductor Products | Integrated transducer assemblies |
-
1977
- 1977-09-15 DE DE19772741523 patent/DE2741523A1/de active Granted
- 1977-09-20 JP JP11227577A patent/JPS5339172A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS5339172A (en) | 1978-04-10 |
DE2741523A1 (de) | 1978-03-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition |