DE2741523A1 - Druckmesseinrichtung - Google Patents

Druckmesseinrichtung

Info

Publication number
DE2741523A1
DE2741523A1 DE19772741523 DE2741523A DE2741523A1 DE 2741523 A1 DE2741523 A1 DE 2741523A1 DE 19772741523 DE19772741523 DE 19772741523 DE 2741523 A DE2741523 A DE 2741523A DE 2741523 A1 DE2741523 A1 DE 2741523A1
Authority
DE
Germany
Prior art keywords
pressure sensor
carrier
recess
pressure
pressure measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19772741523
Other languages
German (de)
English (en)
Other versions
DE2741523C2 (enrdf_load_stackoverflow
Inventor
James F Marshall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/724,827 external-priority patent/US4125820A/en
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE2741523A1 publication Critical patent/DE2741523A1/de
Application granted granted Critical
Publication of DE2741523C2 publication Critical patent/DE2741523C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE19772741523 1976-09-20 1977-09-15 Druckmesseinrichtung Granted DE2741523A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/724,827 US4125820A (en) 1975-10-06 1976-09-20 Stress sensor apparatus

Publications (2)

Publication Number Publication Date
DE2741523A1 true DE2741523A1 (de) 1978-03-23
DE2741523C2 DE2741523C2 (enrdf_load_stackoverflow) 1988-09-22

Family

ID=24912077

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772741523 Granted DE2741523A1 (de) 1976-09-20 1977-09-15 Druckmesseinrichtung

Country Status (2)

Country Link
JP (1) JPS5339172A (enrdf_load_stackoverflow)
DE (1) DE2741523A1 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57125827A (en) * 1981-01-29 1982-08-05 Mitsubishi Electric Corp Semiconductor pressure sensor for car
JP6155648B2 (ja) * 2013-01-10 2017-07-05 ミツミ電機株式会社 ピエゾ抵抗素子及び半導体センサ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE6602312U (de) * 1964-03-18 1969-05-22 Ether Langham Thompson Ltd Gleichzeitig melde ich fuer diesen gegenstand ein hilfsgebrauchmuster an.
US3513430A (en) * 1968-06-19 1970-05-19 Tyco Laboratories Inc Semiconductor strain gage transducer and method of making same
US3739315A (en) * 1972-05-18 1973-06-12 Kulite Semiconductors Prod Inc Semiconductor transducers having h shaped cross-sectional configurations
US3873956A (en) * 1973-09-04 1975-03-25 Kulite Semiconductor Products Integrated transducer assemblies

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE6602312U (de) * 1964-03-18 1969-05-22 Ether Langham Thompson Ltd Gleichzeitig melde ich fuer diesen gegenstand ein hilfsgebrauchmuster an.
US3513430A (en) * 1968-06-19 1970-05-19 Tyco Laboratories Inc Semiconductor strain gage transducer and method of making same
US3739315A (en) * 1972-05-18 1973-06-12 Kulite Semiconductors Prod Inc Semiconductor transducers having h shaped cross-sectional configurations
US3873956A (en) * 1973-09-04 1975-03-25 Kulite Semiconductor Products Integrated transducer assemblies

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DE-Z.: messen + prüfen/automatik, Februar 1974, S. 89-92 *

Also Published As

Publication number Publication date
JPS5339172A (en) 1978-04-10
DE2741523C2 (enrdf_load_stackoverflow) 1988-09-22

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition