JPS5339172A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPS5339172A JPS5339172A JP11227577A JP11227577A JPS5339172A JP S5339172 A JPS5339172 A JP S5339172A JP 11227577 A JP11227577 A JP 11227577A JP 11227577 A JP11227577 A JP 11227577A JP S5339172 A JPS5339172 A JP S5339172A
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/724,827 US4125820A (en) | 1975-10-06 | 1976-09-20 | Stress sensor apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5339172A true JPS5339172A (en) | 1978-04-10 |
Family
ID=24912077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11227577A Pending JPS5339172A (en) | 1976-09-20 | 1977-09-20 | Pressure sensor |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5339172A (en) |
DE (1) | DE2741523A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57125827A (en) * | 1981-01-29 | 1982-08-05 | Mitsubishi Electric Corp | Semiconductor pressure sensor for car |
JP2014135391A (en) * | 2013-01-10 | 2014-07-24 | Mitsumi Electric Co Ltd | Piezoresistive element and semiconductor sensor |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1088723A (en) * | 1964-03-18 | 1967-10-25 | Ether Eng Ltd | Improvements in and relating to transducers |
US3513430A (en) * | 1968-06-19 | 1970-05-19 | Tyco Laboratories Inc | Semiconductor strain gage transducer and method of making same |
US3739315A (en) * | 1972-05-18 | 1973-06-12 | Kulite Semiconductors Prod Inc | Semiconductor transducers having h shaped cross-sectional configurations |
US3873956A (en) * | 1973-09-04 | 1975-03-25 | Kulite Semiconductor Products | Integrated transducer assemblies |
-
1977
- 1977-09-15 DE DE19772741523 patent/DE2741523A1/en active Granted
- 1977-09-20 JP JP11227577A patent/JPS5339172A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57125827A (en) * | 1981-01-29 | 1982-08-05 | Mitsubishi Electric Corp | Semiconductor pressure sensor for car |
JP2014135391A (en) * | 2013-01-10 | 2014-07-24 | Mitsumi Electric Co Ltd | Piezoresistive element and semiconductor sensor |
Also Published As
Publication number | Publication date |
---|---|
DE2741523A1 (en) | 1978-03-23 |
DE2741523C2 (en) | 1988-09-22 |
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