DE2635699C3 - Verfahren zur Herstellung eines elektrischen Widerstands - Google Patents
Verfahren zur Herstellung eines elektrischen WiderstandsInfo
- Publication number
- DE2635699C3 DE2635699C3 DE19762635699 DE2635699A DE2635699C3 DE 2635699 C3 DE2635699 C3 DE 2635699C3 DE 19762635699 DE19762635699 DE 19762635699 DE 2635699 A DE2635699 A DE 2635699A DE 2635699 C3 DE2635699 C3 DE 2635699C3
- Authority
- DE
- Germany
- Prior art keywords
- disilicide
- resistance
- substrate
- fired
- vitreous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000758 substrate Substances 0.000 claims description 21
- 239000002245 particle Substances 0.000 claims description 12
- 238000010304 firing Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 claims description 8
- 239000007795 chemical reaction product Substances 0.000 claims description 7
- 229910021343 molybdenum disilicide Inorganic materials 0.000 claims description 7
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims description 7
- 239000012298 atmosphere Substances 0.000 claims description 5
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 5
- 229910021332 silicide Inorganic materials 0.000 claims description 5
- 239000005388 borosilicate glass Substances 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 4
- MANYRMJQFFSZKJ-UHFFFAOYSA-N bis($l^{2}-silanylidene)tantalum Chemical compound [Si]=[Ta]=[Si] MANYRMJQFFSZKJ-UHFFFAOYSA-N 0.000 claims description 3
- DFJQEGUNXWZVAH-UHFFFAOYSA-N bis($l^{2}-silanylidene)titanium Chemical compound [Si]=[Ti]=[Si] DFJQEGUNXWZVAH-UHFFFAOYSA-N 0.000 claims description 3
- LUWOVYQXZRKECH-UHFFFAOYSA-N bis($l^{2}-silanylidene)vanadium Chemical compound [Si]=[V]=[Si] LUWOVYQXZRKECH-UHFFFAOYSA-N 0.000 claims description 3
- GJIKIPCNQLUSQC-UHFFFAOYSA-N bis($l^{2}-silanylidene)zirconium Chemical compound [Si]=[Zr]=[Si] GJIKIPCNQLUSQC-UHFFFAOYSA-N 0.000 claims description 3
- 229910021352 titanium disilicide Inorganic materials 0.000 claims description 3
- 229910021353 zirconium disilicide Inorganic materials 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 239000011521 glass Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- 239000000203 mixture Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000011247 coating layer Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229910016066 BaSi Inorganic materials 0.000 description 3
- 206010010144 Completed suicide Diseases 0.000 description 3
- 229910019974 CrSi Inorganic materials 0.000 description 3
- 229910016006 MoSi Inorganic materials 0.000 description 3
- 229910008484 TiSi Inorganic materials 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910006249 ZrSi Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910021358 chromium disilicide Inorganic materials 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- OOJQNBIDYDPHHE-UHFFFAOYSA-N barium silicon Chemical compound [Si].[Ba] OOJQNBIDYDPHHE-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- ZADPBFCGQRWHPN-UHFFFAOYSA-N boronic acid Chemical compound OBO ZADPBFCGQRWHPN-UHFFFAOYSA-N 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- -1 fireclay Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
- H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
- H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
- H01C17/0656—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component composed of silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Adjustable Resistors (AREA)
- Resistance Heating (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/673,303 US4039997A (en) | 1973-10-25 | 1976-04-02 | Resistance material and resistor made therefrom |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2635699A1 DE2635699A1 (de) | 1977-10-06 |
| DE2635699B2 DE2635699B2 (de) | 1979-10-31 |
| DE2635699C3 true DE2635699C3 (de) | 1980-07-24 |
Family
ID=24702100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19762635699 Expired DE2635699C3 (de) | 1976-04-02 | 1976-08-07 | Verfahren zur Herstellung eines elektrischen Widerstands |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS5931841B2 (enExample) |
| AU (1) | AU497489B2 (enExample) |
| CA (1) | CA1077351A (enExample) |
| DE (1) | DE2635699C3 (enExample) |
| DK (1) | DK143820C (enExample) |
| FR (1) | FR2346829A1 (enExample) |
| IT (1) | IT1071888B (enExample) |
| NL (1) | NL7608461A (enExample) |
| SE (1) | SE410773B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6147257U (ja) * | 1984-08-29 | 1986-03-29 | 株式会社クボタ | コンバインの穀粒回収装置 |
| JPS62253315A (ja) * | 1986-04-24 | 1987-11-05 | セイレイ工業株式会社 | コンバインのグレンタンク支持構造 |
| JP2532429B2 (ja) * | 1987-01-20 | 1996-09-11 | 松下電器産業株式会社 | グレ−ズ抵抗材料 |
| EP1971560A1 (en) * | 2005-03-21 | 2008-09-24 | Glass Coatings and Concepts LLC | Silicon alloy materials used as silver migration inhibitors |
| GB0700079D0 (en) * | 2007-01-04 | 2007-02-07 | Boardman Jeffrey | A method of producing electrical resistance elements whihc have self-regulating power output characteristics by virtue of their configuration and the material |
| JP2019175608A (ja) * | 2018-03-27 | 2019-10-10 | 株式会社デンソー | 電気抵抗体、ハニカム構造体、および、電気加熱式触媒装置 |
| JP7095544B2 (ja) * | 2018-10-12 | 2022-07-05 | 株式会社デンソー | 電気抵抗体、ハニカム構造体、および、電気加熱式触媒装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3027332A (en) * | 1953-06-10 | 1962-03-27 | Kanthal Ab | Heat resisting materials and methods for their manufacture |
-
1976
- 1976-07-12 SE SE7607961A patent/SE410773B/xx not_active IP Right Cessation
- 1976-07-12 CA CA256,794A patent/CA1077351A/en not_active Expired
- 1976-07-15 AU AU15920/76A patent/AU497489B2/en not_active Expired
- 1976-07-30 NL NL7608461A patent/NL7608461A/xx not_active Application Discontinuation
- 1976-08-05 FR FR7623987A patent/FR2346829A1/fr active Granted
- 1976-08-07 DE DE19762635699 patent/DE2635699C3/de not_active Expired
- 1976-09-10 JP JP51107983A patent/JPS5931841B2/ja not_active Expired
- 1976-09-10 DK DK408776A patent/DK143820C/da not_active IP Right Cessation
-
1977
- 1977-01-05 IT IT8360177A patent/IT1071888B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| SE410773B (sv) | 1979-10-29 |
| CA1077351A (en) | 1980-05-13 |
| AU497489B2 (en) | 1978-12-14 |
| DE2635699A1 (de) | 1977-10-06 |
| NL7608461A (nl) | 1977-10-04 |
| JPS5931841B2 (ja) | 1984-08-04 |
| AU1592076A (en) | 1978-01-19 |
| JPS52120397A (en) | 1977-10-08 |
| DK143820B (da) | 1981-10-12 |
| FR2346829B1 (enExample) | 1982-02-19 |
| FR2346829A1 (fr) | 1977-10-28 |
| DK143820C (da) | 1982-03-29 |
| SE7607961L (sv) | 1977-10-03 |
| DE2635699B2 (de) | 1979-10-31 |
| DK408776A (da) | 1977-10-03 |
| IT1071888B (it) | 1985-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |