DE2619330A1 - Verfahren zur herstellung von belaegen aus hafniumverbindungen - Google Patents

Verfahren zur herstellung von belaegen aus hafniumverbindungen

Info

Publication number
DE2619330A1
DE2619330A1 DE19762619330 DE2619330A DE2619330A1 DE 2619330 A1 DE2619330 A1 DE 2619330A1 DE 19762619330 DE19762619330 DE 19762619330 DE 2619330 A DE2619330 A DE 2619330A DE 2619330 A1 DE2619330 A1 DE 2619330A1
Authority
DE
Germany
Prior art keywords
hafnium
halides
hydrogen
halide
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19762619330
Other languages
German (de)
English (en)
Inventor
Mohammad J Hakim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Canada Inc
Original Assignee
Westinghouse Canada Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Canada Inc filed Critical Westinghouse Canada Inc
Publication of DE2619330A1 publication Critical patent/DE2619330A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE19762619330 1975-09-15 1976-04-30 Verfahren zur herstellung von belaegen aus hafniumverbindungen Withdrawn DE2619330A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA235,453A CA1087041A (en) 1975-09-15 1975-09-15 Hafnium carbide and nitride coatings

Publications (1)

Publication Number Publication Date
DE2619330A1 true DE2619330A1 (de) 1977-03-17

Family

ID=4104046

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19762619330 Withdrawn DE2619330A1 (de) 1975-09-15 1976-04-30 Verfahren zur herstellung von belaegen aus hafniumverbindungen

Country Status (6)

Country Link
JP (1) JPS5236585A (enrdf_load_stackoverflow)
CA (1) CA1087041A (enrdf_load_stackoverflow)
DE (1) DE2619330A1 (enrdf_load_stackoverflow)
FR (1) FR2323773A1 (enrdf_load_stackoverflow)
GB (1) GB1519699A (enrdf_load_stackoverflow)
IT (1) IT1065083B (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109098A (en) * 1978-02-15 1979-08-27 Hitachi Metals Ltd Method of manufacturing hafnium compound
EP0117542B1 (en) * 1983-02-25 1992-06-17 Liburdi Engineering Limited Chemical vapor deposition of metal compound coatings utilizing metal sub-halides
US4803127A (en) * 1983-02-25 1989-02-07 Liburdi Engineering Limited Vapor deposition of metal compound coating utilizing metal sub-halides and coated metal article
US4699082A (en) * 1983-02-25 1987-10-13 Liburdi Engineering Limited Apparatus for chemical vapor deposition
FR2612946B1 (fr) * 1987-03-27 1993-02-19 Chimie Metal Procede et installation pour le depot chimique de revetements ultradurs a temperature moderee
US5238711A (en) * 1990-11-05 1993-08-24 The President And Fellows Of Harvard College Method of coating carbon fibers with a carbide
US5141773A (en) * 1990-11-05 1992-08-25 Northeastern University Method of forming a carbide on a carbon substrate
KR100814980B1 (ko) 2000-09-28 2008-03-18 프레지던트 앤드 펠로우즈 오브 하바드 칼리지 산화물, 규산염 및 인산염의 증기를 이용한 석출
CN111206234A (zh) * 2020-02-21 2020-05-29 攀钢集团攀枝花钢铁研究院有限公司 钛基碳化钒涂层的制备方法
CN112358303A (zh) * 2020-10-27 2021-02-12 中国科学院金属研究所 一种HfCxNy超高温陶瓷粉体材料及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT500087A (enrdf_load_stackoverflow) * 1952-03-17
DE1056449B (de) * 1954-03-12 1959-04-30 Metallgesellschaft Ag Verfahren zur Herstellung von UEberzuegen aus harten Carbiden
DE1948035A1 (de) * 1968-10-21 1970-04-30 Texas Instruments Inc Verfahren zum UEberziehen von Gegenstaenden mit einem Metall-Karbonitrid
BE795014A (fr) * 1972-02-11 1973-05-29 Gen Electric Produits du type carbure agglomere revetu

Also Published As

Publication number Publication date
CA1087041A (en) 1980-10-07
GB1519699A (en) 1978-08-02
IT1065083B (it) 1985-02-25
FR2323773A1 (fr) 1977-04-08
FR2323773B1 (enrdf_load_stackoverflow) 1982-11-26
JPS5236585A (en) 1977-03-19

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination