FR2323773A1 - Preparation de revetements durs de hafnium ou de ses composes - Google Patents

Preparation de revetements durs de hafnium ou de ses composes

Info

Publication number
FR2323773A1
FR2323773A1 FR7623172A FR7623172A FR2323773A1 FR 2323773 A1 FR2323773 A1 FR 2323773A1 FR 7623172 A FR7623172 A FR 7623172A FR 7623172 A FR7623172 A FR 7623172A FR 2323773 A1 FR2323773 A1 FR 2323773A1
Authority
FR
France
Prior art keywords
hafnium
compounds
preparation
hard coatings
coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7623172A
Other languages
English (en)
French (fr)
Other versions
FR2323773B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Canada Inc
Original Assignee
Westinghouse Canada Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Canada Inc filed Critical Westinghouse Canada Inc
Publication of FR2323773A1 publication Critical patent/FR2323773A1/fr
Application granted granted Critical
Publication of FR2323773B1 publication Critical patent/FR2323773B1/fr
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32Carbides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
FR7623172A 1975-09-15 1976-07-29 Preparation de revetements durs de hafnium ou de ses composes Granted FR2323773A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA235,453A CA1087041A (en) 1975-09-15 1975-09-15 Hafnium carbide and nitride coatings

Publications (2)

Publication Number Publication Date
FR2323773A1 true FR2323773A1 (fr) 1977-04-08
FR2323773B1 FR2323773B1 (enrdf_load_stackoverflow) 1982-11-26

Family

ID=4104046

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7623172A Granted FR2323773A1 (fr) 1975-09-15 1976-07-29 Preparation de revetements durs de hafnium ou de ses composes

Country Status (6)

Country Link
JP (1) JPS5236585A (enrdf_load_stackoverflow)
CA (1) CA1087041A (enrdf_load_stackoverflow)
DE (1) DE2619330A1 (enrdf_load_stackoverflow)
FR (1) FR2323773A1 (enrdf_load_stackoverflow)
GB (1) GB1519699A (enrdf_load_stackoverflow)
IT (1) IT1065083B (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0117542A3 (en) * 1983-02-25 1987-08-12 Liburdi Engineering Limited Chemical vapor deposition of metal compound coatings utilizing metal sub-halides
FR2612946A1 (fr) * 1987-03-27 1988-09-30 Chimie Metal Procede et installation pour le depot chimique de revetements ultradurs a temperature moderee
CN112358303A (zh) * 2020-10-27 2021-02-12 中国科学院金属研究所 一种HfCxNy超高温陶瓷粉体材料及其制备方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109098A (en) * 1978-02-15 1979-08-27 Hitachi Metals Ltd Method of manufacturing hafnium compound
US4803127A (en) * 1983-02-25 1989-02-07 Liburdi Engineering Limited Vapor deposition of metal compound coating utilizing metal sub-halides and coated metal article
US4699082A (en) * 1983-02-25 1987-10-13 Liburdi Engineering Limited Apparatus for chemical vapor deposition
US5141773A (en) * 1990-11-05 1992-08-25 Northeastern University Method of forming a carbide on a carbon substrate
US5238711A (en) * 1990-11-05 1993-08-24 The President And Fellows Of Harvard College Method of coating carbon fibers with a carbide
EP1772534A3 (en) 2000-09-28 2007-04-25 The President and Fellows of Harvard College Tungsten-containing and hafnium-containing precursors for vapor deposition
CN111206234A (zh) * 2020-02-21 2020-05-29 攀钢集团攀枝花钢铁研究院有限公司 钛基碳化钒涂层的制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1076334A (fr) * 1952-03-17 1954-10-26 Metallgesellschaft Ag Procédé pour produire sur des métaux des dépôts de nitrures fusibles à hautes températures
FR1124973A (fr) * 1954-03-12 1956-10-22 Metallgesellschaft Ag Procédé de fabrication de revêtements en carbures durs
FR2021112A1 (enrdf_load_stackoverflow) * 1968-10-21 1970-07-17 Texas Instruments Inc
FR2171334A1 (enrdf_load_stackoverflow) * 1972-02-11 1973-09-21 Gen Electric

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1076334A (fr) * 1952-03-17 1954-10-26 Metallgesellschaft Ag Procédé pour produire sur des métaux des dépôts de nitrures fusibles à hautes températures
FR1124973A (fr) * 1954-03-12 1956-10-22 Metallgesellschaft Ag Procédé de fabrication de revêtements en carbures durs
FR2021112A1 (enrdf_load_stackoverflow) * 1968-10-21 1970-07-17 Texas Instruments Inc
FR2171334A1 (enrdf_load_stackoverflow) * 1972-02-11 1973-09-21 Gen Electric

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0117542A3 (en) * 1983-02-25 1987-08-12 Liburdi Engineering Limited Chemical vapor deposition of metal compound coatings utilizing metal sub-halides
FR2612946A1 (fr) * 1987-03-27 1988-09-30 Chimie Metal Procede et installation pour le depot chimique de revetements ultradurs a temperature moderee
WO1988007596A1 (fr) * 1987-03-27 1988-10-06 Chimie Metal Procede et installation pour le depot chimique de revetements ultradurs a temperature moderee
CN112358303A (zh) * 2020-10-27 2021-02-12 中国科学院金属研究所 一种HfCxNy超高温陶瓷粉体材料及其制备方法

Also Published As

Publication number Publication date
DE2619330A1 (de) 1977-03-17
IT1065083B (it) 1985-02-25
CA1087041A (en) 1980-10-07
GB1519699A (en) 1978-08-02
FR2323773B1 (enrdf_load_stackoverflow) 1982-11-26
JPS5236585A (en) 1977-03-19

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Legal Events

Date Code Title Description
ST Notification of lapse