CA1087041A - Hafnium carbide and nitride coatings - Google Patents

Hafnium carbide and nitride coatings

Info

Publication number
CA1087041A
CA1087041A CA235,453A CA235453A CA1087041A CA 1087041 A CA1087041 A CA 1087041A CA 235453 A CA235453 A CA 235453A CA 1087041 A CA1087041 A CA 1087041A
Authority
CA
Canada
Prior art keywords
hafnium
halides
hydrogen
degrees
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA235,453A
Other languages
English (en)
French (fr)
Inventor
Mohammad J. Hakim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Canada Inc
Original Assignee
Westinghouse Canada Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Canada Inc filed Critical Westinghouse Canada Inc
Priority to CA235,453A priority Critical patent/CA1087041A/en
Priority to DE19762619330 priority patent/DE2619330A1/de
Priority to GB2359076A priority patent/GB1519699A/en
Priority to IT2557576A priority patent/IT1065083B/it
Priority to FR7623172A priority patent/FR2323773A1/fr
Priority to JP10951576A priority patent/JPS5236585A/ja
Application granted granted Critical
Publication of CA1087041A publication Critical patent/CA1087041A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
CA235,453A 1975-09-15 1975-09-15 Hafnium carbide and nitride coatings Expired CA1087041A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CA235,453A CA1087041A (en) 1975-09-15 1975-09-15 Hafnium carbide and nitride coatings
DE19762619330 DE2619330A1 (de) 1975-09-15 1976-04-30 Verfahren zur herstellung von belaegen aus hafniumverbindungen
GB2359076A GB1519699A (en) 1975-09-15 1976-06-08 Producing coatings of compounds of hafnium
IT2557576A IT1065083B (it) 1975-09-15 1976-07-22 Produzione di rivestimenti di afnio e di composti dell afnio tramite deposizione chimica in fase vapore
FR7623172A FR2323773A1 (fr) 1975-09-15 1976-07-29 Preparation de revetements durs de hafnium ou de ses composes
JP10951576A JPS5236585A (en) 1975-09-15 1976-09-14 Process for preparing coating of hafnium compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA235,453A CA1087041A (en) 1975-09-15 1975-09-15 Hafnium carbide and nitride coatings

Publications (1)

Publication Number Publication Date
CA1087041A true CA1087041A (en) 1980-10-07

Family

ID=4104046

Family Applications (1)

Application Number Title Priority Date Filing Date
CA235,453A Expired CA1087041A (en) 1975-09-15 1975-09-15 Hafnium carbide and nitride coatings

Country Status (6)

Country Link
JP (1) JPS5236585A (enrdf_load_stackoverflow)
CA (1) CA1087041A (enrdf_load_stackoverflow)
DE (1) DE2619330A1 (enrdf_load_stackoverflow)
FR (1) FR2323773A1 (enrdf_load_stackoverflow)
GB (1) GB1519699A (enrdf_load_stackoverflow)
IT (1) IT1065083B (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109098A (en) * 1978-02-15 1979-08-27 Hitachi Metals Ltd Method of manufacturing hafnium compound
US4803127A (en) * 1983-02-25 1989-02-07 Liburdi Engineering Limited Vapor deposition of metal compound coating utilizing metal sub-halides and coated metal article
US4699082A (en) * 1983-02-25 1987-10-13 Liburdi Engineering Limited Apparatus for chemical vapor deposition
EP0117542B1 (en) * 1983-02-25 1992-06-17 Liburdi Engineering Limited Chemical vapor deposition of metal compound coatings utilizing metal sub-halides
FR2612946B1 (fr) * 1987-03-27 1993-02-19 Chimie Metal Procede et installation pour le depot chimique de revetements ultradurs a temperature moderee
US5141773A (en) * 1990-11-05 1992-08-25 Northeastern University Method of forming a carbide on a carbon substrate
US5238711A (en) * 1990-11-05 1993-08-24 The President And Fellows Of Harvard College Method of coating carbon fibers with a carbide
EP1772534A3 (en) 2000-09-28 2007-04-25 The President and Fellows of Harvard College Tungsten-containing and hafnium-containing precursors for vapor deposition
CN111206234A (zh) * 2020-02-21 2020-05-29 攀钢集团攀枝花钢铁研究院有限公司 钛基碳化钒涂层的制备方法
CN112358303A (zh) * 2020-10-27 2021-02-12 中国科学院金属研究所 一种HfCxNy超高温陶瓷粉体材料及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT500087A (enrdf_load_stackoverflow) * 1952-03-17
DE1056449B (de) * 1954-03-12 1959-04-30 Metallgesellschaft Ag Verfahren zur Herstellung von UEberzuegen aus harten Carbiden
DE1948035A1 (de) * 1968-10-21 1970-04-30 Texas Instruments Inc Verfahren zum UEberziehen von Gegenstaenden mit einem Metall-Karbonitrid
BE795014A (fr) * 1972-02-11 1973-05-29 Gen Electric Produits du type carbure agglomere revetu

Also Published As

Publication number Publication date
DE2619330A1 (de) 1977-03-17
FR2323773A1 (fr) 1977-04-08
IT1065083B (it) 1985-02-25
GB1519699A (en) 1978-08-02
FR2323773B1 (enrdf_load_stackoverflow) 1982-11-26
JPS5236585A (en) 1977-03-19

Similar Documents

Publication Publication Date Title
CA1087041A (en) Hafnium carbide and nitride coatings
US3656995A (en) Chemical vapor deposition coatings on titanium
US5320659A (en) Method of forming a carbon coated optical fiber with co-current reactant flow
US4921725A (en) Process for coating carbon fibers with a carbide
US3784402A (en) Chemical vapor deposition coatings on titanium
US3814625A (en) Formation of tungsten and molybdenum carbides
EP0471276B1 (en) Method of forming a nitride or carbonnitride layer
KR910015011A (ko) 금속 또는 금속 실리사이드막의 형성방법
US3807008A (en) Chemical vapor deposition coatings on titanium
US4432781A (en) Method for manufacturing fused quartz glass
US3334967A (en) Process of preparing boron carbide from boron halide and a hydrocarbon
EP0222241A1 (en) Deposition of titanium aluminides
KR910014542A (ko) Dvd 다이아몬드로 피복된 환상체 부품 및 그의 제작 방법
US4980201A (en) Method of forming tungsten carbide by chemical vapor deposition
US3783007A (en) Metal carbonitrile coatings
US6242045B1 (en) Process of preparing metal nitride films using a metal halide and an amine
JPH0465019B2 (enrdf_load_stackoverflow)
US3061464A (en) Method of metal plating with a group iv-b organometallic compound
JPS6348805B2 (enrdf_load_stackoverflow)
Morosanu et al. Vapour growth mechanism of silicon layers by dichlorosilane decomposition
KR920701535A (ko) 화학적 증착(cvd)으로 성장된 천이금속 탄화물 및 질화물 휘스커
US3540919A (en) Reconstruction of chemical vapor deposition stream
Pola et al. Laser-induced chemical vapour deposition of Si/C/H materials from monoorganylsilanes
CA2096872C (en) Apparatus for the production of hermetically coated optical fiber
JPS62180073A (ja) 非晶質炭素膜およびその製造方法

Legal Events

Date Code Title Description
MKEX Expiry