DE2551567A1 - Transportband - Google Patents
TransportbandInfo
- Publication number
- DE2551567A1 DE2551567A1 DE19752551567 DE2551567A DE2551567A1 DE 2551567 A1 DE2551567 A1 DE 2551567A1 DE 19752551567 DE19752551567 DE 19752551567 DE 2551567 A DE2551567 A DE 2551567A DE 2551567 A1 DE2551567 A1 DE 2551567A1
- Authority
- DE
- Germany
- Prior art keywords
- magazine
- rail
- nozzle
- support plate
- rail section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 83
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 230000007704 transition Effects 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 description 59
- 230000032258 transport Effects 0.000 description 39
- 238000000034 method Methods 0.000 description 23
- 230000008569 process Effects 0.000 description 18
- 238000007664 blowing Methods 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000012858 resilient material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
- H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DK604074A DK604074A (da) | 1974-11-20 | 1974-11-20 | Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2551567A1 true DE2551567A1 (de) | 1976-05-26 |
Family
ID=8146996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752551567 Pending DE2551567A1 (de) | 1974-11-20 | 1975-11-17 | Transportband |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4087133A (enExample) |
| JP (1) | JPS5174381A (enExample) |
| DE (1) | DE2551567A1 (enExample) |
| DK (1) | DK604074A (enExample) |
| NL (1) | NL7513535A (enExample) |
| SE (1) | SE7513003L (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009010592A1 (de) | 2007-07-19 | 2009-01-22 | Centrotherm Thermal Solutions Gmbh + Co. Kg | Anordnung zum berührungslosen transport von flachen substraten |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8300649A (nl) * | 1983-02-21 | 1984-09-17 | Integrated Automation | Methode en inrichting voor het aanbrengen van een coating op een substraat of tape. |
| NL8103979A (nl) * | 1981-08-26 | 1983-03-16 | Bok Edward | Methode en inrichting voor het aanbrengen van een film vloeibaar medium op een substraat. |
| US4600471A (en) * | 1981-08-26 | 1986-07-15 | Integrated Automation, Limited | Method and apparatus for transport and processing of substrate with developing agent |
| SG115602A1 (en) * | 2003-01-09 | 2005-10-28 | Disco Corp | Conveying device for a plate-like workpiece |
| FR2980994B1 (fr) | 2011-10-07 | 2015-11-27 | Semco Engineering | Prehenseur multi-plaquettes. |
| JP6748572B2 (ja) * | 2016-12-28 | 2020-09-02 | 昭和電工株式会社 | ｐ型ＳｉＣエピタキシャルウェハ及びその製造方法 |
| CN113506762B (zh) * | 2021-06-29 | 2025-05-30 | 东方日升（常州）新能源有限公司 | 硅片悬浮传输机构 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1061526A (en) * | 1910-08-09 | 1913-05-13 | Samuel W Cortissoz | Feed and delivery attachment for printing-presses. |
| US3219340A (en) * | 1961-09-07 | 1965-11-23 | Hitachi Ltd | Apparatus for separating and conveying cards or the like by means of an air stream |
| US3136539A (en) * | 1962-12-03 | 1964-06-09 | Lyman Brooks | Sheet handling |
| US3198515A (en) * | 1963-04-05 | 1965-08-03 | Robert C Pitney | Aerodynamic document handling apparatus |
| US3503607A (en) * | 1967-12-27 | 1970-03-31 | Sperry Rand Corp | Pneumatic document stacking device |
| US3511495A (en) * | 1968-01-24 | 1970-05-12 | Sperry Rand Corp | Document feeder mechanism |
| US3504910A (en) * | 1968-06-06 | 1970-04-07 | Us Army | Fluidic singulator |
| US3717381A (en) * | 1969-07-25 | 1973-02-20 | Texas Instruments Inc | Transporting and positioning system |
| US3614168A (en) * | 1969-09-30 | 1971-10-19 | Bowles Fluidics Corp | Bernoulli conveyor |
| US3930684A (en) * | 1971-06-22 | 1976-01-06 | Lasch Jr Cecil A | Automatic wafer feeding and pre-alignment apparatus and method |
| US3718371A (en) * | 1971-08-25 | 1973-02-27 | Ind Modular Syst Corp | Fluid bearing track structure and components thereof |
| US3948564A (en) * | 1974-01-17 | 1976-04-06 | Gca Corporation | Fluid bearing apparatus and method utilizing selective turntable diverter structure |
| GB1513444A (en) * | 1974-09-06 | 1978-06-07 | Chemical Reactor Equip As | Pick-up devices for lifting and moving semiconductor wafers |
-
1974
- 1974-11-20 DK DK604074A patent/DK604074A/da unknown
-
1975
- 1975-11-17 DE DE19752551567 patent/DE2551567A1/de active Pending
- 1975-11-19 US US05/633,197 patent/US4087133A/en not_active Expired - Lifetime
- 1975-11-19 SE SE7513003A patent/SE7513003L/xx unknown
- 1975-11-19 NL NL7513535A patent/NL7513535A/xx not_active Application Discontinuation
- 1975-11-20 JP JP50138781A patent/JPS5174381A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009010592A1 (de) | 2007-07-19 | 2009-01-22 | Centrotherm Thermal Solutions Gmbh + Co. Kg | Anordnung zum berührungslosen transport von flachen substraten |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7513535A (nl) | 1976-05-24 |
| SE7513003L (sv) | 1976-05-21 |
| US4087133A (en) | 1978-05-02 |
| DK604074A (da) | 1976-05-21 |
| JPS5174381A (enExample) | 1976-06-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OGA | New person/name/address of the applicant | ||
| OHJ | Non-payment of the annual fee |