JPS5174381A - - Google Patents

Info

Publication number
JPS5174381A
JPS5174381A JP50138781A JP13878175A JPS5174381A JP S5174381 A JPS5174381 A JP S5174381A JP 50138781 A JP50138781 A JP 50138781A JP 13878175 A JP13878175 A JP 13878175A JP S5174381 A JPS5174381 A JP S5174381A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50138781A
Inventor
Peru Orofusen Orufu
Sonitsuku Rando Kai
Karuro Yorugensen Bento
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHEMICAL REAKTOR EQUIP AS
KEMIKARU RIAKUTAA EKYUITSUPUMENTO AS
Original Assignee
CHEMICAL REAKTOR EQUIP AS
KEMIKARU RIAKUTAA EKYUITSUPUMENTO AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHEMICAL REAKTOR EQUIP AS, KEMIKARU RIAKUTAA EKYUITSUPUMENTO AS filed Critical CHEMICAL REAKTOR EQUIP AS
Publication of JPS5174381A publication Critical patent/JPS5174381A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP50138781A 1974-11-20 1975-11-20 Pending JPS5174381A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK604074A DK604074A (da) 1974-11-20 1974-11-20 Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater

Publications (1)

Publication Number Publication Date
JPS5174381A true JPS5174381A (ja) 1976-06-28

Family

ID=8146996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50138781A Pending JPS5174381A (ja) 1974-11-20 1975-11-20

Country Status (6)

Country Link
US (1) US4087133A (ja)
JP (1) JPS5174381A (ja)
DE (1) DE2551567A1 (ja)
DK (1) DK604074A (ja)
NL (1) NL7513535A (ja)
SE (1) SE7513003L (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010533970A (ja) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト 平面状の基板用の非接触型搬送装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8300649A (nl) * 1983-02-21 1984-09-17 Integrated Automation Methode en inrichting voor het aanbrengen van een coating op een substraat of tape.
US4600471A (en) * 1981-08-26 1986-07-15 Integrated Automation, Limited Method and apparatus for transport and processing of substrate with developing agent
NL8103979A (nl) * 1981-08-26 1983-03-16 Bok Edward Methode en inrichting voor het aanbrengen van een film vloeibaar medium op een substraat.
SG115602A1 (en) * 2003-01-09 2005-10-28 Disco Corp Conveying device for a plate-like workpiece
FR2980994B1 (fr) 2011-10-07 2015-11-27 Semco Engineering Prehenseur multi-plaquettes.

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1061526A (en) * 1910-08-09 1913-05-13 Samuel W Cortissoz Feed and delivery attachment for printing-presses.
US3219340A (en) * 1961-09-07 1965-11-23 Hitachi Ltd Apparatus for separating and conveying cards or the like by means of an air stream
US3136539A (en) * 1962-12-03 1964-06-09 Lyman Brooks Sheet handling
US3198515A (en) * 1963-04-05 1965-08-03 Robert C Pitney Aerodynamic document handling apparatus
US3503607A (en) * 1967-12-27 1970-03-31 Sperry Rand Corp Pneumatic document stacking device
US3511495A (en) * 1968-01-24 1970-05-12 Sperry Rand Corp Document feeder mechanism
US3504910A (en) * 1968-06-06 1970-04-07 Us Army Fluidic singulator
US3717381A (en) * 1969-07-25 1973-02-20 Texas Instruments Inc Transporting and positioning system
US3614168A (en) * 1969-09-30 1971-10-19 Bowles Fluidics Corp Bernoulli conveyor
US3930684A (en) * 1971-06-22 1976-01-06 Lasch Jr Cecil A Automatic wafer feeding and pre-alignment apparatus and method
US3718371A (en) * 1971-08-25 1973-02-27 Ind Modular Syst Corp Fluid bearing track structure and components thereof
US3948564A (en) * 1974-01-17 1976-04-06 Gca Corporation Fluid bearing apparatus and method utilizing selective turntable diverter structure
GB1513444A (en) * 1974-09-06 1978-06-07 Chemical Reactor Equip As Pick-up devices for lifting and moving semiconductor wafers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010533970A (ja) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト 平面状の基板用の非接触型搬送装置

Also Published As

Publication number Publication date
US4087133A (en) 1978-05-02
DE2551567A1 (de) 1976-05-26
DK604074A (da) 1976-05-21
NL7513535A (nl) 1976-05-24
SE7513003L (sv) 1976-05-21

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