DK604074A - Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater - Google Patents

Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater

Info

Publication number
DK604074A
DK604074A DK604074A DK604074A DK604074A DK 604074 A DK604074 A DK 604074A DK 604074 A DK604074 A DK 604074A DK 604074 A DK604074 A DK 604074A DK 604074 A DK604074 A DK 604074A
Authority
DK
Denmark
Prior art keywords
sarbable
objected
pollution
objects
thin film
Prior art date
Application number
DK604074A
Other languages
Danish (da)
English (en)
Inventor
O P Olofsen
K S Lund
B K Jorgensen
Original Assignee
Chemical Reactor Equip As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chemical Reactor Equip As filed Critical Chemical Reactor Equip As
Priority to DK604074A priority Critical patent/DK604074A/da
Priority to DE19752551567 priority patent/DE2551567A1/de
Priority to NL7513535A priority patent/NL7513535A/xx
Priority to SE7513003A priority patent/SE7513003L/xx
Priority to US05/633,197 priority patent/US4087133A/en
Priority to JP50138781A priority patent/JPS5174381A/ja
Publication of DK604074A publication Critical patent/DK604074A/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
DK604074A 1974-11-20 1974-11-20 Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater DK604074A (da)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DK604074A DK604074A (da) 1974-11-20 1974-11-20 Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater
DE19752551567 DE2551567A1 (de) 1974-11-20 1975-11-17 Transportband
NL7513535A NL7513535A (nl) 1974-11-20 1975-11-19 Systeem voor het transporteren van indentieke schijfvormige werkstukken.
SE7513003A SE7513003L (sv) 1974-11-20 1975-11-19 Anordning vid kemisk reaktor
US05/633,197 US4087133A (en) 1974-11-20 1975-11-19 Transport system for disc-shaped work-pieces
JP50138781A JPS5174381A (enExample) 1974-11-20 1975-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK604074A DK604074A (da) 1974-11-20 1974-11-20 Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater

Publications (1)

Publication Number Publication Date
DK604074A true DK604074A (da) 1976-05-21

Family

ID=8146996

Family Applications (1)

Application Number Title Priority Date Filing Date
DK604074A DK604074A (da) 1974-11-20 1974-11-20 Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater

Country Status (6)

Country Link
US (1) US4087133A (enExample)
JP (1) JPS5174381A (enExample)
DE (1) DE2551567A1 (enExample)
DK (1) DK604074A (enExample)
NL (1) NL7513535A (enExample)
SE (1) SE7513003L (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8300649A (nl) * 1983-02-21 1984-09-17 Integrated Automation Methode en inrichting voor het aanbrengen van een coating op een substraat of tape.
NL8103979A (nl) * 1981-08-26 1983-03-16 Bok Edward Methode en inrichting voor het aanbrengen van een film vloeibaar medium op een substraat.
US4600471A (en) * 1981-08-26 1986-07-15 Integrated Automation, Limited Method and apparatus for transport and processing of substrate with developing agent
SG115602A1 (en) * 2003-01-09 2005-10-28 Disco Corp Conveying device for a plate-like workpiece
JP2010533970A (ja) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト 平面状の基板用の非接触型搬送装置
FR2980994B1 (fr) 2011-10-07 2015-11-27 Semco Engineering Prehenseur multi-plaquettes.
JP6748572B2 (ja) * 2016-12-28 2020-09-02 昭和電工株式会社 ｐ型ＳｉＣエピタキシャルウェハ及びその製造方法
CN113506762B (zh) * 2021-06-29 2025-05-30 东方日升（常州）新能源有限公司 硅片悬浮传输机构

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1061526A (en) * 1910-08-09 1913-05-13 Samuel W Cortissoz Feed and delivery attachment for printing-presses.
US3219340A (en) * 1961-09-07 1965-11-23 Hitachi Ltd Apparatus for separating and conveying cards or the like by means of an air stream
US3136539A (en) * 1962-12-03 1964-06-09 Lyman Brooks Sheet handling
US3198515A (en) * 1963-04-05 1965-08-03 Robert C Pitney Aerodynamic document handling apparatus
US3503607A (en) * 1967-12-27 1970-03-31 Sperry Rand Corp Pneumatic document stacking device
US3511495A (en) * 1968-01-24 1970-05-12 Sperry Rand Corp Document feeder mechanism
US3504910A (en) * 1968-06-06 1970-04-07 Us Army Fluidic singulator
US3717381A (en) * 1969-07-25 1973-02-20 Texas Instruments Inc Transporting and positioning system
US3614168A (en) * 1969-09-30 1971-10-19 Bowles Fluidics Corp Bernoulli conveyor
US3930684A (en) * 1971-06-22 1976-01-06 Lasch Jr Cecil A Automatic wafer feeding and pre-alignment apparatus and method
US3718371A (en) * 1971-08-25 1973-02-27 Ind Modular Syst Corp Fluid bearing track structure and components thereof
US3948564A (en) * 1974-01-17 1976-04-06 Gca Corporation Fluid bearing apparatus and method utilizing selective turntable diverter structure
GB1513444A (en) * 1974-09-06 1978-06-07 Chemical Reactor Equip As Pick-up devices for lifting and moving semiconductor wafers

Also Published As

Publication number Publication date
NL7513535A (nl) 1976-05-24
DE2551567A1 (de) 1976-05-26
SE7513003L (sv) 1976-05-21
US4087133A (en) 1978-05-02
JPS5174381A (enExample) 1976-06-28

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