DE2522611C2 - Vorrichtung zum Ziehen von Einkristallen - Google Patents
Vorrichtung zum Ziehen von EinkristallenInfo
- Publication number
- DE2522611C2 DE2522611C2 DE2522611A DE2522611A DE2522611C2 DE 2522611 C2 DE2522611 C2 DE 2522611C2 DE 2522611 A DE2522611 A DE 2522611A DE 2522611 A DE2522611 A DE 2522611A DE 2522611 C2 DE2522611 C2 DE 2522611C2
- Authority
- DE
- Germany
- Prior art keywords
- shaft
- pull shaft
- crystal
- carriage
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 title claims description 78
- 230000033001 locomotion Effects 0.000 claims description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910002804 graphite Inorganic materials 0.000 claims description 12
- 239000010439 graphite Substances 0.000 claims description 12
- 239000000155 melt Substances 0.000 claims description 9
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 36
- 229910052710 silicon Inorganic materials 0.000 description 36
- 239000010703 silicon Substances 0.000 description 36
- 238000010438 heat treatment Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 238000010276 construction Methods 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007665 sagging Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003415 peat Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/911—Seed or rod holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/483,511 US3953281A (en) | 1974-06-27 | 1974-06-27 | Method and system for growing monocrystalline ingots |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2522611A1 DE2522611A1 (de) | 1976-01-15 |
| DE2522611C2 true DE2522611C2 (de) | 1985-11-14 |
Family
ID=23920354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2522611A Expired DE2522611C2 (de) | 1974-06-27 | 1975-05-22 | Vorrichtung zum Ziehen von Einkristallen |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3953281A (enExample) |
| JP (1) | JPS5325717B2 (enExample) |
| DE (1) | DE2522611C2 (enExample) |
| FR (1) | FR2276095A1 (enExample) |
| GB (1) | GB1447222A (enExample) |
| IT (1) | IT1038098B (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52106451U (enExample) * | 1976-02-04 | 1977-08-13 | ||
| US4201746A (en) * | 1976-12-27 | 1980-05-06 | Monsanto Company | Apparatus for zone refining |
| US4045181A (en) * | 1976-12-27 | 1977-08-30 | Monsanto Company | Apparatus for zone refining |
| US4235848A (en) * | 1978-06-15 | 1980-11-25 | Apilat Vitaly Y | Apparatus for pulling single crystal from melt on a seed |
| FR2433970B1 (fr) * | 1978-08-25 | 1981-01-30 | Gnii Redkometa | Dispositif pour le tirage d'un monocristal sur une amorce a partir d'un bain de fusion |
| US4360499A (en) * | 1981-06-22 | 1982-11-23 | Rca Corporation | Bellows assembly for crystal ribbon puller |
| US4511428A (en) * | 1982-07-09 | 1985-04-16 | International Business Machines Corporation | Method of controlling oxygen content and distribution in grown silicon crystals |
| DE3743951A1 (de) * | 1986-12-26 | 1988-07-07 | Toshiba Ceramics Co | Einrichtung zum ziehen von siliziumeinkristallen mit einem waermeisolierzylinder und verfahren zur herstellung des materials desselben |
| JPH06456Y2 (ja) * | 1989-08-29 | 1994-01-05 | 信越半導体株式会社 | 単結晶引上装置のシール構造 |
| JPH04260686A (ja) * | 1991-02-08 | 1992-09-16 | Shin Etsu Handotai Co Ltd | 単結晶引上装置 |
| JPH04105312U (ja) * | 1991-02-20 | 1992-09-10 | 株式会社中村多喜彌商店 | 網目天井材用吊り具 |
| JP3488531B2 (ja) * | 1994-12-19 | 2004-01-19 | コマツ電子金属株式会社 | 多結晶棒の吊り具 |
| JP3402012B2 (ja) * | 1995-04-21 | 2003-04-28 | 信越半導体株式会社 | 単結晶の成長方法及び装置 |
| US5911825A (en) * | 1997-09-30 | 1999-06-15 | Seh America, Inc. | Low oxygen heater |
| JP3694736B2 (ja) * | 2001-06-12 | 2005-09-14 | 独立行政法人産業技術総合研究所 | 酸化亜鉛単結晶の製造方法 |
| US20220298671A1 (en) * | 2021-03-18 | 2022-09-22 | Linton Crystal Technologies Corp. | Crystal growing assembly with combination lift arm and winch |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US396430A (en) * | 1889-01-22 | Helm reichel | ||
| US719466A (en) * | 1902-03-08 | 1903-02-03 | Nelson Hiss | Traction apparatus. |
| US3173765A (en) * | 1955-03-18 | 1965-03-16 | Itt | Method of making crystalline silicon semiconductor material |
| US3275417A (en) * | 1963-10-15 | 1966-09-27 | Texas Instruments Inc | Production of dislocation-free silicon single crystals |
| US3337303A (en) * | 1965-03-01 | 1967-08-22 | Elmat Corp | Crystal growing apparatus |
| US3650701A (en) * | 1970-07-22 | 1972-03-21 | Commissariat Energie Atomique | Apparatus for growing crystalline bodies |
| US3679370A (en) * | 1970-07-31 | 1972-07-25 | Western Electric Co | Crystal grower with expandable chamber |
-
1974
- 1974-06-27 US US05/483,511 patent/US3953281A/en not_active Expired - Lifetime
-
1975
- 1975-05-14 IT IT23303/75A patent/IT1038098B/it active
- 1975-05-21 FR FR7516539A patent/FR2276095A1/fr active Granted
- 1975-05-21 GB GB2187775A patent/GB1447222A/en not_active Expired
- 1975-05-22 DE DE2522611A patent/DE2522611C2/de not_active Expired
- 1975-06-04 JP JP6665975A patent/JPS5325717B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3953281A (en) | 1976-04-27 |
| JPS519083A (enExample) | 1976-01-24 |
| JPS5325717B2 (enExample) | 1978-07-28 |
| IT1038098B (it) | 1979-11-20 |
| FR2276095B1 (enExample) | 1977-04-15 |
| DE2522611A1 (de) | 1976-01-15 |
| GB1447222A (en) | 1976-08-25 |
| FR2276095A1 (fr) | 1976-01-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |