DE2512627A1 - Vakuum-vorrichtung zur untersuchung von proben - Google Patents
Vakuum-vorrichtung zur untersuchung von probenInfo
- Publication number
- DE2512627A1 DE2512627A1 DE19752512627 DE2512627A DE2512627A1 DE 2512627 A1 DE2512627 A1 DE 2512627A1 DE 19752512627 DE19752512627 DE 19752512627 DE 2512627 A DE2512627 A DE 2512627A DE 2512627 A1 DE2512627 A1 DE 2512627A1
- Authority
- DE
- Germany
- Prior art keywords
- sample
- sample holder
- samples
- radiation
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000012360 testing method Methods 0.000 claims description 21
- 230000005855 radiation Effects 0.000 claims description 10
- 239000000523 sample Substances 0.000 description 66
- 238000010894 electron beam technology Methods 0.000 description 7
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US45374974A | 1974-03-22 | 1974-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2512627A1 true DE2512627A1 (de) | 1975-10-02 |
Family
ID=23801914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752512627 Ceased DE2512627A1 (de) | 1974-03-22 | 1975-03-21 | Vakuum-vorrichtung zur untersuchung von proben |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS50138890A (enExample) |
| DE (1) | DE2512627A1 (enExample) |
| FR (1) | FR2265091B3 (enExample) |
| GB (1) | GB1493318A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6141949A (ja) * | 1984-08-04 | 1986-02-28 | Horiba Ltd | 螢光ｘ線測定装置 |
-
1975
- 1975-03-19 GB GB1140475A patent/GB1493318A/en not_active Expired
- 1975-03-21 FR FR7508914A patent/FR2265091B3/fr not_active Expired
- 1975-03-21 DE DE19752512627 patent/DE2512627A1/de not_active Ceased
- 1975-03-22 JP JP50033545A patent/JPS50138890A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2265091B3 (enExample) | 1977-04-15 |
| FR2265091A1 (enExample) | 1975-10-17 |
| GB1493318A (en) | 1977-11-30 |
| JPS50138890A (enExample) | 1975-11-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8131 | Rejection |