DE2500184A1 - Verfahren zum herstellen einer ladungsuebertragungsvorrichtung - Google Patents
Verfahren zum herstellen einer ladungsuebertragungsvorrichtungInfo
- Publication number
- DE2500184A1 DE2500184A1 DE19752500184 DE2500184A DE2500184A1 DE 2500184 A1 DE2500184 A1 DE 2500184A1 DE 19752500184 DE19752500184 DE 19752500184 DE 2500184 A DE2500184 A DE 2500184A DE 2500184 A1 DE2500184 A1 DE 2500184A1
- Authority
- DE
- Germany
- Prior art keywords
- insulating
- steps
- electrodes
- metal layer
- sequence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 23
- 238000010884 ion-beam technique Methods 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 16
- 238000005468 ion implantation Methods 0.000 claims description 13
- 230000000737 periodic effect Effects 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 239000002019 doping agent Substances 0.000 claims 2
- 230000001427 coherent effect Effects 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 23
- 238000010586 diagram Methods 0.000 description 7
- 238000002513 implantation Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/762—Charge transfer devices
- H01L29/765—Charge-coupled devices
- H01L29/768—Charge-coupled devices with field effect produced by an insulated gate
- H01L29/76833—Buried channel CCD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1062—Channel region of field-effect devices of charge coupled devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42396—Gate electrodes for field effect devices for charge coupled devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/762—Charge transfer devices
- H01L29/765—Charge-coupled devices
- H01L29/768—Charge-coupled devices with field effect produced by an insulated gate
- H01L29/76833—Buried channel CCD
- H01L29/76841—Two-Phase CCD
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/981—Utilizing varying dielectric thickness
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7400294A FR2257145B1 (US20040232935A1-20041125-M00001.png) | 1974-01-04 | 1974-01-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2500184A1 true DE2500184A1 (de) | 1975-07-17 |
| DE2500184C2 DE2500184C2 (US20040232935A1-20041125-M00001.png) | 1989-04-06 |
Family
ID=9133116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752500184 Granted DE2500184A1 (de) | 1974-01-04 | 1975-01-03 | Verfahren zum herstellen einer ladungsuebertragungsvorrichtung |
Country Status (5)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2926334A1 (de) * | 1978-06-29 | 1980-01-03 | Raytheon Co | Verfahren zur herstellung von halbleiterbauelementen, insbesondere von ladungsgekoppelten bauelementen |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4041520A (en) * | 1976-08-06 | 1977-08-09 | Honeywell Information Systems Inc. | Uniphase charge transfer device |
| JPS606101B2 (ja) * | 1976-10-14 | 1985-02-15 | ソニー株式会社 | 電荷転送装置の製法 |
| US4086102A (en) * | 1976-12-13 | 1978-04-25 | King William J | Inexpensive solar cell and method therefor |
| USRE31151E (en) * | 1980-04-07 | 1983-02-15 | Inexpensive solar cell and method therefor | |
| US4474624A (en) * | 1982-07-12 | 1984-10-02 | Intel Corporation | Process for forming self-aligned complementary source/drain regions for MOS transistors |
| DD253709A1 (de) * | 1986-09-04 | 1988-01-27 | Werk Fernsehelektronik Veb | Register mit kleinstem raster |
| US4896003A (en) * | 1989-06-30 | 1990-01-23 | Hsieh Man Ching | Multi-position electrical switch |
| JP4639116B2 (ja) * | 2005-06-27 | 2011-02-23 | 富士フイルム株式会社 | Ｃｃｄ型固体撮像装置の製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2201395A1 (de) * | 1971-01-14 | 1972-07-27 | Commissariat Energie Atomique | Ladungsuebertragungsvorrichtung und Verfahren zur Herstellung derselben |
| DE2231565A1 (de) * | 1971-06-28 | 1973-01-18 | Western Electric Co | Umsteuerbare zweiphasige ladungsgekoppelte baueinheit |
| DE2314260A1 (de) * | 1972-05-30 | 1973-12-13 | Ibm | Ladungsgekoppelte halbleiteranordnung und verfahren zu ihrer herstellung |
| DE2331616A1 (de) * | 1973-06-22 | 1975-01-23 | Bosch Gmbh Robert | Einrichtung zur kompensation von seitenwind- und anderen, eine seitenabweichung eines kraftfahrzeugs bewirkenden stoerkraeften |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1289740A (US20040232935A1-20041125-M00001.png) * | 1969-12-24 | 1972-09-20 | ||
| US3697786A (en) * | 1971-03-29 | 1972-10-10 | Bell Telephone Labor Inc | Capacitively driven charge transfer devices |
| US3796932A (en) * | 1971-06-28 | 1974-03-12 | Bell Telephone Labor Inc | Charge coupled devices employing nonuniform concentrations of immobile charge along the information channel |
| JPS4847234A (US20040232935A1-20041125-M00001.png) * | 1971-10-18 | 1973-07-05 |
-
1974
- 1974-01-04 FR FR7400294A patent/FR2257145B1/fr not_active Expired
- 1974-12-27 JP JP752992A patent/JPS5921182B2/ja not_active Expired
-
1975
- 1975-01-02 GB GB7375A patent/GB1469081A/en not_active Expired
- 1975-01-02 US US05/538,168 patent/US4019247A/en not_active Expired - Lifetime
- 1975-01-03 DE DE19752500184 patent/DE2500184A1/de active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2201395A1 (de) * | 1971-01-14 | 1972-07-27 | Commissariat Energie Atomique | Ladungsuebertragungsvorrichtung und Verfahren zur Herstellung derselben |
| DE2231565A1 (de) * | 1971-06-28 | 1973-01-18 | Western Electric Co | Umsteuerbare zweiphasige ladungsgekoppelte baueinheit |
| DE2314260A1 (de) * | 1972-05-30 | 1973-12-13 | Ibm | Ladungsgekoppelte halbleiteranordnung und verfahren zu ihrer herstellung |
| DE2331616A1 (de) * | 1973-06-22 | 1975-01-23 | Bosch Gmbh Robert | Einrichtung zur kompensation von seitenwind- und anderen, eine seitenabweichung eines kraftfahrzeugs bewirkenden stoerkraeften |
Non-Patent Citations (4)
| Title |
|---|
| US-Z.: IEEE Journal of Solid-State Circuits, Bd. SC-6, 1971, Nr. 5, S. 314-322 * |
| US-Z.: IEEE Journal of Solid-State Circuits, Februar 1972, S. 92-93 * |
| US-Z.: Proceedings of the IEEE, Juni 1972, S. 721-722 * |
| US-Z.: The Bell System Technical Journal Bd. 49, 1970, S. 587-593 und 593-600 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2926334A1 (de) * | 1978-06-29 | 1980-01-03 | Raytheon Co | Verfahren zur herstellung von halbleiterbauelementen, insbesondere von ladungsgekoppelten bauelementen |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2257145B1 (US20040232935A1-20041125-M00001.png) | 1976-11-26 |
| US4019247A (en) | 1977-04-26 |
| JPS5921182B2 (ja) | 1984-05-18 |
| GB1469081A (en) | 1977-03-30 |
| FR2257145A1 (US20040232935A1-20041125-M00001.png) | 1975-08-01 |
| DE2500184C2 (US20040232935A1-20041125-M00001.png) | 1989-04-06 |
| JPS50118687A (US20040232935A1-20041125-M00001.png) | 1975-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8125 | Change of the main classification |
Ipc: H01L 29/66 |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |