DE2441448A1 - Vorrichtung zum aufbringen von spritzueberzuegen auf substrate - Google Patents

Vorrichtung zum aufbringen von spritzueberzuegen auf substrate

Info

Publication number
DE2441448A1
DE2441448A1 DE19742441448 DE2441448A DE2441448A1 DE 2441448 A1 DE2441448 A1 DE 2441448A1 DE 19742441448 DE19742441448 DE 19742441448 DE 2441448 A DE2441448 A DE 2441448A DE 2441448 A1 DE2441448 A1 DE 2441448A1
Authority
DE
Germany
Prior art keywords
electrode
electrodes
housing
substrates
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19742441448
Other languages
German (de)
English (en)
Inventor
Robert Edward Latimer Cox
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
British Oxigen Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Oxigen Ltd filed Critical British Oxigen Ltd
Publication of DE2441448A1 publication Critical patent/DE2441448A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Nozzles (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
DE19742441448 1973-08-31 1974-08-29 Vorrichtung zum aufbringen von spritzueberzuegen auf substrate Pending DE2441448A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4115373A GB1435344A (en) 1973-08-31 1973-08-31 Sputtering apparatus

Publications (1)

Publication Number Publication Date
DE2441448A1 true DE2441448A1 (de) 1975-03-06

Family

ID=10418348

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19742441448 Pending DE2441448A1 (de) 1973-08-31 1974-08-29 Vorrichtung zum aufbringen von spritzueberzuegen auf substrate

Country Status (4)

Country Link
JP (1) JPS5064185A (enrdf_load_stackoverflow)
DE (1) DE2441448A1 (enrdf_load_stackoverflow)
GB (1) GB1435344A (enrdf_load_stackoverflow)
NL (1) NL7411499A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2933253A1 (de) * 1978-08-17 1980-03-06 Matsushita Electric Ind Co Ltd Aufzeichnungsmaterial und verfahren zur aufzeichnung optischer informationen
US4940523A (en) * 1988-06-09 1990-07-10 Nisshin Steel Company Ltd. Process and apparatus for coating fine powders
US5753089A (en) * 1995-06-28 1998-05-19 Balzers Aktiengesellschaft Sputter coating station

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3401700C1 (de) * 1984-01-19 1985-08-14 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Verfahren zur Herstellung von Pulvern unter Weltraumbedingungen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU475272B2 (en) * 1971-09-07 1976-08-19 Felio Corporation Glow discharge method and apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2933253A1 (de) * 1978-08-17 1980-03-06 Matsushita Electric Ind Co Ltd Aufzeichnungsmaterial und verfahren zur aufzeichnung optischer informationen
US4940523A (en) * 1988-06-09 1990-07-10 Nisshin Steel Company Ltd. Process and apparatus for coating fine powders
US5753089A (en) * 1995-06-28 1998-05-19 Balzers Aktiengesellschaft Sputter coating station

Also Published As

Publication number Publication date
JPS5064185A (enrdf_load_stackoverflow) 1975-05-31
GB1435344A (en) 1976-05-12
NL7411499A (nl) 1975-03-04

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