GB1435344A - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
GB1435344A
GB1435344A GB4115373A GB4115373A GB1435344A GB 1435344 A GB1435344 A GB 1435344A GB 4115373 A GB4115373 A GB 4115373A GB 4115373 A GB4115373 A GB 4115373A GB 1435344 A GB1435344 A GB 1435344A
Authority
GB
United Kingdom
Prior art keywords
powder
sputtering apparatus
boat
aug
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4115373A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Edwards High Vacuum International Ltd
Original Assignee
BOC International Ltd
Edwards High Vacuum International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC International Ltd, Edwards High Vacuum International Ltd filed Critical BOC International Ltd
Priority to GB4115373A priority Critical patent/GB1435344A/en
Priority to DE19742441448 priority patent/DE2441448A1/de
Priority to NL7411499A priority patent/NL7411499A/xx
Priority to JP9984174A priority patent/JPS5064185A/ja
Publication of GB1435344A publication Critical patent/GB1435344A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Nozzles (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
GB4115373A 1973-08-31 1973-08-31 Sputtering apparatus Expired GB1435344A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB4115373A GB1435344A (en) 1973-08-31 1973-08-31 Sputtering apparatus
DE19742441448 DE2441448A1 (de) 1973-08-31 1974-08-29 Vorrichtung zum aufbringen von spritzueberzuegen auf substrate
NL7411499A NL7411499A (nl) 1973-08-31 1974-08-29 Spetterinrichting.
JP9984174A JPS5064185A (enrdf_load_stackoverflow) 1973-08-31 1974-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4115373A GB1435344A (en) 1973-08-31 1973-08-31 Sputtering apparatus

Publications (1)

Publication Number Publication Date
GB1435344A true GB1435344A (en) 1976-05-12

Family

ID=10418348

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4115373A Expired GB1435344A (en) 1973-08-31 1973-08-31 Sputtering apparatus

Country Status (4)

Country Link
JP (1) JPS5064185A (enrdf_load_stackoverflow)
DE (1) DE2441448A1 (enrdf_load_stackoverflow)
GB (1) GB1435344A (enrdf_load_stackoverflow)
NL (1) NL7411499A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2153856A (en) * 1984-01-19 1985-08-29 Mtu Muenchen Gmbh Method for manufacturing powders

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528530A (en) * 1978-08-17 1980-02-29 Matsushita Electric Ind Co Ltd Optical information recording method
JP2909744B2 (ja) * 1988-06-09 1999-06-23 日新製鋼株式会社 微粉末を被覆する方法と装置
DE19617155B4 (de) * 1995-06-28 2007-07-26 Oc Oerlikon Balzers Ag Sputterbeschichtungsstation, Verfahren zur Herstellung sputterbeschichteter Werkstücke und Verwendung der Station oder des Verfahrens zur Beschichtung scheibenförmiger Substrate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU475272B2 (en) * 1971-09-07 1976-08-19 Felio Corporation Glow discharge method and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2153856A (en) * 1984-01-19 1985-08-29 Mtu Muenchen Gmbh Method for manufacturing powders

Also Published As

Publication number Publication date
JPS5064185A (enrdf_load_stackoverflow) 1975-05-31
NL7411499A (nl) 1975-03-04
DE2441448A1 (de) 1975-03-06

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee