JPS5064185A - - Google Patents

Info

Publication number
JPS5064185A
JPS5064185A JP9984174A JP9984174A JPS5064185A JP S5064185 A JPS5064185 A JP S5064185A JP 9984174 A JP9984174 A JP 9984174A JP 9984174 A JP9984174 A JP 9984174A JP S5064185 A JPS5064185 A JP S5064185A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9984174A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5064185A publication Critical patent/JPS5064185A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Nozzles (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
JP9984174A 1973-08-31 1974-08-30 Pending JPS5064185A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4115373A GB1435344A (en) 1973-08-31 1973-08-31 Sputtering apparatus

Publications (1)

Publication Number Publication Date
JPS5064185A true JPS5064185A (enrdf_load_stackoverflow) 1975-05-31

Family

ID=10418348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9984174A Pending JPS5064185A (enrdf_load_stackoverflow) 1973-08-31 1974-08-30

Country Status (4)

Country Link
JP (1) JPS5064185A (enrdf_load_stackoverflow)
DE (1) DE2441448A1 (enrdf_load_stackoverflow)
GB (1) GB1435344A (enrdf_load_stackoverflow)
NL (1) NL7411499A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528530A (en) * 1978-08-17 1980-02-29 Matsushita Electric Ind Co Ltd Optical information recording method
DE3401700C1 (de) * 1984-01-19 1985-08-14 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Verfahren zur Herstellung von Pulvern unter Weltraumbedingungen
JP2909744B2 (ja) * 1988-06-09 1999-06-23 日新製鋼株式会社 微粉末を被覆する方法と装置
DE19617155B4 (de) * 1995-06-28 2007-07-26 Oc Oerlikon Balzers Ag Sputterbeschichtungsstation, Verfahren zur Herstellung sputterbeschichteter Werkstücke und Verwendung der Station oder des Verfahrens zur Beschichtung scheibenförmiger Substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926184A (enrdf_load_stackoverflow) * 1971-09-07 1974-03-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926184A (enrdf_load_stackoverflow) * 1971-09-07 1974-03-08

Also Published As

Publication number Publication date
GB1435344A (en) 1976-05-12
NL7411499A (nl) 1975-03-04
DE2441448A1 (de) 1975-03-06

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