JPS4926184A - - Google Patents

Info

Publication number
JPS4926184A
JPS4926184A JP47089196A JP8919672A JPS4926184A JP S4926184 A JPS4926184 A JP S4926184A JP 47089196 A JP47089196 A JP 47089196A JP 8919672 A JP8919672 A JP 8919672A JP S4926184 A JPS4926184 A JP S4926184A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47089196A
Other languages
Japanese (ja)
Other versions
JPS5748637B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US178240A external-priority patent/US3884793A/en
Application filed filed Critical
Publication of JPS4926184A publication Critical patent/JPS4926184A/ja
Publication of JPS5748637B2 publication Critical patent/JPS5748637B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47089196A 1971-09-07 1972-09-07 Expired JPS5748637B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17824871A 1971-09-07 1971-09-07
US178240A US3884793A (en) 1971-09-07 1971-09-07 Electrode type glow discharge apparatus
US25450472A 1972-05-18 1972-05-18

Publications (2)

Publication Number Publication Date
JPS4926184A true JPS4926184A (enrdf_load_stackoverflow) 1974-03-08
JPS5748637B2 JPS5748637B2 (enrdf_load_stackoverflow) 1982-10-16

Family

ID=27390946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47089196A Expired JPS5748637B2 (enrdf_load_stackoverflow) 1971-09-07 1972-09-07

Country Status (2)

Country Link
JP (1) JPS5748637B2 (enrdf_load_stackoverflow)
AU (1) AU475272B2 (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5064185A (enrdf_load_stackoverflow) * 1973-08-31 1975-05-31
JPS5197548U (enrdf_load_stackoverflow) * 1975-02-03 1976-08-05
JPS5596164U (enrdf_load_stackoverflow) * 1979-10-01 1980-07-03
JPS57161057A (en) * 1981-03-30 1982-10-04 Mitsubishi Electric Corp Chemical vapor phase growth device using plasma
JPS58147567A (ja) * 1982-02-24 1983-09-02 Mitsubishi Heavy Ind Ltd アルミニウム又はアルミニウム合金タンク用防食剤
JPS58171569A (ja) * 1982-03-31 1983-10-08 Hidetoshi Tsuchiya スパッタリング方法
JP2008510066A (ja) * 2004-08-12 2008-04-03 フォン アルデンヌ アンラジェンテクニック ゲーエムベーハー 自浄式ターゲットを有する円筒状マグネトロン
WO2015076162A1 (ja) * 2013-11-22 2015-05-28 東レ株式会社 プラズマ電極、プラズマ処理電極、ｃｖｄ電極、プラズマｃｖｄ装置及び薄膜付基材の製造方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5064185A (enrdf_load_stackoverflow) * 1973-08-31 1975-05-31
JPS5197548U (enrdf_load_stackoverflow) * 1975-02-03 1976-08-05
JPS5596164U (enrdf_load_stackoverflow) * 1979-10-01 1980-07-03
JPS57161057A (en) * 1981-03-30 1982-10-04 Mitsubishi Electric Corp Chemical vapor phase growth device using plasma
JPS58147567A (ja) * 1982-02-24 1983-09-02 Mitsubishi Heavy Ind Ltd アルミニウム又はアルミニウム合金タンク用防食剤
JPS58171569A (ja) * 1982-03-31 1983-10-08 Hidetoshi Tsuchiya スパッタリング方法
JP2008510066A (ja) * 2004-08-12 2008-04-03 フォン アルデンヌ アンラジェンテクニック ゲーエムベーハー 自浄式ターゲットを有する円筒状マグネトロン
WO2015076162A1 (ja) * 2013-11-22 2015-05-28 東レ株式会社 プラズマ電極、プラズマ処理電極、ｃｖｄ電極、プラズマｃｖｄ装置及び薄膜付基材の製造方法
JPWO2015076162A1 (ja) * 2013-11-22 2017-03-16 東レ株式会社 プラズマ電極、プラズマ処理電極、ｃｖｄ電極、プラズマｃｖｄ装置及び薄膜付基材の製造方法

Also Published As

Publication number Publication date
AU475272B2 (en) 1976-08-19
AU4633172A (en) 1974-03-14
JPS5748637B2 (enrdf_load_stackoverflow) 1982-10-16

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