AU4633172A - Glow discharge method and apparatus - Google Patents

Glow discharge method and apparatus

Info

Publication number
AU4633172A
AU4633172A AU46331/72A AU4633172A AU4633172A AU 4633172 A AU4633172 A AU 4633172A AU 46331/72 A AU46331/72 A AU 46331/72A AU 4633172 A AU4633172 A AU 4633172A AU 4633172 A AU4633172 A AU 4633172A
Authority
AU
Australia
Prior art keywords
glow discharge
discharge method
glow
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU46331/72A
Other versions
AU475272B2 (en
Inventor
SCARDEBURG PENFOLD and JOHN ALEXANDER THORNTON ALAN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Felio Corp
Original Assignee
Telic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US178240A external-priority patent/US3884793A/en
Application filed by Telic Corp filed Critical Telic Corp
Publication of AU4633172A publication Critical patent/AU4633172A/en
Application granted granted Critical
Publication of AU475272B2 publication Critical patent/AU475272B2/en
Expired legal-status Critical Current

Links

AU46331/72A 1971-09-07 1972-09-05 Glow discharge method and apparatus Expired AU475272B2 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US17824871A 1971-09-07 1971-09-07
USUS178248 1971-09-07
US178240A US3884793A (en) 1971-09-07 1971-09-07 Electrode type glow discharge apparatus
US25450472A 1972-05-18 1972-05-18
USUS254504 1972-05-18

Publications (2)

Publication Number Publication Date
AU4633172A true AU4633172A (en) 1974-03-14
AU475272B2 AU475272B2 (en) 1976-08-19

Family

ID=27390946

Family Applications (1)

Application Number Title Priority Date Filing Date
AU46331/72A Expired AU475272B2 (en) 1971-09-07 1972-09-05 Glow discharge method and apparatus

Country Status (2)

Country Link
JP (1) JPS5748637B2 (en)
AU (1) AU475272B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1435344A (en) * 1973-08-31 1976-05-12 Boc International Ltd Sputtering apparatus
JPS561723Y2 (en) * 1975-02-03 1981-01-16
JPS5596164U (en) * 1979-10-01 1980-07-03
JPS57161057A (en) * 1981-03-30 1982-10-04 Mitsubishi Electric Corp Chemical vapor phase growth device using plasma
JPS58147567A (en) * 1982-02-24 1983-09-02 Mitsubishi Heavy Ind Ltd Anticorrosive for aluminum or aluminum alloy tank
JPS58171569A (en) * 1982-03-31 1983-10-08 Hidetoshi Tsuchiya Magnetron sputtering device
US20050051422A1 (en) * 2003-02-21 2005-03-10 Rietzel James G. Cylindrical magnetron with self cleaning target
CN105659708B (en) * 2013-11-22 2018-05-01 东丽株式会社 Plasma electrode, corona treatment electrode, CVD electrodes, the manufacture method of plasma CVD equipment and membrane base material

Also Published As

Publication number Publication date
JPS5748637B2 (en) 1982-10-16
AU475272B2 (en) 1976-08-19
JPS4926184A (en) 1974-03-08

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