JPS561723Y2 - - Google Patents

Info

Publication number
JPS561723Y2
JPS561723Y2 JP1975014663U JP1466375U JPS561723Y2 JP S561723 Y2 JPS561723 Y2 JP S561723Y2 JP 1975014663 U JP1975014663 U JP 1975014663U JP 1466375 U JP1466375 U JP 1466375U JP S561723 Y2 JPS561723 Y2 JP S561723Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975014663U
Other languages
Japanese (ja)
Other versions
JPS5197548U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975014663U priority Critical patent/JPS561723Y2/ja
Publication of JPS5197548U publication Critical patent/JPS5197548U/ja
Application granted granted Critical
Publication of JPS561723Y2 publication Critical patent/JPS561723Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1975014663U 1975-02-03 1975-02-03 Expired JPS561723Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975014663U JPS561723Y2 (en) 1975-02-03 1975-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975014663U JPS561723Y2 (en) 1975-02-03 1975-02-03

Publications (2)

Publication Number Publication Date
JPS5197548U JPS5197548U (en) 1976-08-05
JPS561723Y2 true JPS561723Y2 (en) 1981-01-16

Family

ID=28093784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975014663U Expired JPS561723Y2 (en) 1975-02-03 1975-02-03

Country Status (1)

Country Link
JP (1) JPS561723Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288277A (en) * 1976-01-19 1977-07-23 Comtec Kk Spatter coating apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926184A (en) * 1971-09-07 1974-03-08
JPS4962384A (en) * 1972-10-18 1974-06-17
JPS5023382A (en) * 1973-07-05 1975-03-13

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926184A (en) * 1971-09-07 1974-03-08
JPS4962384A (en) * 1972-10-18 1974-06-17
JPS5023382A (en) * 1973-07-05 1975-03-13

Also Published As

Publication number Publication date
JPS5197548U (en) 1976-08-05

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