DE2337226A1 - Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer - Google Patents

Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer

Info

Publication number
DE2337226A1
DE2337226A1 DE19732337226 DE2337226A DE2337226A1 DE 2337226 A1 DE2337226 A1 DE 2337226A1 DE 19732337226 DE19732337226 DE 19732337226 DE 2337226 A DE2337226 A DE 2337226A DE 2337226 A1 DE2337226 A1 DE 2337226A1
Authority
DE
Germany
Prior art keywords
rotor
pump
housing
vacuum
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19732337226
Other languages
German (de)
English (en)
Inventor
Gerhard Dipl Phys Dr Isenberg
Wolfgang Dipl Ing Tuzinsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MAN AG
Original Assignee
MAN Maschinenfabrik Augsburg Nuernberg AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MAN Maschinenfabrik Augsburg Nuernberg AG filed Critical MAN Maschinenfabrik Augsburg Nuernberg AG
Priority to DE19732337226 priority Critical patent/DE2337226A1/de
Priority to GB28949/74A priority patent/GB1479669A/en
Priority to JP49079049A priority patent/JPS5038811A/ja
Priority to FR7425050A priority patent/FR2238071B3/fr
Priority to US05/490,849 priority patent/US4057369A/en
Publication of DE2337226A1 publication Critical patent/DE2337226A1/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE19732337226 1973-07-21 1973-07-21 Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer Pending DE2337226A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19732337226 DE2337226A1 (de) 1973-07-21 1973-07-21 Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
GB28949/74A GB1479669A (en) 1973-07-21 1974-06-28 Vacuum pump
JP49079049A JPS5038811A (en, 2012) 1973-07-21 1974-07-10
FR7425050A FR2238071B3 (en, 2012) 1973-07-21 1974-07-18
US05/490,849 US4057369A (en) 1973-07-21 1974-07-22 Vacuum pump having a rotor supported in the interior of its casing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732337226 DE2337226A1 (de) 1973-07-21 1973-07-21 Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer

Publications (1)

Publication Number Publication Date
DE2337226A1 true DE2337226A1 (de) 1975-02-06

Family

ID=5887665

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732337226 Pending DE2337226A1 (de) 1973-07-21 1973-07-21 Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer

Country Status (5)

Country Link
US (1) US4057369A (en, 2012)
JP (1) JPS5038811A (en, 2012)
DE (1) DE2337226A1 (en, 2012)
FR (1) FR2238071B3 (en, 2012)
GB (1) GB1479669A (en, 2012)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2492020A1 (en, 2012) * 1980-10-09 1982-04-16 Seiko Instr & Electronics
DE4327506A1 (de) * 1992-08-19 1994-02-24 Hitachi Ltd Turbovakuumpumpe
WO1994029597A1 (en) * 1993-06-15 1994-12-22 Multistack International Limited Compressor
US5574322A (en) * 1992-09-03 1996-11-12 Hitachi, Ltd. Motor, a printer having such a motor and a disk drive system having such a motor
DE19613148A1 (de) * 1996-04-03 1997-10-09 Alfa Laval Flow Gmbh Drehkolbenpumpe mit magnetischer Rotorhalterung
EP1392981B2 (en) † 2001-06-05 2015-09-30 Siemens Aktiengesellschaft Compressor unit comprising a centrifugal compressor and an electric motor
DE202016003991U1 (de) * 2016-06-29 2017-10-02 Leybold Gmbh Vakuumpumpe

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4154489A (en) * 1977-06-15 1979-05-15 Cambridge Thermionic Corporation Rate responsive control for magnetic suspension system
DE2825400C2 (de) * 1978-06-09 1984-02-02 Omya Gmbh, 5000 Koeln Trennmaschine
JPS5690653U (en, 2012) * 1980-11-27 1981-07-20
DE3133781A1 (de) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
JPS5841296A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 磁気軸受を応用した小型軸流分子ポンプ
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
JPS59101596A (ja) * 1982-12-01 1984-06-12 Ntn Toyo Bearing Co Ltd タ−ボ分子ポンプ
JPS59172826U (ja) * 1983-05-06 1984-11-19 株式会社安川電機 磁気軸受装置
GB2165592B (en) * 1984-10-04 1988-06-22 Sperry Sun Inc Devices for imparting rotary motion
US4835114A (en) * 1986-02-19 1989-05-30 Hitachi, Ltd. Method for LPCVD of semiconductors using oil free vacuum pumps
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
DE3844563A1 (de) * 1988-03-12 1989-11-23 Kernforschungsanlage Juelich Magnetische lagerung mit permanentmagneten zur aufnahme der radialen lagerkraefte
US4880362A (en) * 1988-05-24 1989-11-14 Laing Karsten A Rotor with stabilizing magnets
JPH0676798B2 (ja) * 1988-08-22 1994-09-28 株式会社荏原製作所 磁気軸受を備えた遠心ポンプ
JPH04219493A (ja) * 1990-08-10 1992-08-10 Ebara Corp ターボ分子ポンプ
US5129795A (en) * 1991-05-31 1992-07-14 Powerdyne Corporation Motor driven pump
US5501583A (en) * 1992-08-19 1996-03-26 Hitachi, Ltd. Turbo vacuum pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US5445494A (en) * 1993-11-08 1995-08-29 Bw/Ip International, Inc. Multi-stage centrifugal pump with canned magnetic bearing
US5507629A (en) * 1994-06-17 1996-04-16 Jarvik; Robert Artificial hearts with permanent magnet bearings
US5658125A (en) * 1995-02-28 1997-08-19 Allison Engine Company, Inc. Magnetic bearings as actuation for active compressor stability control
US5836739A (en) * 1995-03-17 1998-11-17 Rolls-Royce Plc Gas turbine engine
US5685700A (en) * 1995-06-01 1997-11-11 Advanced Bionics, Inc. Bearing and seal-free blood pump
US6206659B1 (en) 1995-06-01 2001-03-27 Advanced Bionics, Inc. Magnetically driven rotor for blood pump
US5924848A (en) * 1995-06-01 1999-07-20 Advanced Bionics, Inc. Blood pump having radial vanes with enclosed magnetic drive components
US5938412A (en) * 1995-06-01 1999-08-17 Advanced Bionics, Inc. Blood pump having rotor with internal bore for fluid flow
US6043580A (en) * 1995-10-06 2000-03-28 Sulzer Turbo Ag Rotodynamic machine for the forwarding of a fluid
US5695471A (en) * 1996-02-20 1997-12-09 Kriton Medical, Inc. Sealless rotary blood pump with passive magnetic radial bearings and blood immersed axial bearings
US5840070A (en) 1996-02-20 1998-11-24 Kriton Medical, Inc. Sealless rotary blood pump
FI103296B1 (fi) * 1997-12-03 1999-05-31 High Speed Tech Ltd Oy Menetelmä ylipaineisen kaasun tuottamiseksi
US6120537A (en) * 1997-12-23 2000-09-19 Kriton Medical, Inc. Sealless blood pump with means for avoiding thrombus formation
BR9909540A (pt) 1998-04-08 2000-12-12 Thermo Black Clawson Inc Aparelho para processamento de polpa de papel, refinador de disco crivo e método de processar uma suspensão de polpa
US6426577B1 (en) * 1998-05-01 2002-07-30 Nisso Electric Corporation Thrust-controllable rotary synchronous machine
US6261052B1 (en) * 1999-01-08 2001-07-17 Fantom Technologies Inc. Prandtl layer turbine
CA2369955C (en) 1999-04-20 2005-10-18 Berlin Heart Ag Device for delivering single-phase or multiphase fluids without altering the properties thereof
DE19944863A1 (de) * 1999-09-18 2001-04-19 Forschungszentrum Juelich Gmbh Magnetlager
JP4612954B2 (ja) * 1999-04-20 2011-01-12 フォルシュンクスツェントルム ユーリッヒ ゲーエムベーハー ロータ装置
US6234772B1 (en) 1999-04-28 2001-05-22 Kriton Medical, Inc. Rotary blood pump
US6268673B1 (en) * 1999-05-05 2001-07-31 The United States Of America As Represented By The United States Department Of Energy Control coil arrangement for a rotating machine rotor
US6367241B1 (en) 1999-08-27 2002-04-09 Allison Advanced Development Company Pressure-assisted electromagnetic thrust bearing
DE10043235A1 (de) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
EP1312768A1 (de) * 2001-11-16 2003-05-21 Siemens Aktiengesellschaft Turbine mit elektromagnetischem axialen Drucklager
US6719765B2 (en) 2001-12-03 2004-04-13 Bonutti 2003 Trust-A Magnetic suturing system and method
GB0309644D0 (en) * 2003-04-28 2003-06-04 Boc Group Plc Turbo-molecular vacuum pumps and motors for such pumps
US7052253B2 (en) * 2003-05-19 2006-05-30 Advanced Bionics, Inc. Seal and bearing-free fluid pump incorporating a passively suspended self-positioning impeller
US9757585B2 (en) * 2007-06-05 2017-09-12 P Tech, Llc Magnetic joint implant
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008035891A1 (de) 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102012012540A1 (de) * 2012-06-26 2014-01-02 Robert Bosch Gmbh Turboverdichter
JP2020128745A (ja) * 2019-02-01 2020-08-27 ホワイト ナイト フルイド ハンドリング インコーポレーテッドＷｈｉｔｅ Ｋｎｉｇｈｔ Ｆｌｕｉｄ Ｈａｎｄｌｉｎｇ Ｉｎｃ． ロータを支承し、当該ロータを磁気的に軸線方向に位置決めするための磁石を有するポンプ、及びこれに関連する方法
CN110165821B (zh) * 2019-05-09 2021-04-20 江苏大学 一种卧式自抽真空室高集成度飞轮储能装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA674067A (en) * 1963-11-12 Schutten Johan Rotary-field motors for driving a rapidly rotating body
US2700343A (en) * 1950-05-11 1955-01-25 Jr Albert R Pezzillo Motor pump unit
US3155437A (en) * 1953-05-21 1964-11-03 North American Aviation Inc Electromagnetic bearing
US2856239A (en) * 1955-05-20 1958-10-14 Bill Jack Scient Instr Co Means for suspending rotatable objects in space
US3184271A (en) * 1957-05-15 1965-05-18 Massachusetts Inst Technology Supports for rotating or oscillating members
US3066849A (en) * 1960-08-18 1962-12-04 Exemplar Inc High vacuum pump systems
US3146038A (en) * 1962-02-07 1964-08-25 Gen Motors Corp Three-axis magnetic suspension
US3199932A (en) * 1962-03-01 1965-08-10 Gen Motors Corp Combined magnetic suspension and transformer
GB1015887A (en) * 1963-05-27 1966-01-05 William Kenneth Roberts Molecular vacuum pump
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
NL7010108A (en, 2012) * 1969-09-30 1971-04-01
US3678765A (en) * 1969-12-15 1972-07-25 Ambac Ind Magnetically-tuned resonant gyroscope
FR2086526A5 (en, 2012) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
DE2052120A1 (de) * 1970-10-23 1972-04-27 Pfeiffer Vakuumtechnik Lageranordnung für Molekularpumpen und Turbomolekularpumpen
US3778122A (en) * 1971-07-29 1973-12-11 R Doll System for contact-free, axially stabilized and radially centered positioning of a rotating shaft, particularly of an operating machine for low temperatures
US3823990A (en) * 1972-10-10 1974-07-16 Massachusetts Inst Technology Capacitive-inductive bridge type electrical suspension

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2492020A1 (en, 2012) * 1980-10-09 1982-04-16 Seiko Instr & Electronics
DE4327506A1 (de) * 1992-08-19 1994-02-24 Hitachi Ltd Turbovakuumpumpe
US5574322A (en) * 1992-09-03 1996-11-12 Hitachi, Ltd. Motor, a printer having such a motor and a disk drive system having such a motor
WO1994029597A1 (en) * 1993-06-15 1994-12-22 Multistack International Limited Compressor
DE19613148A1 (de) * 1996-04-03 1997-10-09 Alfa Laval Flow Gmbh Drehkolbenpumpe mit magnetischer Rotorhalterung
EP1392981B2 (en) † 2001-06-05 2015-09-30 Siemens Aktiengesellschaft Compressor unit comprising a centrifugal compressor and an electric motor
DE202016003991U1 (de) * 2016-06-29 2017-10-02 Leybold Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
FR2238071B3 (en, 2012) 1977-01-07
FR2238071A1 (en, 2012) 1975-02-14
GB1479669A (en) 1977-07-13
US4057369A (en) 1977-11-08
JPS5038811A (en, 2012) 1975-04-10

Similar Documents

Publication Publication Date Title
DE2337226A1 (de) Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
DE2645305C3 (de) Flüssigkeitsring-Verdichter
DE69212191T2 (de) Rotor eines Spaltmotors für eine Spaltrohrmotorpumpe
DE102014106315A1 (de) Drehschieber Vakuumpumpe
DE2163256A1 (de) Stroemungsmaschine, insbesondere turbopumpe, oder durchstroemmengemesseinrichtung fuer ein aggressives, radioaktives oder reinzuhaltendes stroemungsmittel
EP2080258A1 (de) Gekapselte elektrische maschine mit flüssigkeitsgekühltem stator
DE102012003680A1 (de) Vakuumpumpe
DE102012212423A1 (de) Flüssigkeitspumpe
DE60313493T2 (de) Vakuumpumpe
DE2342245B2 (de) Seitenkanalverdichter
DE60319585T2 (de) Vakuumpumpe
DE69403020T2 (de) Verdrängermaschine mit magnetischer Führung
DE102021111670A1 (de) Kreiselpumpe mit nasslaufendem Elektromotor
DE102016214696A1 (de) Elektrischer Scheibenmotor mit Medientrennung im Motorspalt
DE102016200013B4 (de) Pumpe
DE69419864T2 (de) Fluidmaschine mit Induktionsmotor
EP3196471B1 (de) Vakuumpumpe
DE2331917A1 (de) Pumpaggregat
EP1516109B1 (de) Vorrichtung zur kühlung einer stromerzeugereinheit
DE2354046A1 (de) Elektrisch angetriebene turbomolekularvakuumpumpe
EP0844723A2 (de) Elektromotorisch angetriebene Pumpe
DE3014103A1 (de) Pumpenaggregat mit einem mehrstufigen pumpenteil
DE102021119564A1 (de) Fluidpumpe, insbesondere Flüssigfluidpumpe und Kraftfahrzeug aufweisend die Fluidpumpe
DE102016214700A1 (de) Elektrischer Scheibenläufer mit einem Druckreduzierer für den Motorspalt
DE102015113821A1 (de) Vakuumpumpe

Legal Events

Date Code Title Description
OHW Rejection