FR2238071B3 - - Google Patents

Info

Publication number
FR2238071B3
FR2238071B3 FR7425050A FR7425050A FR2238071B3 FR 2238071 B3 FR2238071 B3 FR 2238071B3 FR 7425050 A FR7425050 A FR 7425050A FR 7425050 A FR7425050 A FR 7425050A FR 2238071 B3 FR2238071 B3 FR 2238071B3
Authority
FR
France
Prior art keywords
magnetic support
vacuum
pumps
requirements
produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7425050A
Other languages
English (en)
Other versions
FR2238071A1 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of FR2238071A1 publication Critical patent/FR2238071A1/fr
Application granted granted Critical
Publication of FR2238071B3 publication Critical patent/FR2238071B3/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
FR7425050A 1973-07-21 1974-07-18 Expired FR2238071B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732337226 DE2337226A1 (de) 1973-07-21 1973-07-21 Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer

Publications (2)

Publication Number Publication Date
FR2238071A1 FR2238071A1 (fr) 1975-02-14
FR2238071B3 true FR2238071B3 (fr) 1977-01-07

Family

ID=5887665

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7425050A Expired FR2238071B3 (fr) 1973-07-21 1974-07-18

Country Status (5)

Country Link
US (1) US4057369A (fr)
JP (1) JPS5038811A (fr)
DE (1) DE2337226A1 (fr)
FR (1) FR2238071B3 (fr)
GB (1) GB1479669A (fr)

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US4154489A (en) * 1977-06-15 1979-05-15 Cambridge Thermionic Corporation Rate responsive control for magnetic suspension system
DE2825400C2 (de) * 1978-06-09 1984-02-02 Omya Gmbh, 5000 Koeln Trennmaschine
JPS612348Y2 (fr) * 1980-10-09 1986-01-25
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DE3133781A1 (de) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
JPS5841296A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 磁気軸受を応用した小型軸流分子ポンプ
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
JPS59101596A (ja) * 1982-12-01 1984-06-12 Ntn Toyo Bearing Co Ltd タ−ボ分子ポンプ
JPS59172826U (ja) * 1983-05-06 1984-11-19 株式会社安川電機 磁気軸受装置
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US4835114A (en) * 1986-02-19 1989-05-30 Hitachi, Ltd. Method for LPCVD of semiconductors using oil free vacuum pumps
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
DE3808331A1 (de) * 1988-03-12 1989-09-28 Kernforschungsanlage Juelich Magnetische lagerung mit permanentmagneten zur aufnahme der radialen lagerkraefte
US4880362A (en) * 1988-05-24 1989-11-14 Laing Karsten A Rotor with stabilizing magnets
JPH0676798B2 (ja) * 1988-08-22 1994-09-28 株式会社荏原製作所 磁気軸受を備えた遠心ポンプ
JPH04219493A (ja) * 1990-08-10 1992-08-10 Ebara Corp ターボ分子ポンプ
US5129795A (en) * 1991-05-31 1992-07-14 Powerdyne Corporation Motor driven pump
JP2998441B2 (ja) * 1992-08-19 2000-01-11 株式会社日立製作所 ターボ真空ポンプ
US5501583A (en) * 1992-08-19 1996-03-26 Hitachi, Ltd. Turbo vacuum pump
JPH0686503A (ja) * 1992-09-03 1994-03-25 Hitachi Ltd モータ、ポリゴンミラーモータ、ディスク駆動モータ
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
IL109967A (en) * 1993-06-15 1997-07-13 Multistack Int Ltd Compressor
US5445494A (en) * 1993-11-08 1995-08-29 Bw/Ip International, Inc. Multi-stage centrifugal pump with canned magnetic bearing
US5507629A (en) * 1994-06-17 1996-04-16 Jarvik; Robert Artificial hearts with permanent magnet bearings
US5658125A (en) * 1995-02-28 1997-08-19 Allison Engine Company, Inc. Magnetic bearings as actuation for active compressor stability control
US5836739A (en) * 1995-03-17 1998-11-17 Rolls-Royce Plc Gas turbine engine
US5938412A (en) * 1995-06-01 1999-08-17 Advanced Bionics, Inc. Blood pump having rotor with internal bore for fluid flow
US5685700A (en) * 1995-06-01 1997-11-11 Advanced Bionics, Inc. Bearing and seal-free blood pump
US5924848A (en) * 1995-06-01 1999-07-20 Advanced Bionics, Inc. Blood pump having radial vanes with enclosed magnetic drive components
US6206659B1 (en) 1995-06-01 2001-03-27 Advanced Bionics, Inc. Magnetically driven rotor for blood pump
JPH11513558A (ja) * 1995-10-06 1999-11-16 ズルツァー ターボ アクチェンゲゼルシャフト 流体を送出する回転機械
US5695471A (en) * 1996-02-20 1997-12-09 Kriton Medical, Inc. Sealless rotary blood pump with passive magnetic radial bearings and blood immersed axial bearings
US5840070A (en) 1996-02-20 1998-11-24 Kriton Medical, Inc. Sealless rotary blood pump
DE19613148A1 (de) * 1996-04-03 1997-10-09 Alfa Laval Flow Gmbh Drehkolbenpumpe mit magnetischer Rotorhalterung
FI103296B1 (fi) 1997-12-03 1999-05-31 High Speed Tech Ltd Oy Menetelmä ylipaineisen kaasun tuottamiseksi
US6120537A (en) * 1997-12-23 2000-09-19 Kriton Medical, Inc. Sealless blood pump with means for avoiding thrombus formation
BR9909540A (pt) 1998-04-08 2000-12-12 Thermo Black Clawson Inc Aparelho para processamento de polpa de papel, refinador de disco crivo e método de processar uma suspensão de polpa
US6426577B1 (en) * 1998-05-01 2002-07-30 Nisso Electric Corporation Thrust-controllable rotary synchronous machine
US6261052B1 (en) * 1999-01-08 2001-07-17 Fantom Technologies Inc. Prandtl layer turbine
ES2215044T3 (es) * 1999-04-20 2004-10-01 Forschungszentrum Julich Gmbh Dispositivo de rotor.
CA2369955C (fr) 1999-04-20 2005-10-18 Berlin Heart Ag Dispositif pour refouler des substances fluides a une ou a plusieurs phases sans les alterer
DE19944863A1 (de) * 1999-09-18 2001-04-19 Forschungszentrum Juelich Gmbh Magnetlager
US6234772B1 (en) 1999-04-28 2001-05-22 Kriton Medical, Inc. Rotary blood pump
US6268673B1 (en) * 1999-05-05 2001-07-31 The United States Of America As Represented By The United States Department Of Energy Control coil arrangement for a rotating machine rotor
US6367241B1 (en) 1999-08-27 2002-04-09 Allison Advanced Development Company Pressure-assisted electromagnetic thrust bearing
DE10043235A1 (de) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
NL1018212C2 (nl) † 2001-06-05 2002-12-10 Siemens Demag Delaval Turbomac Compressoreenheid omvattende een centrifugaalcompressor en een elektromotor.
EP1312768A1 (fr) * 2001-11-16 2003-05-21 Siemens Aktiengesellschaft Turbine avec un palier de butée électromagnétique
US6719765B2 (en) 2001-12-03 2004-04-13 Bonutti 2003 Trust-A Magnetic suturing system and method
GB0309644D0 (en) * 2003-04-28 2003-06-04 Boc Group Plc Turbo-molecular vacuum pumps and motors for such pumps
US7052253B2 (en) * 2003-05-19 2006-05-30 Advanced Bionics, Inc. Seal and bearing-free fluid pump incorporating a passively suspended self-positioning impeller
US9757585B2 (en) * 2007-06-05 2017-09-12 P Tech, Llc Magnetic joint implant
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102012012540A1 (de) * 2012-06-26 2014-01-02 Robert Bosch Gmbh Turboverdichter
DE202016003991U1 (de) * 2016-06-29 2017-10-02 Leybold Gmbh Vakuumpumpe
JP2020128745A (ja) * 2019-02-01 2020-08-27 ホワイト ナイト フルイド ハンドリング インコーポレーテッドＷｈｉｔｅ Ｋｎｉｇｈｔ Ｆｌｕｉｄ Ｈａｎｄｌｉｎｇ Ｉｎｃ． ロータを支承し、当該ロータを磁気的に軸線方向に位置決めするための磁石を有するポンプ、及びこれに関連する方法
CN110165821B (zh) * 2019-05-09 2021-04-20 江苏大学 一种卧式自抽真空室高集成度飞轮储能装置

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CA674067A (en) * 1963-11-12 Schutten Johan Rotary-field motors for driving a rapidly rotating body
US2700343A (en) * 1950-05-11 1955-01-25 Jr Albert R Pezzillo Motor pump unit
US3155437A (en) * 1953-05-21 1964-11-03 North American Aviation Inc Electromagnetic bearing
US2856239A (en) * 1955-05-20 1958-10-14 Bill Jack Scient Instr Co Means for suspending rotatable objects in space
US3184271A (en) * 1957-05-15 1965-05-18 Massachusetts Inst Technology Supports for rotating or oscillating members
US3066849A (en) * 1960-08-18 1962-12-04 Exemplar Inc High vacuum pump systems
US3146038A (en) * 1962-02-07 1964-08-25 Gen Motors Corp Three-axis magnetic suspension
US3199932A (en) * 1962-03-01 1965-08-10 Gen Motors Corp Combined magnetic suspension and transformer
GB1015887A (en) * 1963-05-27 1966-01-05 William Kenneth Roberts Molecular vacuum pump
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
NL7010108A (fr) * 1969-09-30 1971-04-01
US3678765A (en) * 1969-12-15 1972-07-25 Ambac Ind Magnetically-tuned resonant gyroscope
FR2086526A5 (fr) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
DE2052120A1 (de) * 1970-10-23 1972-04-27 Pfeiffer Vakuumtechnik Lageranordnung für Molekularpumpen und Turbomolekularpumpen
US3778122A (en) * 1971-07-29 1973-12-11 R Doll System for contact-free, axially stabilized and radially centered positioning of a rotating shaft, particularly of an operating machine for low temperatures
US3823990A (en) * 1972-10-10 1974-07-16 Massachusetts Inst Technology Capacitive-inductive bridge type electrical suspension

Also Published As

Publication number Publication date
US4057369A (en) 1977-11-08
FR2238071A1 (fr) 1975-02-14
DE2337226A1 (de) 1975-02-06
GB1479669A (en) 1977-07-13
JPS5038811A (fr) 1975-04-10

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Legal Events

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ST Notification of lapse