DE2315797C3 - Verfahren zur Herstellung von Keramiksubstraten für Dünnschichtschaltungen - Google Patents
Verfahren zur Herstellung von Keramiksubstraten für DünnschichtschaltungenInfo
- Publication number
- DE2315797C3 DE2315797C3 DE2315797A DE2315797A DE2315797C3 DE 2315797 C3 DE2315797 C3 DE 2315797C3 DE 2315797 A DE2315797 A DE 2315797A DE 2315797 A DE2315797 A DE 2315797A DE 2315797 C3 DE2315797 C3 DE 2315797C3
- Authority
- DE
- Germany
- Prior art keywords
- substrates
- thin
- average value
- production
- firing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 title claims description 30
- 238000000034 method Methods 0.000 title claims description 11
- 239000000919 ceramic Substances 0.000 title claims description 5
- 239000010409 thin film Substances 0.000 title claims description 5
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 238000010304 firing Methods 0.000 claims description 13
- 238000005266 casting Methods 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 7
- 239000010408 film Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 230000003746 surface roughness Effects 0.000 description 6
- 239000011888 foil Substances 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- -1 alkylphenyl ether Chemical compound 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000754 repressing effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/4807—Ceramic parts
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Producing Shaped Articles From Materials (AREA)
- Press-Shaping Or Shaping Using Conveyers (AREA)
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2315797A DE2315797C3 (de) | 1973-03-29 | 1973-03-29 | Verfahren zur Herstellung von Keramiksubstraten für Dünnschichtschaltungen |
| GB386474A GB1414595A (en) | 1973-03-29 | 1974-01-28 | Cermaic substrates for thin-film circuits |
| AT128574A AT348022B (de) | 1973-03-29 | 1974-02-18 | Verfahren zur herstellung von keramiksubstraten fuer duennschichtschaltungen |
| CH327474A CH599068A5 (enExample) | 1973-03-29 | 1974-03-08 | |
| US05/449,751 US4009238A (en) | 1973-03-29 | 1974-03-11 | Process for the production of ceramic substrates for thin layer circuits |
| FR7409458A FR2223331B1 (enExample) | 1973-03-29 | 1974-03-20 | |
| NL7403842A NL7403842A (enExample) | 1973-03-29 | 1974-03-21 | |
| JP49033622A JPS49129702A (enExample) | 1973-03-29 | 1974-03-27 | |
| CA196,157A CA1050739A (en) | 1973-03-29 | 1974-03-27 | Process for the production of ceramic substrates for thin layer circuits |
| LU69717A LU69717A1 (enExample) | 1973-03-29 | 1974-03-27 | |
| IT49871/74A IT1005901B (it) | 1973-03-29 | 1974-03-29 | Procedimento per fabbricare substra ti di ceramica per circuiti elettri ci a strato sottile |
| BE142610A BE813023A (fr) | 1973-03-29 | 1974-03-29 | Procede de fabrication de substrats en ceramique pour des circuits a couches minces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2315797A DE2315797C3 (de) | 1973-03-29 | 1973-03-29 | Verfahren zur Herstellung von Keramiksubstraten für Dünnschichtschaltungen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2315797A1 DE2315797A1 (de) | 1974-10-10 |
| DE2315797B2 DE2315797B2 (de) | 1980-09-25 |
| DE2315797C3 true DE2315797C3 (de) | 1981-07-30 |
Family
ID=5876396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2315797A Expired DE2315797C3 (de) | 1973-03-29 | 1973-03-29 | Verfahren zur Herstellung von Keramiksubstraten für Dünnschichtschaltungen |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US4009238A (enExample) |
| JP (1) | JPS49129702A (enExample) |
| AT (1) | AT348022B (enExample) |
| BE (1) | BE813023A (enExample) |
| CA (1) | CA1050739A (enExample) |
| CH (1) | CH599068A5 (enExample) |
| DE (1) | DE2315797C3 (enExample) |
| FR (1) | FR2223331B1 (enExample) |
| GB (1) | GB1414595A (enExample) |
| IT (1) | IT1005901B (enExample) |
| LU (1) | LU69717A1 (enExample) |
| NL (1) | NL7403842A (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4165226A (en) * | 1977-03-29 | 1979-08-21 | Narumi China Corporation | Process for preparing an element of a dual-in-line ceramic package provided with a layer of sealing glass |
| DE2727364A1 (de) * | 1977-06-16 | 1979-01-04 | Siemens Ag | Verfahren zur herstellung von keramiksubstraten |
| US4221047A (en) * | 1979-03-23 | 1980-09-09 | International Business Machines Corporation | Multilayered glass-ceramic substrate for mounting of semiconductor device |
| US4259061A (en) * | 1979-12-07 | 1981-03-31 | International Business Machines Corporation | Method of achieving uniform sintering shrinkage in a laminated planar green ceramic substrate and apparatus therefor |
| JPS58154293A (ja) * | 1982-03-10 | 1983-09-13 | 株式会社日立製作所 | グリ−ンシ−トの寸法安定化法 |
| US5130067A (en) * | 1986-05-02 | 1992-07-14 | International Business Machines Corporation | Method and means for co-sintering ceramic/metal mlc substrates |
| US4684339A (en) * | 1986-06-13 | 1987-08-04 | International Business Machines Corporation | Gas-loaded pressure diaphragm |
| JPS63240096A (ja) * | 1987-03-27 | 1988-10-05 | 富士通株式会社 | グリ−ンシ−ト多層法 |
| US5194196A (en) * | 1989-10-06 | 1993-03-16 | International Business Machines Corporation | Hermetic package for an electronic device and method of manufacturing same |
| EP0857702B1 (en) * | 1994-11-09 | 2000-08-23 | Ngk Insulators, Ltd. | Method for producing ceramic substrate |
| US6066350A (en) * | 1997-02-07 | 2000-05-23 | Cargill Incorporated | Method and arrangement for processing cocoa mass |
| US6639508B1 (en) | 1999-09-22 | 2003-10-28 | Aptek Williams, Inc. | Electrical switch device and process for manufacturing same |
| DE10051388B4 (de) * | 1999-10-18 | 2009-02-12 | Murata Mfg. Co., Ltd., Nagaokakyo-shi | Verfahren zur Herstellung einer keramischen Grünfolie und Verfahren zur Herstellung eines keramischen Vielschichtbauelements |
| EP1202312B1 (en) * | 2000-10-31 | 2004-04-07 | Ngk Spark Plug Co., Ltd | Vacuum switch container, vacuum switch, method of producing vacuum switch container and method of producing vacuum switch |
| TW201345869A (zh) | 2012-04-18 | 2013-11-16 | Nitto Denko Corp | 用於燒結平面陶瓷之方法及裝置 |
| US9205571B2 (en) | 2012-04-18 | 2015-12-08 | Nitto Denko Corporation | Method and apparatus for sintering flat ceramics |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA842129A (en) * | 1970-05-19 | Duplate Canada Limited | Method of making ceramic articles and the product thereof | |
| US2539446A (en) * | 1947-07-12 | 1951-01-30 | Sprague Electric Co | Process for producing dielectric sheets |
| US2582993A (en) * | 1948-10-29 | 1952-01-22 | Glenn N Howatt | Method of producing high dielectric high insulation ceramic plates |
| US2966719A (en) * | 1954-06-15 | 1961-01-03 | American Lava Corp | Manufacture of ceramics |
| US2952877A (en) * | 1954-11-22 | 1960-09-20 | American Lava Corp | Method of making ceramic insulators |
| US3016598A (en) * | 1958-09-30 | 1962-01-16 | Gladding Mcbean & Co | Method of making dense refractory objects |
| US3192086A (en) * | 1960-06-16 | 1965-06-29 | Rca Corp | Methods for manufacturing multilayered monolithic ceramic bodies |
| US3096545A (en) * | 1960-07-20 | 1963-07-09 | Rowland Products Inc | Resilient spacer for press-finishing of plastic sheet |
| US3274311A (en) * | 1963-04-25 | 1966-09-20 | Reynolds Metals Co | Method of molding alumina |
| US3516840A (en) * | 1964-10-22 | 1970-06-23 | Aluminum Co Of America | Production of ceramic bodies |
| US3794707A (en) * | 1968-04-03 | 1974-02-26 | Atomic Energy Authority Uk | Production of refractory artefacts |
| US3696923A (en) * | 1970-07-28 | 1972-10-10 | Bethlehem Steel Corp | Method for recovering fine coal and coal-containing particles in a coal recovery circuit |
| US3879509A (en) * | 1971-09-07 | 1975-04-22 | Gilbert James Elderbaum | Method of producing thin ceramic sheets with minimal distortion |
| US3794704A (en) * | 1971-11-17 | 1974-02-26 | J Strong | Method of forming refractive optical elements for infrared radiation |
-
1973
- 1973-03-29 DE DE2315797A patent/DE2315797C3/de not_active Expired
-
1974
- 1974-01-28 GB GB386474A patent/GB1414595A/en not_active Expired
- 1974-02-18 AT AT128574A patent/AT348022B/de not_active IP Right Cessation
- 1974-03-08 CH CH327474A patent/CH599068A5/xx not_active IP Right Cessation
- 1974-03-11 US US05/449,751 patent/US4009238A/en not_active Expired - Lifetime
- 1974-03-20 FR FR7409458A patent/FR2223331B1/fr not_active Expired
- 1974-03-21 NL NL7403842A patent/NL7403842A/xx unknown
- 1974-03-27 LU LU69717A patent/LU69717A1/xx unknown
- 1974-03-27 CA CA196,157A patent/CA1050739A/en not_active Expired
- 1974-03-27 JP JP49033622A patent/JPS49129702A/ja active Pending
- 1974-03-29 BE BE142610A patent/BE813023A/xx not_active IP Right Cessation
- 1974-03-29 IT IT49871/74A patent/IT1005901B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| ATA128574A (de) | 1978-06-15 |
| CA1050739A (en) | 1979-03-20 |
| NL7403842A (enExample) | 1974-10-01 |
| AT348022B (de) | 1979-01-25 |
| FR2223331A1 (enExample) | 1974-10-25 |
| CH599068A5 (enExample) | 1978-05-12 |
| LU69717A1 (enExample) | 1974-07-17 |
| JPS49129702A (enExample) | 1974-12-12 |
| DE2315797B2 (de) | 1980-09-25 |
| BE813023A (fr) | 1974-07-15 |
| GB1414595A (en) | 1975-11-19 |
| US4009238A (en) | 1977-02-22 |
| IT1005901B (it) | 1976-09-30 |
| FR2223331B1 (enExample) | 1983-09-30 |
| DE2315797A1 (de) | 1974-10-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |