BE813023A - Procede de fabrication de substrats en ceramique pour des circuits a couches minces - Google Patents

Procede de fabrication de substrats en ceramique pour des circuits a couches minces

Info

Publication number
BE813023A
BE813023A BE142610A BE142610A BE813023A BE 813023 A BE813023 A BE 813023A BE 142610 A BE142610 A BE 142610A BE 142610 A BE142610 A BE 142610A BE 813023 A BE813023 A BE 813023A
Authority
BE
Belgium
Prior art keywords
thin layer
ceramic substrates
manufacturing ceramic
layer circuits
circuits
Prior art date
Application number
BE142610A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE813023A publication Critical patent/BE813023A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807—Ceramic parts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Producing Shaped Articles From Materials (AREA)
  • Press-Shaping Or Shaping Using Conveyers (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
BE142610A 1973-03-29 1974-03-29 Procede de fabrication de substrats en ceramique pour des circuits a couches minces BE813023A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2315797A DE2315797C3 (de) 1973-03-29 1973-03-29 Verfahren zur Herstellung von Keramiksubstraten für Dünnschichtschaltungen

Publications (1)

Publication Number Publication Date
BE813023A true BE813023A (fr) 1974-07-15

Family

ID=5876396

Family Applications (1)

Application Number Title Priority Date Filing Date
BE142610A BE813023A (fr) 1973-03-29 1974-03-29 Procede de fabrication de substrats en ceramique pour des circuits a couches minces

Country Status (12)

Country Link
US (1) US4009238A (fr)
JP (1) JPS49129702A (fr)
AT (1) AT348022B (fr)
BE (1) BE813023A (fr)
CA (1) CA1050739A (fr)
CH (1) CH599068A5 (fr)
DE (1) DE2315797C3 (fr)
FR (1) FR2223331B1 (fr)
GB (1) GB1414595A (fr)
IT (1) IT1005901B (fr)
LU (1) LU69717A1 (fr)
NL (1) NL7403842A (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165226A (en) * 1977-03-29 1979-08-21 Narumi China Corporation Process for preparing an element of a dual-in-line ceramic package provided with a layer of sealing glass
DE2727364A1 (de) * 1977-06-16 1979-01-04 Siemens Ag Verfahren zur herstellung von keramiksubstraten
US4221047A (en) * 1979-03-23 1980-09-09 International Business Machines Corporation Multilayered glass-ceramic substrate for mounting of semiconductor device
US4259061A (en) * 1979-12-07 1981-03-31 International Business Machines Corporation Method of achieving uniform sintering shrinkage in a laminated planar green ceramic substrate and apparatus therefor
JPS58154293A (ja) * 1982-03-10 1983-09-13 株式会社日立製作所 グリ−ンシ−トの寸法安定化法
US5130067A (en) * 1986-05-02 1992-07-14 International Business Machines Corporation Method and means for co-sintering ceramic/metal mlc substrates
US4684339A (en) * 1986-06-13 1987-08-04 International Business Machines Corporation Gas-loaded pressure diaphragm
JPS63240096A (ja) * 1987-03-27 1988-10-05 富士通株式会社 グリ−ンシ−ト多層法
US5194196A (en) * 1989-10-06 1993-03-16 International Business Machines Corporation Hermetic package for an electronic device and method of manufacturing same
DE69518548T2 (de) * 1994-11-09 2001-04-19 Ngk Insulators, Ltd. Verfahren zur Herstellung eines keramischen Substrates
US6066350A (en) * 1997-02-07 2000-05-23 Cargill Incorporated Method and arrangement for processing cocoa mass
US6639508B1 (en) 1999-09-22 2003-10-28 Aptek Williams, Inc. Electrical switch device and process for manufacturing same
US6692598B1 (en) * 1999-10-18 2004-02-17 Murata Manufacturing Co. Ltd Method of producing ceramic green sheet and method of manufacturing multilayer ceramic electronic part
KR100817376B1 (ko) * 2000-10-31 2008-03-27 니혼도꾸슈도교 가부시키가이샤 진공 스위치용 용기, 진공 스위치, 진공 스위치용 용기의제조방법 및 진공 스위치의 제조방법
US9205571B2 (en) 2012-04-18 2015-12-08 Nitto Denko Corporation Method and apparatus for sintering flat ceramics
TW201345869A (zh) 2012-04-18 2013-11-16 Nitto Denko Corp 用於燒結平面陶瓷之方法及裝置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA842129A (en) * 1970-05-19 Duplate Canada Limited Method of making ceramic articles and the product thereof
US2539446A (en) * 1947-07-12 1951-01-30 Sprague Electric Co Process for producing dielectric sheets
US2582993A (en) * 1948-10-29 1952-01-22 Glenn N Howatt Method of producing high dielectric high insulation ceramic plates
US2966719A (en) * 1954-06-15 1961-01-03 American Lava Corp Manufacture of ceramics
US2952877A (en) * 1954-11-22 1960-09-20 American Lava Corp Method of making ceramic insulators
US3016598A (en) * 1958-09-30 1962-01-16 Gladding Mcbean & Co Method of making dense refractory objects
US3192086A (en) * 1960-06-16 1965-06-29 Rca Corp Methods for manufacturing multilayered monolithic ceramic bodies
US3096545A (en) * 1960-07-20 1963-07-09 Rowland Products Inc Resilient spacer for press-finishing of plastic sheet
US3274311A (en) * 1963-04-25 1966-09-20 Reynolds Metals Co Method of molding alumina
US3516840A (en) * 1964-10-22 1970-06-23 Aluminum Co Of America Production of ceramic bodies
US3794707A (en) * 1968-04-03 1974-02-26 Atomic Energy Authority Uk Production of refractory artefacts
US3696923A (en) * 1970-07-28 1972-10-10 Bethlehem Steel Corp Method for recovering fine coal and coal-containing particles in a coal recovery circuit
US3879509A (en) * 1971-09-07 1975-04-22 Gilbert James Elderbaum Method of producing thin ceramic sheets with minimal distortion
US3794704A (en) * 1971-11-17 1974-02-26 J Strong Method of forming refractive optical elements for infrared radiation

Also Published As

Publication number Publication date
FR2223331B1 (fr) 1983-09-30
DE2315797C3 (de) 1981-07-30
US4009238A (en) 1977-02-22
DE2315797A1 (de) 1974-10-10
ATA128574A (de) 1978-06-15
JPS49129702A (fr) 1974-12-12
FR2223331A1 (fr) 1974-10-25
LU69717A1 (fr) 1974-07-17
DE2315797B2 (de) 1980-09-25
CA1050739A (fr) 1979-03-20
GB1414595A (en) 1975-11-19
AT348022B (de) 1979-01-25
CH599068A5 (fr) 1978-05-12
IT1005901B (it) 1976-09-30
NL7403842A (fr) 1974-10-01

Similar Documents

Publication Publication Date Title
BE813023A (fr) Procede de fabrication de substrats en ceramique pour des circuits a couches minces
BE868200A (fr) Procede pour fabriquer des substrats ceramiques
BE779788R (fr) Procede de fabrication de pates de
BE788117A (fr) Procede de production d'elements pour circuits imprimes
FR2275889A1 (fr) Circuit en couche mince, et procede pour sa fabrication
JPS5344487A (en) Process for preparing large surfaced silicon plate not supported on substrate
FR2315170A1 (fr) Procede de fabrication de dispositifs mos complementaires sur substrat de saphir
BE810777A (fr) Procede pour la fabrication de circuits imprimes sur les deux faces d 'un substrat en matiere ceramique
BE804003A (fr) Procede perfectionne pour fabriquer des circuits imprimes a couches multiples
BE806098A (fr) Procede de fabrication de silicium ou autre matiere semi-conductrice tres pure
BE814300A (fr) Procede pour interconnecter des elements de circuit integre
FR2284985A1 (fr) Procede de preparation de faces propres de substrats semi-conducteurs par formation d'une couche d'oxyde
BE805951A (fr) Procede pour realiser des structures fines de voies conductrices sur un substrat en ceramique
BE805480A (fr) Procede pour fabriquer des circuits a mos complementaires en couche mince
FR2276690A1 (fr) Substrat isolant portant une couche mince semi-conductrice monocristalline et procede pour sa fabrication
FR2303386A2 (fr) Groupe de construction electronique a couches minces et procede pour sa fabrication
BE785287A (fr) Procede de fabrication des conducteurs-poutres pour dispositifssemiconducteurs
FR2316732A1 (fr) Procede pour former des regions dielectriquement isolees dans un substrat semi-conducteur
BE781368A (fr) Procede de fabrication de capsules minuscules
BE789174A (fr) Procede de fabrication de circuits
BE774974A (fr) Procede de fabrication de substrats pour plantes
FR2312116A1 (fr) Procede pour fabriquer des composants a semi-conducteurs
BE782119A (fr) Procede de fabrication de circuits en couche mince
IT999661B (it) Procedimento di incisione chimica particolarmente per la fabbricazione di circuiti a strato sottile
BE780373A (fr) Procede de fabrication de couches en tantale

Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: SIEMENS A.G.

Effective date: 19840329