AT348022B - Verfahren zur herstellung von keramiksubstraten fuer duennschichtschaltungen - Google Patents

Verfahren zur herstellung von keramiksubstraten fuer duennschichtschaltungen

Info

Publication number
AT348022B
AT348022B AT128574A AT128574A AT348022B AT 348022 B AT348022 B AT 348022B AT 128574 A AT128574 A AT 128574A AT 128574 A AT128574 A AT 128574A AT 348022 B AT348022 B AT 348022B
Authority
AT
Austria
Prior art keywords
thin
ceramic substrates
producing ceramic
layer circuits
circuits
Prior art date
Application number
AT128574A
Other languages
German (de)
English (en)
Other versions
ATA128574A (de
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA128574A publication Critical patent/ATA128574A/de
Application granted granted Critical
Publication of AT348022B publication Critical patent/AT348022B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
    • H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807—Ceramic parts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Producing Shaped Articles From Materials (AREA)
  • Press-Shaping Or Shaping Using Conveyers (AREA)
AT128574A 1973-03-29 1974-02-18 Verfahren zur herstellung von keramiksubstraten fuer duennschichtschaltungen AT348022B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2315797A DE2315797C3 (de) 1973-03-29 1973-03-29 Verfahren zur Herstellung von Keramiksubstraten für Dünnschichtschaltungen

Publications (2)

Publication Number Publication Date
ATA128574A ATA128574A (de) 1978-06-15
AT348022B true AT348022B (de) 1979-01-25

Family

ID=5876396

Family Applications (1)

Application Number Title Priority Date Filing Date
AT128574A AT348022B (de) 1973-03-29 1974-02-18 Verfahren zur herstellung von keramiksubstraten fuer duennschichtschaltungen

Country Status (12)

Country Link
US (1) US4009238A (enExample)
JP (1) JPS49129702A (enExample)
AT (1) AT348022B (enExample)
BE (1) BE813023A (enExample)
CA (1) CA1050739A (enExample)
CH (1) CH599068A5 (enExample)
DE (1) DE2315797C3 (enExample)
FR (1) FR2223331B1 (enExample)
GB (1) GB1414595A (enExample)
IT (1) IT1005901B (enExample)
LU (1) LU69717A1 (enExample)
NL (1) NL7403842A (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165226A (en) * 1977-03-29 1979-08-21 Narumi China Corporation Process for preparing an element of a dual-in-line ceramic package provided with a layer of sealing glass
DE2727364A1 (de) * 1977-06-16 1979-01-04 Siemens Ag Verfahren zur herstellung von keramiksubstraten
US4221047A (en) * 1979-03-23 1980-09-09 International Business Machines Corporation Multilayered glass-ceramic substrate for mounting of semiconductor device
US4259061A (en) * 1979-12-07 1981-03-31 International Business Machines Corporation Method of achieving uniform sintering shrinkage in a laminated planar green ceramic substrate and apparatus therefor
JPS58154293A (ja) * 1982-03-10 1983-09-13 株式会社日立製作所 グリ−ンシ−トの寸法安定化法
US5130067A (en) * 1986-05-02 1992-07-14 International Business Machines Corporation Method and means for co-sintering ceramic/metal mlc substrates
US4684339A (en) * 1986-06-13 1987-08-04 International Business Machines Corporation Gas-loaded pressure diaphragm
JPS63240096A (ja) * 1987-03-27 1988-10-05 富士通株式会社 グリ−ンシ−ト多層法
US5194196A (en) * 1989-10-06 1993-03-16 International Business Machines Corporation Hermetic package for an electronic device and method of manufacturing same
EP0857702B1 (en) * 1994-11-09 2000-08-23 Ngk Insulators, Ltd. Method for producing ceramic substrate
US6066350A (en) * 1997-02-07 2000-05-23 Cargill Incorporated Method and arrangement for processing cocoa mass
US6639508B1 (en) 1999-09-22 2003-10-28 Aptek Williams, Inc. Electrical switch device and process for manufacturing same
DE10051388B4 (de) * 1999-10-18 2009-02-12 Murata Mfg. Co., Ltd., Nagaokakyo-shi Verfahren zur Herstellung einer keramischen Grünfolie und Verfahren zur Herstellung eines keramischen Vielschichtbauelements
EP1202312B1 (en) * 2000-10-31 2004-04-07 Ngk Spark Plug Co., Ltd Vacuum switch container, vacuum switch, method of producing vacuum switch container and method of producing vacuum switch
TW201345869A (zh) 2012-04-18 2013-11-16 Nitto Denko Corp 用於燒結平面陶瓷之方法及裝置
US9205571B2 (en) 2012-04-18 2015-12-08 Nitto Denko Corporation Method and apparatus for sintering flat ceramics

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA842129A (en) * 1970-05-19 Duplate Canada Limited Method of making ceramic articles and the product thereof
US2539446A (en) * 1947-07-12 1951-01-30 Sprague Electric Co Process for producing dielectric sheets
US2582993A (en) * 1948-10-29 1952-01-22 Glenn N Howatt Method of producing high dielectric high insulation ceramic plates
US2966719A (en) * 1954-06-15 1961-01-03 American Lava Corp Manufacture of ceramics
US2952877A (en) * 1954-11-22 1960-09-20 American Lava Corp Method of making ceramic insulators
US3016598A (en) * 1958-09-30 1962-01-16 Gladding Mcbean & Co Method of making dense refractory objects
US3192086A (en) * 1960-06-16 1965-06-29 Rca Corp Methods for manufacturing multilayered monolithic ceramic bodies
US3096545A (en) * 1960-07-20 1963-07-09 Rowland Products Inc Resilient spacer for press-finishing of plastic sheet
US3274311A (en) * 1963-04-25 1966-09-20 Reynolds Metals Co Method of molding alumina
US3516840A (en) * 1964-10-22 1970-06-23 Aluminum Co Of America Production of ceramic bodies
US3794707A (en) * 1968-04-03 1974-02-26 Atomic Energy Authority Uk Production of refractory artefacts
US3696923A (en) * 1970-07-28 1972-10-10 Bethlehem Steel Corp Method for recovering fine coal and coal-containing particles in a coal recovery circuit
US3879509A (en) * 1971-09-07 1975-04-22 Gilbert James Elderbaum Method of producing thin ceramic sheets with minimal distortion
US3794704A (en) * 1971-11-17 1974-02-26 J Strong Method of forming refractive optical elements for infrared radiation

Also Published As

Publication number Publication date
ATA128574A (de) 1978-06-15
CA1050739A (en) 1979-03-20
DE2315797C3 (de) 1981-07-30
NL7403842A (enExample) 1974-10-01
FR2223331A1 (enExample) 1974-10-25
CH599068A5 (enExample) 1978-05-12
LU69717A1 (enExample) 1974-07-17
JPS49129702A (enExample) 1974-12-12
DE2315797B2 (de) 1980-09-25
BE813023A (fr) 1974-07-15
GB1414595A (en) 1975-11-19
US4009238A (en) 1977-02-22
IT1005901B (it) 1976-09-30
FR2223331B1 (enExample) 1983-09-30
DE2315797A1 (de) 1974-10-10

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee