DE2302897A1 - Vorrichtung und verfahren zum orientieren eines halbleiterplaettchens - Google Patents
Vorrichtung und verfahren zum orientieren eines halbleiterplaettchensInfo
- Publication number
- DE2302897A1 DE2302897A1 DE19732302897 DE2302897A DE2302897A1 DE 2302897 A1 DE2302897 A1 DE 2302897A1 DE 19732302897 DE19732302897 DE 19732302897 DE 2302897 A DE2302897 A DE 2302897A DE 2302897 A1 DE2302897 A1 DE 2302897A1
- Authority
- DE
- Germany
- Prior art keywords
- plate
- orientation
- etched
- hollow body
- orienting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 8
- 239000004065 semiconductor Substances 0.000 title claims description 5
- 239000004020 conductor Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 229920002972 Acrylic fiber Polymers 0.000 description 2
- 235000015115 caffè latte Nutrition 0.000 description 2
- 101100129922 Caenorhabditis elegans pig-1 gene Proteins 0.000 description 1
- 244000033714 Clidemia hirta Species 0.000 description 1
- 235000014277 Clidemia hirta Nutrition 0.000 description 1
- 101100520057 Drosophila melanogaster Pig1 gene Proteins 0.000 description 1
- 244000228957 Ferula foetida Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 240000007313 Tilia cordata Species 0.000 description 1
- XUJNEKJLAYXESH-UHFFFAOYSA-N cysteine Natural products SCC(N)C(O)=O XUJNEKJLAYXESH-UHFFFAOYSA-N 0.000 description 1
- 235000018417 cysteine Nutrition 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 210000004197 pelvis Anatomy 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB315272A GB1405453A (en) | 1972-01-22 | 1972-01-22 | Alignment and holding device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2302897A1 true DE2302897A1 (de) | 1973-07-19 |
Family
ID=9752924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732302897 Pending DE2302897A1 (de) | 1972-01-22 | 1973-01-22 | Vorrichtung und verfahren zum orientieren eines halbleiterplaettchens |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5012966A (enrdf_load_stackoverflow) |
| DE (1) | DE2302897A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1405453A (enrdf_load_stackoverflow) |
| NL (1) | NL7300915A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0595071A1 (en) * | 1992-10-27 | 1994-05-04 | Sumitomo Electric Industries, Limited | Wafer holding apparatus for holding a wafer |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6110761Y2 (enrdf_load_stackoverflow) * | 1980-10-31 | 1986-04-05 | ||
| JPS61263136A (ja) * | 1985-05-15 | 1986-11-21 | Nitto Electric Ind Co Ltd | 薄板物品の支持テ−ブル |
| CN102744697A (zh) * | 2012-07-17 | 2012-10-24 | 天脊煤化工集团股份有限公司 | 一种鲁奇炉灰锁上阀导向筒找正装置 |
-
1972
- 1972-01-22 GB GB315272A patent/GB1405453A/en not_active Expired
-
1973
- 1973-01-22 JP JP875473A patent/JPS5012966A/ja active Pending
- 1973-01-22 NL NL7300915A patent/NL7300915A/xx unknown
- 1973-01-22 DE DE19732302897 patent/DE2302897A1/de active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0595071A1 (en) * | 1992-10-27 | 1994-05-04 | Sumitomo Electric Industries, Limited | Wafer holding apparatus for holding a wafer |
| US5417408A (en) * | 1992-10-27 | 1995-05-23 | Sumitomo Electric Industries, Ltd. | Wafer holding apparatus for holding a wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7300915A (enrdf_load_stackoverflow) | 1973-07-24 |
| GB1405453A (en) | 1975-09-10 |
| JPS5012966A (enrdf_load_stackoverflow) | 1975-02-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2710418C2 (de) | Nähmaschine mit einem Kantenführer | |
| DE1958749U (de) | Werkzeug zum entfernen von tapeten. | |
| DE1552485A1 (de) | Werkzeugtransportvorrichtung | |
| DE2506860C3 (enrdf_load_stackoverflow) | ||
| DE2302897A1 (de) | Vorrichtung und verfahren zum orientieren eines halbleiterplaettchens | |
| DE2847473A1 (de) | Empfindlicher greifhalter | |
| DE2506860A1 (de) | Probenbehaelter-transportvorrichtung | |
| DE2248043B2 (de) | Mustervorlage zur steuerung einer vorrichtung zum selbsttaetigen zuschneiden von warenteilen aus einem flaechenartigen textilmaterial | |
| DE1477913C3 (de) | Vorrichtung zum Ausrichten eines Linsenrohlings | |
| DE1477422A1 (de) | Zwillingssupport mit automatischer Seitenpositionierung | |
| DE2359088A1 (de) | Verfahren und vorrichtung zum auftragen einer schicht aus fluessigem material auf die aussenseite einer zylindrischen siebschablone | |
| DE2712029B2 (de) | Nockenschleifmaschine | |
| DE2722499A1 (de) | Vorrichtung zum sortieren von hartgelatinekapseln | |
| DE3306261A1 (de) | Automatischer schreibstiftgeber | |
| DE824827C (de) | Zahnschleif-Werkzeug | |
| DE2829935B2 (de) | Abklappbarer Zeilenrichter für Schreibmaschinen | |
| DE1935132A1 (de) | Vorrichtung zum Beschneiden von Praeparaten,die in einem Mikrofon in Schnitte geschnitten werden sollen | |
| DE2308743C2 (de) | Vorrichtung zum Ablegen fadenförmigen Materials auf thermoplastischem Kunststoff | |
| DE1253471B (de) | Vorrichtung zur Eichung von Gefaessen, insbesondere Glasgefaessen | |
| AT271314B (de) | Verfahren zum Verschließen einer Behälteröffnung mit einem Verschluß | |
| CH649679A5 (de) | Handgeraet zum schneiden von blumenstielen und zum entdornen von rosenstielen. | |
| DE1477765C3 (de) | Als Pendelhalter ausgebildete Konushülse | |
| DE645358C (de) | Pikiervorrichtung fuer Naehmaschinen | |
| DE3126143A1 (de) | Papierblatt-zaehlvorrichtung mit einer einrichtung zum verhindern von doppelzaehlungen | |
| DE1552374C (de) | Kopierbohrvorrichtung, insbesondere für gedruckte Schaltungen |