GB1405453A - Alignment and holding device and method - Google Patents
Alignment and holding device and methodInfo
- Publication number
- GB1405453A GB1405453A GB315272A GB315272A GB1405453A GB 1405453 A GB1405453 A GB 1405453A GB 315272 A GB315272 A GB 315272A GB 315272 A GB315272 A GB 315272A GB 1405453 A GB1405453 A GB 1405453A
- Authority
- GB
- United Kingdom
- Prior art keywords
- wafer
- suction
- machine
- conduit
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 abstract 3
- 229920002972 Acrylic fiber Polymers 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB315272A GB1405453A (en) | 1972-01-22 | 1972-01-22 | Alignment and holding device and method |
| NL7300915A NL7300915A (enrdf_load_stackoverflow) | 1972-01-22 | 1973-01-22 | |
| DE19732302897 DE2302897A1 (de) | 1972-01-22 | 1973-01-22 | Vorrichtung und verfahren zum orientieren eines halbleiterplaettchens |
| JP875473A JPS5012966A (enrdf_load_stackoverflow) | 1972-01-22 | 1973-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB315272A GB1405453A (en) | 1972-01-22 | 1972-01-22 | Alignment and holding device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1405453A true GB1405453A (en) | 1975-09-10 |
Family
ID=9752924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB315272A Expired GB1405453A (en) | 1972-01-22 | 1972-01-22 | Alignment and holding device and method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5012966A (enrdf_load_stackoverflow) |
| DE (1) | DE2302897A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1405453A (enrdf_load_stackoverflow) |
| NL (1) | NL7300915A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102744697A (zh) * | 2012-07-17 | 2012-10-24 | 天脊煤化工集团股份有限公司 | 一种鲁奇炉灰锁上阀导向筒找正装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6110761Y2 (enrdf_load_stackoverflow) * | 1980-10-31 | 1986-04-05 | ||
| JPS61263136A (ja) * | 1985-05-15 | 1986-11-21 | Nitto Electric Ind Co Ltd | 薄板物品の支持テ−ブル |
| JPH07110455B2 (ja) * | 1992-10-27 | 1995-11-29 | 住友電気工業株式会社 | ウェハ固定装置 |
-
1972
- 1972-01-22 GB GB315272A patent/GB1405453A/en not_active Expired
-
1973
- 1973-01-22 JP JP875473A patent/JPS5012966A/ja active Pending
- 1973-01-22 NL NL7300915A patent/NL7300915A/xx unknown
- 1973-01-22 DE DE19732302897 patent/DE2302897A1/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102744697A (zh) * | 2012-07-17 | 2012-10-24 | 天脊煤化工集团股份有限公司 | 一种鲁奇炉灰锁上阀导向筒找正装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7300915A (enrdf_load_stackoverflow) | 1973-07-24 |
| DE2302897A1 (de) | 1973-07-19 |
| JPS5012966A (enrdf_load_stackoverflow) | 1975-02-10 |
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| JPS5329579B2 (enrdf_load_stackoverflow) | ||
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |