DE2231977A1 - Anordnung zur messung mechanischer spannungen - Google Patents
Anordnung zur messung mechanischer spannungenInfo
- Publication number
- DE2231977A1 DE2231977A1 DE2231977A DE2231977A DE2231977A1 DE 2231977 A1 DE2231977 A1 DE 2231977A1 DE 2231977 A DE2231977 A DE 2231977A DE 2231977 A DE2231977 A DE 2231977A DE 2231977 A1 DE2231977 A1 DE 2231977A1
- Authority
- DE
- Germany
- Prior art keywords
- field effect
- effect transistor
- effect transistors
- transistors
- arrangement according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 title description 3
- 230000005669 field effect Effects 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000001465 metallisation Methods 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 238000002513 implantation Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 230000010354 integration Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0098—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means using semiconductor body comprising at least one PN junction as detecting element
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/10—Integrated device layouts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7123627A FR2143553B1 (en, 2012) | 1971-06-29 | 1971-06-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2231977A1 true DE2231977A1 (de) | 1973-01-18 |
Family
ID=9079478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2231977A Pending DE2231977A1 (de) | 1971-06-29 | 1972-06-29 | Anordnung zur messung mechanischer spannungen |
Country Status (5)
Country | Link |
---|---|
US (1) | US3761784A (en, 2012) |
DE (1) | DE2231977A1 (en, 2012) |
FR (1) | FR2143553B1 (en, 2012) |
GB (1) | GB1397631A (en, 2012) |
IT (1) | IT956840B (en, 2012) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4437306A1 (de) * | 1994-10-19 | 1996-04-25 | Forschungszentrum Juelich Gmbh | Dehnungsmesser zur Messung der Dehnung einkristallinen Halbleitermaterials |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3913026A (en) * | 1974-04-08 | 1975-10-14 | Bulova Watch Co Inc | Mos transistor gain block |
US4034243A (en) * | 1975-12-19 | 1977-07-05 | International Business Machines Corporation | Logic array structure for depletion mode-FET load circuit technologies |
JPS5931863B2 (ja) * | 1976-01-07 | 1984-08-04 | 株式会社日立製作所 | 電圧出力回路 |
US4191057A (en) * | 1978-06-28 | 1980-03-04 | Gould Inc. | Inversion layer sprain gauge |
DE2841312C2 (de) * | 1978-09-22 | 1985-06-05 | Robert Bosch Gmbh, 7000 Stuttgart | Monolithischer Halbleiter-Drucksensor und Verfahren zu dessen Herstellung |
JPS6055655A (ja) * | 1983-09-07 | 1985-03-30 | Nissan Motor Co Ltd | 梁構造体を有する半導体装置 |
IT1213260B (it) * | 1984-12-18 | 1989-12-14 | Sgs Thomson Microelectronics | Circuito a ponte di transistori mos di potenza a canale n integrato eprocedimento per la sua fabbricazione. |
FR2653197B1 (fr) * | 1989-10-12 | 1991-12-27 | Vulcanic | Procede d'etancheification d'une extremite d'element de chauffage electrique et element etancheifie par ce procede. |
FR2653271B1 (fr) * | 1989-10-13 | 1994-06-10 | Schlumberger Ind Sa | Capteur a semi-conducteurs. |
JP3009239B2 (ja) * | 1991-04-02 | 2000-02-14 | 本田技研工業株式会社 | 半導体センサ |
US5397911A (en) * | 1991-04-02 | 1995-03-14 | Honda Giken Kogyo Kabushiki Kaisha | Semiconductor sensor with plural gate electrodes |
DE19808928B4 (de) * | 1998-03-03 | 2008-07-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Kraft/Drehmomentsensor |
US6427539B1 (en) | 2000-07-31 | 2002-08-06 | Motorola, Inc. | Strain gauge |
US6608370B1 (en) * | 2002-01-28 | 2003-08-19 | Motorola, Inc. | Semiconductor wafer having a thin die and tethers and methods of making the same |
US6772509B2 (en) | 2002-01-28 | 2004-08-10 | Motorola, Inc. | Method of separating and handling a thin semiconductor die on a wafer |
CN111122025A (zh) * | 2018-11-01 | 2020-05-08 | 中科院微电子研究所昆山分所 | 一种压力传感器 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL298671A (en, 2012) * | 1963-10-01 | |||
US3609252A (en) * | 1967-01-23 | 1971-09-28 | Texas Instruments Inc | Transducer apparatus and system utilizing insulated gate semiconductor field effect devices |
FR1522471A (fr) * | 1967-03-15 | 1968-04-26 | Csf | Dispositif de mesure de contrainte |
US3628070A (en) * | 1970-04-22 | 1971-12-14 | Rca Corp | Voltage reference and voltage level sensing circuit |
-
1971
- 1971-06-29 FR FR7123627A patent/FR2143553B1/fr not_active Expired
-
1972
- 1972-06-13 US US00262336A patent/US3761784A/en not_active Expired - Lifetime
- 1972-06-26 GB GB2991072A patent/GB1397631A/en not_active Expired
- 1972-06-27 IT IT26232/72A patent/IT956840B/it active
- 1972-06-29 DE DE2231977A patent/DE2231977A1/de active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4437306A1 (de) * | 1994-10-19 | 1996-04-25 | Forschungszentrum Juelich Gmbh | Dehnungsmesser zur Messung der Dehnung einkristallinen Halbleitermaterials |
Also Published As
Publication number | Publication date |
---|---|
FR2143553B1 (en, 2012) | 1974-05-31 |
US3761784A (en) | 1973-09-25 |
FR2143553A1 (en, 2012) | 1973-02-09 |
IT956840B (it) | 1973-10-10 |
GB1397631A (en) | 1975-06-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OHN | Withdrawal |