DE2231977A1 - Anordnung zur messung mechanischer spannungen - Google Patents

Anordnung zur messung mechanischer spannungen

Info

Publication number
DE2231977A1
DE2231977A1 DE2231977A DE2231977A DE2231977A1 DE 2231977 A1 DE2231977 A1 DE 2231977A1 DE 2231977 A DE2231977 A DE 2231977A DE 2231977 A DE2231977 A DE 2231977A DE 2231977 A1 DE2231977 A1 DE 2231977A1
Authority
DE
Germany
Prior art keywords
field effect
effect transistor
effect transistors
transistors
arrangement according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE2231977A
Other languages
German (de)
English (en)
Inventor
Christian Jund
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM
Original Assignee
Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM filed Critical Societe Europeenne de Semi Conducteurs de Microelectronique SA SESCOSEM
Publication of DE2231977A1 publication Critical patent/DE2231977A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0098—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means using semiconductor body comprising at least one PN junction as detecting element
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/10—Integrated device layouts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
DE2231977A 1971-06-29 1972-06-29 Anordnung zur messung mechanischer spannungen Pending DE2231977A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7123627A FR2143553B1 (OSRAM) 1971-06-29 1971-06-29

Publications (1)

Publication Number Publication Date
DE2231977A1 true DE2231977A1 (de) 1973-01-18

Family

ID=9079478

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2231977A Pending DE2231977A1 (de) 1971-06-29 1972-06-29 Anordnung zur messung mechanischer spannungen

Country Status (5)

Country Link
US (1) US3761784A (OSRAM)
DE (1) DE2231977A1 (OSRAM)
FR (1) FR2143553B1 (OSRAM)
GB (1) GB1397631A (OSRAM)
IT (1) IT956840B (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4437306A1 (de) * 1994-10-19 1996-04-25 Forschungszentrum Juelich Gmbh Dehnungsmesser zur Messung der Dehnung einkristallinen Halbleitermaterials

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3913026A (en) * 1974-04-08 1975-10-14 Bulova Watch Co Inc Mos transistor gain block
US4034243A (en) * 1975-12-19 1977-07-05 International Business Machines Corporation Logic array structure for depletion mode-FET load circuit technologies
JPS5931863B2 (ja) * 1976-01-07 1984-08-04 株式会社日立製作所 電圧出力回路
US4191057A (en) * 1978-06-28 1980-03-04 Gould Inc. Inversion layer sprain gauge
DE2841312C2 (de) * 1978-09-22 1985-06-05 Robert Bosch Gmbh, 7000 Stuttgart Monolithischer Halbleiter-Drucksensor und Verfahren zu dessen Herstellung
JPS6055655A (ja) * 1983-09-07 1985-03-30 Nissan Motor Co Ltd 梁構造体を有する半導体装置
IT1213260B (it) * 1984-12-18 1989-12-14 Sgs Thomson Microelectronics Circuito a ponte di transistori mos di potenza a canale n integrato eprocedimento per la sua fabbricazione.
FR2653197B1 (fr) * 1989-10-12 1991-12-27 Vulcanic Procede d'etancheification d'une extremite d'element de chauffage electrique et element etancheifie par ce procede.
FR2653271B1 (fr) * 1989-10-13 1994-06-10 Schlumberger Ind Sa Capteur a semi-conducteurs.
US5397911A (en) * 1991-04-02 1995-03-14 Honda Giken Kogyo Kabushiki Kaisha Semiconductor sensor with plural gate electrodes
JP3009239B2 (ja) * 1991-04-02 2000-02-14 本田技研工業株式会社 半導体センサ
DE19808928B4 (de) * 1998-03-03 2008-07-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kraft/Drehmomentsensor
US6427539B1 (en) 2000-07-31 2002-08-06 Motorola, Inc. Strain gauge
US6772509B2 (en) 2002-01-28 2004-08-10 Motorola, Inc. Method of separating and handling a thin semiconductor die on a wafer
US6608370B1 (en) * 2002-01-28 2003-08-19 Motorola, Inc. Semiconductor wafer having a thin die and tethers and methods of making the same
CN111122025A (zh) * 2018-11-01 2020-05-08 中科院微电子研究所昆山分所 一种压力传感器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL298671A (OSRAM) * 1963-10-01
US3609252A (en) * 1967-01-23 1971-09-28 Texas Instruments Inc Transducer apparatus and system utilizing insulated gate semiconductor field effect devices
FR1522471A (fr) * 1967-03-15 1968-04-26 Csf Dispositif de mesure de contrainte
US3628070A (en) * 1970-04-22 1971-12-14 Rca Corp Voltage reference and voltage level sensing circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4437306A1 (de) * 1994-10-19 1996-04-25 Forschungszentrum Juelich Gmbh Dehnungsmesser zur Messung der Dehnung einkristallinen Halbleitermaterials

Also Published As

Publication number Publication date
GB1397631A (en) 1975-06-11
FR2143553A1 (OSRAM) 1973-02-09
US3761784A (en) 1973-09-25
FR2143553B1 (OSRAM) 1974-05-31
IT956840B (it) 1973-10-10

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