DE2217660A1 - Elektronenkanone des Feldemissionstyps - Google Patents

Elektronenkanone des Feldemissionstyps

Info

Publication number
DE2217660A1
DE2217660A1 DE19722217660 DE2217660A DE2217660A1 DE 2217660 A1 DE2217660 A1 DE 2217660A1 DE 19722217660 DE19722217660 DE 19722217660 DE 2217660 A DE2217660 A DE 2217660A DE 2217660 A1 DE2217660 A1 DE 2217660A1
Authority
DE
Germany
Prior art keywords
electron beam
heating
electron
cathode tip
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19722217660
Other languages
German (de)
English (en)
Inventor
Setsuo Katsuta Nomura (Japan). M
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE2217660A1 publication Critical patent/DE2217660A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19722217660 1971-04-12 1972-04-12 Elektronenkanone des Feldemissionstyps Pending DE2217660A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2233871A JPS5323663B1 (https=) 1971-04-12 1971-04-12

Publications (1)

Publication Number Publication Date
DE2217660A1 true DE2217660A1 (de) 1972-11-16

Family

ID=12079897

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722217660 Pending DE2217660A1 (de) 1971-04-12 1972-04-12 Elektronenkanone des Feldemissionstyps

Country Status (4)

Country Link
US (1) US3786268A (https=)
JP (1) JPS5323663B1 (https=)
DE (1) DE2217660A1 (https=)
NL (1) NL155979B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112014007204B4 (de) 2014-12-26 2018-05-17 Hitachi High-Technologies Corporation Kombinierte Ladungsteilchenstrahlvorrichtung und Steuerverfahren dafür

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5420828B2 (https=) * 1972-06-09 1979-07-25
DE2851743C2 (de) * 1978-11-30 1980-08-28 Kernforschungsanlage Juelich Gmbh, 5170 Juelich ElektronenstoBspektrometer
JPS57191950A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Charged-particle source
EP0255542A1 (en) * 1986-02-03 1988-02-10 CREWE, Albert V. Electron beam memory system with ultra-compact, high current density electron gun
US4740705A (en) * 1986-08-11 1988-04-26 Electron Beam Memories Axially compact field emission cathode assembly
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
JP3131339B2 (ja) * 1993-12-22 2001-01-31 三菱電機株式会社 陰極、陰極線管および陰極線管の作動方法
US5848118A (en) * 1997-06-19 1998-12-08 Lear Corporation Method and apparatus for detecting inhomogeneities in seat assemblies
FR2792770A1 (fr) * 1999-04-22 2000-10-27 Cit Alcatel Fonctionnement a haute pression d'une cathode froide a emission de champ
EP1760761B1 (en) * 2005-09-05 2017-10-18 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam emitting device and method for operating a charged particle beam emitting device
DE112009001537B8 (de) 2008-06-20 2019-01-24 Hitachi High-Technologies Corporation Vorrichtung mit geladenem Teilchenstrahl und Verfahren zum Steuern der Vorrichtung
US8188451B1 (en) * 2008-09-24 2012-05-29 Kla-Tencor Corporation Electron generation and delivery system for contamination sensitive emitters
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning
JP6762635B1 (ja) * 2020-04-16 2020-09-30 株式会社Ｐｈｏｔｏ ｅｌｅｃｔｒｏｎ Ｓｏｕｌ 電子銃、電子線適用装置、および、電子ビームの射出方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1246744A (en) * 1969-01-02 1971-09-15 Graham Stuart Plows Electron beam apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112014007204B4 (de) 2014-12-26 2018-05-17 Hitachi High-Technologies Corporation Kombinierte Ladungsteilchenstrahlvorrichtung und Steuerverfahren dafür

Also Published As

Publication number Publication date
US3786268A (en) 1974-01-15
NL155979B (nl) 1978-02-15
JPS5323663B1 (https=) 1978-07-15
NL7204863A (https=) 1972-10-16

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