DE2213659C3 - Anwendung des Verfahrens der Verbindung keramischer Gegenstände auf aus Siliziumnitrid bestehende Teile und Glasflußmischung hierfür - Google Patents
Anwendung des Verfahrens der Verbindung keramischer Gegenstände auf aus Siliziumnitrid bestehende Teile und Glasflußmischung hierfürInfo
- Publication number
- DE2213659C3 DE2213659C3 DE2213659A DE2213659A DE2213659C3 DE 2213659 C3 DE2213659 C3 DE 2213659C3 DE 2213659 A DE2213659 A DE 2213659A DE 2213659 A DE2213659 A DE 2213659A DE 2213659 C3 DE2213659 C3 DE 2213659C3
- Authority
- DE
- Germany
- Prior art keywords
- weight
- application
- glass
- oxide
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 title claims description 48
- 239000000203 mixture Substances 0.000 title claims description 29
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 20
- 238000000034 method Methods 0.000 title claims description 17
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 9
- 238000005304 joining Methods 0.000 title claims description 6
- 239000000919 ceramic Substances 0.000 title claims description 5
- 230000004907 flux Effects 0.000 title claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 50
- 239000000377 silicon dioxide Substances 0.000 claims description 25
- 235000012239 silicon dioxide Nutrition 0.000 claims description 23
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 13
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 12
- 239000000395 magnesium oxide Substances 0.000 claims description 11
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 10
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 10
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 10
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
- 239000000843 powder Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 4
- 239000000292 calcium oxide Substances 0.000 claims description 4
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 3
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 239000011572 manganese Substances 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000006060 molten glass Substances 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 238000002844 melting Methods 0.000 description 12
- 230000008018 melting Effects 0.000 description 12
- 150000001875 compounds Chemical class 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000000075 oxide glass Substances 0.000 description 3
- 229910021426 porous silicon Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-NJFSPNSNSA-N Aluminium-29 Chemical compound [29Al] XAGFODPZIPBFFR-NJFSPNSNSA-N 0.000 description 1
- XAGFODPZIPBFFR-BJUDXGSMSA-N Aluminum-26 Chemical compound [26Al] XAGFODPZIPBFFR-BJUDXGSMSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- LNSPFAOULBTYBI-UHFFFAOYSA-N [O].C#C Chemical group [O].C#C LNSPFAOULBTYBI-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 229940031958 magnesium carbonate hydroxide Drugs 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000005284 oxidic glass Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052566 spinel group Inorganic materials 0.000 description 1
- FKHIFSZMMVMEQY-UHFFFAOYSA-N talc Chemical compound [Mg+2].[O-][Si]([O-])=O FKHIFSZMMVMEQY-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
- C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/10—Glass interlayers, e.g. frit or flux
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/368—Silicon nitride
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Structural Engineering (AREA)
- Ceramic Products (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB787471A GB1374817A (en) | 1971-03-24 | 1971-03-24 | Method of joining a pair of silicon nitride parts |
| GB1645271 | 1971-05-21 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2213659A1 DE2213659A1 (de) | 1972-10-05 |
| DE2213659B2 DE2213659B2 (de) | 1980-01-17 |
| DE2213659C3 true DE2213659C3 (de) | 1980-09-11 |
Family
ID=26241726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2213659A Expired DE2213659C3 (de) | 1971-03-24 | 1972-03-21 | Anwendung des Verfahrens der Verbindung keramischer Gegenstände auf aus Siliziumnitrid bestehende Teile und Glasflußmischung hierfür |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3833348A (enExample) |
| AT (2) | AT322431B (enExample) |
| AU (1) | AU460948B2 (enExample) |
| BE (1) | BE781181A (enExample) |
| CA (1) | CA968951A (enExample) |
| CH (1) | CH587201A5 (enExample) |
| DE (1) | DE2213659C3 (enExample) |
| FR (1) | FR2131571A5 (enExample) |
| GB (1) | GB1374817A (enExample) |
| IT (1) | IT952345B (enExample) |
| NL (1) | NL7203544A (enExample) |
| SE (1) | SE378014B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE792414A (fr) * | 1972-06-21 | 1973-03-30 | Siemens Ag | Procede d'etablissement d'une liaison etanche aux gaz pour des pieces en silicium ou carbure de silicium cristallin |
| US4162151A (en) * | 1977-05-13 | 1979-07-24 | Westinghouse Electric Corp. | Method of forming arc tube end seal |
| DE2744620A1 (de) * | 1977-10-04 | 1979-04-05 | Annawerk Gmbh | Verfahren zur herstellung eines festen verbundes zwischen reaktionsgesinterten und heissgepressten siliziumnitrid-bauteilen |
| EP0055049B1 (en) * | 1980-12-20 | 1986-03-19 | Thorn Emi Plc | Discharge lamp arc tubes |
| JPS60171274A (ja) * | 1984-02-16 | 1985-09-04 | 黒崎窯業株式会社 | セラミツクの接合方法 |
| JPS61295278A (ja) * | 1985-06-24 | 1986-12-26 | 日立金属株式会社 | セラミツク部品のガラス接合方法 |
| GB8908965D0 (en) * | 1989-04-20 | 1989-06-07 | T & N Technology Ltd | Treatment of reaction bonded silicon nitride articles |
| US5200241A (en) * | 1989-05-18 | 1993-04-06 | General Electric Company | Metal-ceramic structure with intermediate high temperature reaction barrier layer |
| DE19945866A1 (de) | 1999-09-24 | 2001-03-29 | Dmc2 Degussa Metals Catalysts | Verfahren zur Herstellung einer leitfähigen Beschichtung auf Glas oder emailliertem Stahl und hiernach beschichtete Substrate |
| US7083694B2 (en) * | 2003-04-23 | 2006-08-01 | Integrated Materials, Inc. | Adhesive of a silicon and silica composite particularly useful for joining silicon parts |
| FR2953215B1 (fr) * | 2009-12-02 | 2012-01-06 | Areva Nc | Procede d'assemblage etanche aux fluides de deux pieces en nitrure de silicium |
| DE102023127315A1 (de) * | 2023-10-06 | 2025-04-10 | Qsil Gmbh Quarzschmelze Ilmenau | Verfahren zur Herstellung eines MAS-Glaskörpers, Pulvermischung, MAS-Glaskörper und Verwendung eines MAS-Glaskörpers |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2036190A (en) * | 1932-12-30 | 1936-04-07 | Carborundum Co | Method of producing a ceramic body |
| US2750268A (en) * | 1952-05-01 | 1956-06-12 | Union Carbide & Carbon Corp | Silicon nitride |
| US2777254A (en) * | 1952-10-22 | 1957-01-15 | Owens Corning Fiberglass Corp | Coated refractory for contacting molten glass and method of making same |
| US3030257A (en) * | 1957-12-02 | 1962-04-17 | Rea Magnet Wire Company Inc | Heat resistant insulated electrical components and process of making |
| US3269818A (en) * | 1960-08-23 | 1966-08-30 | Owens Corning Fiberglass Corp | Devitrifying a glass about glass fibers on a conductor |
| US3281309A (en) * | 1961-12-12 | 1966-10-25 | Gen Electric | Ceramic bonding |
| US3494026A (en) * | 1962-08-13 | 1970-02-10 | Matsushita Electric Industrial Co Ltd | Methods for manufacturing magnetic heads |
| US3317298A (en) * | 1963-04-11 | 1967-05-02 | Philips Corp | Process for joining surfaces of refractory material with a mno-sio2-al2o3 system |
| GB1084338A (enExample) * | 1963-08-07 | |||
| NL131100C (enExample) * | 1964-10-27 | |||
| US3414465A (en) * | 1965-06-21 | 1968-12-03 | Owens Illinois Inc | Sealed glass article of manufacture |
| US3367696A (en) * | 1965-06-22 | 1968-02-06 | Engelhard Ind Inc | Metal to ceramic seal |
| FR1528167A (fr) * | 1966-05-26 | 1968-06-07 | Corning Glass Works | Verre céramique transparent |
| US3468647A (en) * | 1967-10-04 | 1969-09-23 | Hughes Aircraft Co | Ceramic-metal seal |
| US3473999A (en) * | 1968-11-05 | 1969-10-21 | Owens Illinois Inc | Glass or metal surfaces sealed by sio2-al2o3-mgo compositions and method of making |
| US3687650A (en) * | 1969-08-16 | 1972-08-29 | Int Computers Ltd | Methods of bonding ferrite components |
| US3681044A (en) * | 1970-07-06 | 1972-08-01 | Ibm | Method of manufacturing ferrite recording heads with a multipurpose devitrifiable glass |
-
1971
- 1971-03-24 GB GB787471A patent/GB1374817A/en not_active Expired
-
1972
- 1972-03-14 AT AT215772A patent/AT322431B/de not_active IP Right Cessation
- 1972-03-14 AT AT994273*7A patent/AT328357B/de not_active IP Right Cessation
- 1972-03-14 CA CA137,053A patent/CA968951A/en not_active Expired
- 1972-03-14 AU AU39973/72A patent/AU460948B2/en not_active Expired
- 1972-03-14 US US00234620A patent/US3833348A/en not_active Expired - Lifetime
- 1972-03-16 NL NL7203544A patent/NL7203544A/xx unknown
- 1972-03-21 DE DE2213659A patent/DE2213659C3/de not_active Expired
- 1972-03-22 IT IT49157/72A patent/IT952345B/it active
- 1972-03-23 SE SE7203740A patent/SE378014B/xx unknown
- 1972-03-23 FR FR7210243A patent/FR2131571A5/fr not_active Expired
- 1972-03-24 BE BE781181A patent/BE781181A/xx unknown
- 1972-03-24 CH CH442772A patent/CH587201A5/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| ATA994273A (de) | 1975-05-15 |
| AT322431B (de) | 1975-05-26 |
| GB1374817A (en) | 1974-11-20 |
| AU3997372A (en) | 1973-09-20 |
| DE2213659A1 (de) | 1972-10-05 |
| FR2131571A5 (enExample) | 1972-11-10 |
| BE781181A (fr) | 1972-07-17 |
| US3833348A (en) | 1974-09-03 |
| AU460948B2 (en) | 1975-05-08 |
| CH587201A5 (enExample) | 1977-04-29 |
| NL7203544A (enExample) | 1972-09-26 |
| SE378014B (enExample) | 1975-08-11 |
| IT952345B (it) | 1973-07-20 |
| DE2213659B2 (de) | 1980-01-17 |
| CA968951A (en) | 1975-06-10 |
| AT328357B (de) | 1976-03-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |