DE2202494B2 - Quarzglaselemente mit verringerter Deformation bei erhöhter Temperatur und Verfahren zu ihrer Herstellung - Google Patents
Quarzglaselemente mit verringerter Deformation bei erhöhter Temperatur und Verfahren zu ihrer HerstellungInfo
- Publication number
- DE2202494B2 DE2202494B2 DE19722202494 DE2202494A DE2202494B2 DE 2202494 B2 DE2202494 B2 DE 2202494B2 DE 19722202494 DE19722202494 DE 19722202494 DE 2202494 A DE2202494 A DE 2202494A DE 2202494 B2 DE2202494 B2 DE 2202494B2
- Authority
- DE
- Germany
- Prior art keywords
- quartz glass
- quartz
- layers
- elements
- crystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 29
- 238000000034 method Methods 0.000 title claims description 11
- 238000004519 manufacturing process Methods 0.000 title claims 4
- 229910052906 cristobalite Inorganic materials 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 6
- 238000004031 devitrification Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000011282 treatment Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000005350 fused silica glass Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052792 caesium Inorganic materials 0.000 claims description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 2
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 239000011575 calcium Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 239000011777 magnesium Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 230000007774 longterm Effects 0.000 claims 2
- 239000002667 nucleating agent Substances 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000005755 formation reaction Methods 0.000 claims 1
- 238000007496 glass forming Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 238000011065 in-situ storage Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000003340 mental effect Effects 0.000 claims 1
- 238000010422 painting Methods 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 239000011253 protective coating Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 19
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
- C03B32/02—Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/207—Uniting glass rods, glass tubes, or hollow glassware
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Glass Compositions (AREA)
- Surface Treatment Of Glass (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7106417A FR2126098B1 (OSRAM) | 1971-02-25 | 1971-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2202494A1 DE2202494A1 (de) | 1972-09-07 |
| DE2202494B2 true DE2202494B2 (de) | 1973-11-08 |
Family
ID=9072454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722202494 Pending DE2202494B2 (de) | 1971-02-25 | 1972-01-19 | Quarzglaselemente mit verringerter Deformation bei erhöhter Temperatur und Verfahren zu ihrer Herstellung |
Country Status (5)
| Country | Link |
|---|---|
| CH (1) | CH552543A (OSRAM) |
| DE (1) | DE2202494B2 (OSRAM) |
| FR (1) | FR2126098B1 (OSRAM) |
| GB (1) | GB1377804A (OSRAM) |
| NL (1) | NL7200654A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3403378A1 (de) * | 1984-02-01 | 1985-08-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Verfahren zur oberflaechenbehandlung eines quarzglassubstrates |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2928089C3 (de) * | 1979-07-12 | 1982-03-04 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Verbundtiegel für halbleitertechnologische Zwecke und Verfahren zur Herstellung |
| JPS5849290B2 (ja) * | 1980-08-18 | 1983-11-02 | 富士通株式会社 | 石英反応管 |
| DE112005000116A5 (de) * | 2004-01-05 | 2007-05-24 | Schott Ag | Technisches System, Verwendung des technischen Systems und Verfahren zur Herstellung von hohlzylindrischen Elementen aus Glaskeramik |
| EP3428132B1 (de) | 2017-07-10 | 2023-08-30 | Heraeus Quarzglas GmbH & Co. KG | Quarzglasbauteil mit hoher thermischer stabilität, halbzeug dafür und verfahren zur herstellung desselben |
-
1971
- 1971-02-25 FR FR7106417A patent/FR2126098B1/fr not_active Expired
- 1971-12-23 CH CH1885471A patent/CH552543A/xx not_active IP Right Cessation
-
1972
- 1972-01-17 NL NL7200654A patent/NL7200654A/xx unknown
- 1972-01-19 DE DE19722202494 patent/DE2202494B2/de active Pending
- 1972-02-09 GB GB596272A patent/GB1377804A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3403378A1 (de) * | 1984-02-01 | 1985-08-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Verfahren zur oberflaechenbehandlung eines quarzglassubstrates |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2126098A1 (OSRAM) | 1972-10-06 |
| CH552543A (de) | 1974-08-15 |
| NL7200654A (OSRAM) | 1972-08-29 |
| FR2126098B1 (OSRAM) | 1973-11-23 |
| DE2202494A1 (de) | 1972-09-07 |
| GB1377804A (en) | 1974-12-18 |
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