DE2155994A1 - Verfahren und Vorrichtung zum Pumpen von Gas - Google Patents
Verfahren und Vorrichtung zum Pumpen von GasInfo
- Publication number
- DE2155994A1 DE2155994A1 DE19712155994 DE2155994A DE2155994A1 DE 2155994 A1 DE2155994 A1 DE 2155994A1 DE 19712155994 DE19712155994 DE 19712155994 DE 2155994 A DE2155994 A DE 2155994A DE 2155994 A1 DE2155994 A1 DE 2155994A1
- Authority
- DE
- Germany
- Prior art keywords
- pump
- cold
- gas
- pumping
- gases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000005086 pumping Methods 0.000 title claims description 19
- 238000000034 method Methods 0.000 title claims description 15
- 239000007789 gas Substances 0.000 claims description 57
- 239000001307 helium Substances 0.000 claims description 35
- 229910052734 helium Inorganic materials 0.000 claims description 35
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 34
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 29
- 239000007788 liquid Substances 0.000 claims description 19
- 229910052786 argon Inorganic materials 0.000 claims description 16
- 238000001179 sorption measurement Methods 0.000 claims description 16
- 238000005057 refrigeration Methods 0.000 claims description 15
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 9
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 229910052754 neon Inorganic materials 0.000 claims description 5
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 239000001569 carbon dioxide Substances 0.000 claims description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000012546 transfer Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- WSWCOQWTEOXDQX-MQQKCMAXSA-N sorbic acid group Chemical group C(\C=C\C=C\C)(=O)O WSWCOQWTEOXDQX-MQQKCMAXSA-N 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 150000001485 argon Chemical class 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002594 sorbent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7040599A FR2114039A5 (enrdf_load_stackoverflow) | 1970-11-13 | 1970-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2155994A1 true DE2155994A1 (de) | 1972-05-18 |
Family
ID=9064083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712155994 Ceased DE2155994A1 (de) | 1970-11-13 | 1971-11-11 | Verfahren und Vorrichtung zum Pumpen von Gas |
Country Status (12)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2620880A1 (de) * | 1976-05-11 | 1977-11-24 | Leybold Heraeus Gmbh & Co Kg | Kryopumpe |
| DE2949092A1 (de) * | 1979-12-06 | 1981-06-11 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4148196A (en) * | 1977-04-25 | 1979-04-10 | Sciex Inc. | Multiple stage cryogenic pump and method of pumping |
| US4341079A (en) * | 1980-04-01 | 1982-07-27 | Cvi Incorporated | Cryopump apparatus |
| USRE31665E (en) * | 1980-04-01 | 1984-09-11 | Cvi Incorporated | Cryopump apparatus |
| US4275566A (en) * | 1980-04-01 | 1981-06-30 | Pennwalt Corporation | Cryopump apparatus |
| GB2115602B (en) * | 1982-02-24 | 1986-01-02 | Philips Electronic Associated | Getters in infra-red radiation detectors |
| US4559787A (en) * | 1984-12-04 | 1985-12-24 | The United States Of America As Represented By The United States Department Of Energy | Vacuum pump apparatus |
| US4608866A (en) * | 1985-03-13 | 1986-09-02 | Martin Marietta Corporation | Small component helium leak detector |
| IT1197069B (it) * | 1986-08-06 | 1988-11-25 | Sgs Microelettronica Spa | Trappola a fluido refrigerante per evaporatori sotto vuoto per la deposizione di sottili pellicole metalliche |
| US4926648A (en) * | 1988-03-07 | 1990-05-22 | Toshiba Corp. | Turbomolecular pump and method of operating the same |
| US4873833A (en) * | 1988-11-23 | 1989-10-17 | American Telephone Telegraph Company, At&T Bell Laboratories | Apparatus comprising a high-vacuum chamber |
| DE4017213C1 (enrdf_load_stackoverflow) * | 1990-05-29 | 1991-05-23 | Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De | |
| US5211022A (en) * | 1991-05-17 | 1993-05-18 | Helix Technology Corporation | Cryopump with differential pumping capability |
| JP3123126B2 (ja) * | 1991-07-15 | 2001-01-09 | 株式会社日立製作所 | 冷却機付き真空容器 |
| US5653113A (en) * | 1995-04-07 | 1997-08-05 | Rigaku Corporation | Cooling system |
| US5806319A (en) * | 1997-03-13 | 1998-09-15 | Wary; John | Method and apparatus for cryogenically cooling a deposition chamber |
| TWI557320B (zh) * | 2011-02-09 | 2016-11-11 | 布魯克機械公司 | 低溫泵、低溫泵的前隔板及製造低溫泵之前隔板的方法 |
| US20140202174A1 (en) * | 2013-01-24 | 2014-07-24 | Cryomech, Inc. | Closed Cycle 1 K Refrigeration System |
| JP6053552B2 (ja) * | 2013-02-18 | 2016-12-27 | 住友重機械工業株式会社 | クライオポンプ及びクライオポンプ取付構造 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3122896A (en) * | 1962-10-31 | 1964-03-03 | Cryovac Inc | Pump heat radiation shield |
| US3252652A (en) * | 1963-01-24 | 1966-05-24 | Bendix Balzers Vacuum Inc | Process and apparatus for the production of high vacuums |
| US3364654A (en) * | 1965-09-27 | 1968-01-23 | Union Carbide Corp | Ultrahigh vacuum pumping process and apparatus |
| FR2048253A5 (enrdf_load_stackoverflow) * | 1969-12-01 | 1971-03-19 | Air Liquide |
-
1970
- 1970-11-13 FR FR7040599A patent/FR2114039A5/fr not_active Expired
-
1971
- 1971-11-08 SE SE7114209A patent/SE377830B/xx unknown
- 1971-11-10 JP JP8913571A patent/JPS56637B1/ja active Pending
- 1971-11-10 IT IT30926/71A patent/IT941125B/it active
- 1971-11-11 CH CH1641671A patent/CH550941A/fr not_active IP Right Cessation
- 1971-11-11 LU LU64250D patent/LU64250A1/xx unknown
- 1971-11-11 DE DE19712155994 patent/DE2155994A1/de not_active Ceased
- 1971-11-12 US US00198178A patent/US3769806A/en not_active Expired - Lifetime
- 1971-11-12 GB GB5278171A patent/GB1375734A/en not_active Expired
- 1971-11-12 BE BE775243A patent/BE775243A/xx not_active IP Right Cessation
- 1971-11-15 CA CA127,722A patent/CA947990A/en not_active Expired
- 1971-11-15 NL NLAANVRAGE7115666,A patent/NL172590C/xx not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2620880A1 (de) * | 1976-05-11 | 1977-11-24 | Leybold Heraeus Gmbh & Co Kg | Kryopumpe |
| DE2949092A1 (de) * | 1979-12-06 | 1981-06-11 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe |
Also Published As
| Publication number | Publication date |
|---|---|
| NL172590B (nl) | 1983-04-18 |
| LU64250A1 (enrdf_load_stackoverflow) | 1972-06-02 |
| BE775243A (fr) | 1972-05-12 |
| NL7115666A (enrdf_load_stackoverflow) | 1972-05-16 |
| NL172590C (nl) | 1983-09-16 |
| JPS56637B1 (enrdf_load_stackoverflow) | 1981-01-08 |
| GB1375734A (enrdf_load_stackoverflow) | 1974-11-27 |
| SE377830B (enrdf_load_stackoverflow) | 1975-07-28 |
| FR2114039A5 (enrdf_load_stackoverflow) | 1972-06-30 |
| IT941125B (it) | 1973-03-01 |
| US3769806A (en) | 1973-11-06 |
| CH550941A (fr) | 1974-06-28 |
| CA947990A (en) | 1974-05-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2155994A1 (de) | Verfahren und Vorrichtung zum Pumpen von Gas | |
| DE69000962T2 (de) | Waermeisolierung. | |
| DE10208487B4 (de) | Verfahren zur Nutzung der Wärme hocherhitzter Heißluft | |
| DE2755540A1 (de) | Verfahren zum aushaerten von betonteilen | |
| DE2028949A1 (enrdf_load_stackoverflow) | ||
| DE4241317C2 (de) | Verfahren und Vorrichtung zur Montage eines Kraftfahrzeugwärmespeichers | |
| DE3226900A1 (de) | Verfahren und verguetungsraum zum beschichten von behaelterglas mit titanoxid | |
| CH661099A5 (de) | Refrigerator-betriebene kryopumpe. | |
| EP0442107A1 (de) | Verfahren und Vorrichtung zum Einfrieren eines der Gefriertrocknung zu unterwerfenden Produktes | |
| DE112017003771T5 (de) | Wärmespeichersystem, Wärmespeicherbehälter, den Wärmespeicherbehälter verwendende Wärmespeichervorrichtung und die Wärmespeichervorrichtung verwendende Wärmevorrichtung | |
| DE69402017T2 (de) | Lagerbehälter für Hochdruckgas sowie Anlage für die Lagerung und Lieferung von Hochdruckgas | |
| DE10314687A1 (de) | Verfahren zum Sterilisieren von Gegenständen | |
| DE3146902A1 (de) | Heizanlage | |
| DE3601886A1 (de) | Flaschenbuendel | |
| DE2208743A1 (de) | Verfahren und Vorrichtung zur Gasübertragung | |
| DE3851030T2 (de) | Herstellungsverfahren für Entladungslampen mit verdampftem Metall und Gerät dafür. | |
| DE69130500T2 (de) | Vorrichtung zur ionisation | |
| EP0355519A2 (de) | Verfahren und Vorrichtung zur Kühlung eines mit Flüssigkeit gefüllten Behälters | |
| DE2229655C3 (de) | Kryosorptionspumpe | |
| DE4302281A1 (de) | Vorrichtung zur Aufnahme und Abgabe von Wärmeenergie | |
| DE896655C (de) | Turmabsorber, insbesondere fuer Absorptionskaeltemaschinen | |
| EP0185947A1 (de) | Verfahren und Vorrichtung zur Schnellkühlung einer HIP-Anlage | |
| DE1546682A1 (de) | Verfahren zur Filterung von mit radioaktiven Stoffen verunreinigten Gasen | |
| DE354624C (de) | Waermeisolierende Flaschen- oder Gefaessverkleidung aus Metall | |
| DE1619995A1 (de) | Verfahren zum Beseitigen von Kohlenstoffverunreinigungen in einem Siliziumkoerper und Vorrichtung zur Durchfuehrung dieses Verfahrens |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| 8131 | Rejection |