BE775243A - Procede et installation de pompage de gaz - Google Patents

Procede et installation de pompage de gaz

Info

Publication number
BE775243A
BE775243A BE775243A BE775243A BE775243A BE 775243 A BE775243 A BE 775243A BE 775243 A BE775243 A BE 775243A BE 775243 A BE775243 A BE 775243A BE 775243 A BE775243 A BE 775243A
Authority
BE
Belgium
Prior art keywords
installation
gas pumping
pumping process
gas
pumping
Prior art date
Application number
BE775243A
Other languages
English (en)
French (fr)
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of BE775243A publication Critical patent/BE775243A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
BE775243A 1970-11-13 1971-11-12 Procede et installation de pompage de gaz BE775243A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (xx) 1970-11-13 1970-11-13

Publications (1)

Publication Number Publication Date
BE775243A true BE775243A (fr) 1972-05-12

Family

ID=9064083

Family Applications (1)

Application Number Title Priority Date Filing Date
BE775243A BE775243A (fr) 1970-11-13 1971-11-12 Procede et installation de pompage de gaz

Country Status (12)

Country Link
US (1) US3769806A (xx)
JP (1) JPS56637B1 (xx)
BE (1) BE775243A (xx)
CA (1) CA947990A (xx)
CH (1) CH550941A (xx)
DE (1) DE2155994A1 (xx)
FR (1) FR2114039A5 (xx)
GB (1) GB1375734A (xx)
IT (1) IT941125B (xx)
LU (1) LU64250A1 (xx)
NL (1) NL172590C (xx)
SE (1) SE377830B (xx)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2949092A1 (de) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
IT1197069B (it) * 1986-08-06 1988-11-25 Sgs Microelettronica Spa Trappola a fluido refrigerante per evaporatori sotto vuoto per la deposizione di sottili pellicole metalliche
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4017213C1 (xx) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3123126B2 (ja) * 1991-07-15 2001-01-09 株式会社日立製作所 冷却機付き真空容器
US5653113A (en) * 1995-04-07 1997-08-05 Rigaku Corporation Cooling system
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
WO2012109304A2 (en) 2011-02-09 2012-08-16 Brooks Automation, Inc. Cryopump
US20140202174A1 (en) * 2013-01-24 2014-07-24 Cryomech, Inc. Closed Cycle 1 K Refrigeration System
JP6053552B2 (ja) * 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ及びクライオポンプ取付構造

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
US3252652A (en) * 1963-01-24 1966-05-24 Bendix Balzers Vacuum Inc Process and apparatus for the production of high vacuums
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
FR2048253A5 (xx) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
FR2114039A5 (xx) 1972-06-30
NL172590B (nl) 1983-04-18
US3769806A (en) 1973-11-06
CA947990A (en) 1974-05-28
NL172590C (nl) 1983-09-16
GB1375734A (xx) 1974-11-27
NL7115666A (xx) 1972-05-16
IT941125B (it) 1973-03-01
CH550941A (fr) 1974-06-28
DE2155994A1 (de) 1972-05-18
LU64250A1 (xx) 1972-06-02
JPS56637B1 (xx) 1981-01-08
SE377830B (xx) 1975-07-28

Similar Documents

Publication Publication Date Title
BE775243A (fr) Procede et installation de pompage de gaz
DD94131B3 (de) Membranpumpverfahren und -vorrichtung
CH508251A (de) Ionisationsfeuermelder
IT941796B (it) Apparecchio e metodo di essicca zione a gas
FI54744B (fi) Apparat foer bestaemning av syreinnehaollet i en flytande metall
CH524795A (de) Gaskältemaschine
DK131954C (da) Gasbrender
AT327442B (de) Gasbrenner
BE796236A (fr) Detendeur-regulateur de gaz
CH539310A (de) Ionisations-Feuermelder
AT314061B (de) Gasbrennersystem
BE763337A (fr) Installation cryogene
CH530813A (fr) Epurateur de gaz
BE770827A (fr) Installation de rayonnage et son procede de construction
RO68281A (ro) Procedeu si instalatie pentru cresterea pestelui
BE765920A (fr) Production de gaz reducteur
BE777071A (fr) Procede de production d'un gaz reducteur
NL173333B (nl) Gasontladingspaneel.
BE763647A (fr) Procede et installation pour le filtrage de gaz
BE766476A (fr) Procede de recuperation de gaz
CA954672A (en) Process and installation for obtaining deuterium
BE759376A (fr) Procede de production de gaz de reduction
BE794609A (fr) Installation de traitement de gaz
BE775351A (fr) Indicateur de qualite de gaz et procede de determination de qualite de gaz
CH533816A (fr) Installation de réfrigération

Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: L AIR LIQUIDE S.A. POUR ETUDE & EXPLOITATION DES

Effective date: 19881130