CA947990A - Method of and apparatus for pumping gas - Google Patents

Method of and apparatus for pumping gas

Info

Publication number
CA947990A
CA947990A CA127,722A CA127722A CA947990A CA 947990 A CA947990 A CA 947990A CA 127722 A CA127722 A CA 127722A CA 947990 A CA947990 A CA 947990A
Authority
CA
Canada
Prior art keywords
pumping gas
pumping
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA127,722A
Other versions
CA127722S (en
Inventor
Jean-Claude Boissin
Jean-Jacques Thibault
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Application granted granted Critical
Publication of CA947990A publication Critical patent/CA947990A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CA127,722A 1970-11-13 1971-11-15 Method of and apparatus for pumping gas Expired CA947990A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (en) 1970-11-13 1970-11-13

Publications (1)

Publication Number Publication Date
CA947990A true CA947990A (en) 1974-05-28

Family

ID=9064083

Family Applications (1)

Application Number Title Priority Date Filing Date
CA127,722A Expired CA947990A (en) 1970-11-13 1971-11-15 Method of and apparatus for pumping gas

Country Status (12)

Country Link
US (1) US3769806A (en)
JP (1) JPS56637B1 (en)
BE (1) BE775243A (en)
CA (1) CA947990A (en)
CH (1) CH550941A (en)
DE (1) DE2155994A1 (en)
FR (1) FR2114039A5 (en)
GB (1) GB1375734A (en)
IT (1) IT941125B (en)
LU (1) LU64250A1 (en)
NL (1) NL172590C (en)
SE (1) SE377830B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (en) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2949092A1 (en) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
IT1197069B (en) * 1986-08-06 1988-11-25 Sgs Microelettronica Spa REFRIGERANT FLUID TRAP FOR VACUUM EVAPORATORS FOR THE DEPOSITION OF THIN METAL FILMS
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4017213C1 (en) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3123126B2 (en) * 1991-07-15 2001-01-09 株式会社日立製作所 Vacuum container with cooler
US5653113A (en) * 1995-04-07 1997-08-05 Rigaku Corporation Cooling system
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
KR101986159B1 (en) 2011-02-09 2019-06-05 브룩스 오토메이션, 인크. Cryopump
US20140202174A1 (en) * 2013-01-24 2014-07-24 Cryomech, Inc. Closed Cycle 1 K Refrigeration System
JP6053552B2 (en) * 2013-02-18 2016-12-27 住友重機械工業株式会社 Cryo pump and cryopump mounting structure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
US3252652A (en) * 1963-01-24 1966-05-24 Bendix Balzers Vacuum Inc Process and apparatus for the production of high vacuums
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
FR2048253A5 (en) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
NL172590C (en) 1983-09-16
SE377830B (en) 1975-07-28
DE2155994A1 (en) 1972-05-18
IT941125B (en) 1973-03-01
CH550941A (en) 1974-06-28
US3769806A (en) 1973-11-06
FR2114039A5 (en) 1972-06-30
BE775243A (en) 1972-05-12
JPS56637B1 (en) 1981-01-08
NL7115666A (en) 1972-05-16
NL172590B (en) 1983-04-18
LU64250A1 (en) 1972-06-02
GB1375734A (en) 1974-11-27

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