BE775243A - GAS PUMPING PROCESS AND INSTALLATION - Google Patents

GAS PUMPING PROCESS AND INSTALLATION

Info

Publication number
BE775243A
BE775243A BE775243A BE775243A BE775243A BE 775243 A BE775243 A BE 775243A BE 775243 A BE775243 A BE 775243A BE 775243 A BE775243 A BE 775243A BE 775243 A BE775243 A BE 775243A
Authority
BE
Belgium
Prior art keywords
installation
gas pumping
pumping process
gas
pumping
Prior art date
Application number
BE775243A
Other languages
French (fr)
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of BE775243A publication Critical patent/BE775243A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
BE775243A 1970-11-13 1971-11-12 GAS PUMPING PROCESS AND INSTALLATION BE775243A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (en) 1970-11-13 1970-11-13

Publications (1)

Publication Number Publication Date
BE775243A true BE775243A (en) 1972-05-12

Family

ID=9064083

Family Applications (1)

Application Number Title Priority Date Filing Date
BE775243A BE775243A (en) 1970-11-13 1971-11-12 GAS PUMPING PROCESS AND INSTALLATION

Country Status (12)

Country Link
US (1) US3769806A (en)
JP (1) JPS56637B1 (en)
BE (1) BE775243A (en)
CA (1) CA947990A (en)
CH (1) CH550941A (en)
DE (1) DE2155994A1 (en)
FR (1) FR2114039A5 (en)
GB (1) GB1375734A (en)
IT (1) IT941125B (en)
LU (1) LU64250A1 (en)
NL (1) NL172590C (en)
SE (1) SE377830B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (en) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2949092A1 (en) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
IT1197069B (en) * 1986-08-06 1988-11-25 Sgs Microelettronica Spa REFRIGERANT FLUID TRAP FOR VACUUM EVAPORATORS FOR THE DEPOSITION OF THIN METAL FILMS
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4017213C1 (en) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3123126B2 (en) * 1991-07-15 2001-01-09 株式会社日立製作所 Vacuum container with cooler
US5653113A (en) * 1995-04-07 1997-08-05 Rigaku Corporation Cooling system
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
TWI639769B (en) 2011-02-09 2018-11-01 布魯克機械公司 Cryopump and second stage array for cryopump
US20140202174A1 (en) * 2013-01-24 2014-07-24 Cryomech, Inc. Closed Cycle 1 K Refrigeration System
JP6053552B2 (en) * 2013-02-18 2016-12-27 住友重機械工業株式会社 Cryo pump and cryopump mounting structure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
US3252652A (en) * 1963-01-24 1966-05-24 Bendix Balzers Vacuum Inc Process and apparatus for the production of high vacuums
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
FR2048253A5 (en) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
NL7115666A (en) 1972-05-16
US3769806A (en) 1973-11-06
NL172590B (en) 1983-04-18
CA947990A (en) 1974-05-28
JPS56637B1 (en) 1981-01-08
GB1375734A (en) 1974-11-27
IT941125B (en) 1973-03-01
LU64250A1 (en) 1972-06-02
SE377830B (en) 1975-07-28
DE2155994A1 (en) 1972-05-18
NL172590C (en) 1983-09-16
FR2114039A5 (en) 1972-06-30
CH550941A (en) 1974-06-28

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: L AIR LIQUIDE S.A. POUR ETUDE & EXPLOITATION DES

Effective date: 19881130