NL172590B - DEVICE FOR DRAWING AN ULTRA-HIGH VACUUM AND A CRYO PUMP. - Google Patents

DEVICE FOR DRAWING AN ULTRA-HIGH VACUUM AND A CRYO PUMP.

Info

Publication number
NL172590B
NL172590B NLAANVRAGE7115666,A NL7115666A NL172590B NL 172590 B NL172590 B NL 172590B NL 7115666 A NL7115666 A NL 7115666A NL 172590 B NL172590 B NL 172590B
Authority
NL
Netherlands
Prior art keywords
ultra
high vacuum
cryo pump
cryo
pump
Prior art date
Application number
NLAANVRAGE7115666,A
Other languages
Dutch (nl)
Other versions
NL7115666A (en
NL172590C (en
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of NL7115666A publication Critical patent/NL7115666A/xx
Publication of NL172590B publication Critical patent/NL172590B/en
Application granted granted Critical
Publication of NL172590C publication Critical patent/NL172590C/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
NLAANVRAGE7115666,A 1970-11-13 1971-11-15 DEVICE FOR DRAWING AN ULTRA-HIGH VACUUM AND A CRYO PUMP. NL172590C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (en) 1970-11-13 1970-11-13

Publications (3)

Publication Number Publication Date
NL7115666A NL7115666A (en) 1972-05-16
NL172590B true NL172590B (en) 1983-04-18
NL172590C NL172590C (en) 1983-09-16

Family

ID=9064083

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7115666,A NL172590C (en) 1970-11-13 1971-11-15 DEVICE FOR DRAWING AN ULTRA-HIGH VACUUM AND A CRYO PUMP.

Country Status (12)

Country Link
US (1) US3769806A (en)
JP (1) JPS56637B1 (en)
BE (1) BE775243A (en)
CA (1) CA947990A (en)
CH (1) CH550941A (en)
DE (1) DE2155994A1 (en)
FR (1) FR2114039A5 (en)
GB (1) GB1375734A (en)
IT (1) IT941125B (en)
LU (1) LU64250A1 (en)
NL (1) NL172590C (en)
SE (1) SE377830B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (en) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2949092A1 (en) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
IT1197069B (en) * 1986-08-06 1988-11-25 Sgs Microelettronica Spa REFRIGERANT FLUID TRAP FOR VACUUM EVAPORATORS FOR THE DEPOSITION OF THIN METAL FILMS
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4017213C1 (en) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3123126B2 (en) * 1991-07-15 2001-01-09 株式会社日立製作所 Vacuum container with cooler
US5653113A (en) * 1995-04-07 1997-08-05 Rigaku Corporation Cooling system
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
TWI639769B (en) 2011-02-09 2018-11-01 布魯克機械公司 Cryopump and second stage array for cryopump
US20140202174A1 (en) * 2013-01-24 2014-07-24 Cryomech, Inc. Closed Cycle 1 K Refrigeration System
JP6053552B2 (en) * 2013-02-18 2016-12-27 住友重機械工業株式会社 Cryo pump and cryopump mounting structure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
US3252652A (en) * 1963-01-24 1966-05-24 Bendix Balzers Vacuum Inc Process and apparatus for the production of high vacuums
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
FR2048253A5 (en) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
NL7115666A (en) 1972-05-16
US3769806A (en) 1973-11-06
CA947990A (en) 1974-05-28
JPS56637B1 (en) 1981-01-08
GB1375734A (en) 1974-11-27
IT941125B (en) 1973-03-01
LU64250A1 (en) 1972-06-02
SE377830B (en) 1975-07-28
BE775243A (en) 1972-05-12
DE2155994A1 (en) 1972-05-18
NL172590C (en) 1983-09-16
FR2114039A5 (en) 1972-06-30
CH550941A (en) 1974-06-28

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Legal Events

Date Code Title Description
BB A search report has been drawn up
BC A request for examination has been filed
V1 Lapsed because of non-payment of the annual fee