FR2114039A5 - - Google Patents

Info

Publication number
FR2114039A5
FR2114039A5 FR7040599A FR7040599A FR2114039A5 FR 2114039 A5 FR2114039 A5 FR 2114039A5 FR 7040599 A FR7040599 A FR 7040599A FR 7040599 A FR7040599 A FR 7040599A FR 2114039 A5 FR2114039 A5 FR 2114039A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7040599A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
Original Assignee
Air Liquide SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA filed Critical Air Liquide SA
Priority to FR7040599A priority Critical patent/FR2114039A5/fr
Priority to SE7114209A priority patent/SE377830B/xx
Priority to IT30926/71A priority patent/IT941125B/en
Priority to JP8913571A priority patent/JPS56637B1/ja
Priority to CH1641671A priority patent/CH550941A/en
Priority to DE19712155994 priority patent/DE2155994A1/en
Priority to LU64250D priority patent/LU64250A1/xx
Priority to US00198178A priority patent/US3769806A/en
Priority to BE775243A priority patent/BE775243A/en
Priority to GB5278171A priority patent/GB1375734A/en
Priority to NLAANVRAGE7115666,A priority patent/NL172590C/en
Priority to CA127,722A priority patent/CA947990A/en
Application granted granted Critical
Publication of FR2114039A5 publication Critical patent/FR2114039A5/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
FR7040599A 1970-11-13 1970-11-13 Expired FR2114039A5 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (en) 1970-11-13 1970-11-13
SE7114209A SE377830B (en) 1970-11-13 1971-11-08
JP8913571A JPS56637B1 (en) 1970-11-13 1971-11-10
IT30926/71A IT941125B (en) 1970-11-13 1971-11-10 PROCEDURE AND PLANT FOR GAS PUMPING
DE19712155994 DE2155994A1 (en) 1970-11-13 1971-11-11 Method and device for pumping gas
LU64250D LU64250A1 (en) 1970-11-13 1971-11-11
CH1641671A CH550941A (en) 1970-11-13 1971-11-11 GAS PUMPING PROCESS AND INSTALLATION.
US00198178A US3769806A (en) 1970-11-13 1971-11-12 Method of and apparatus for cryopumping gas
BE775243A BE775243A (en) 1970-11-13 1971-11-12 GAS PUMPING PROCESS AND INSTALLATION
GB5278171A GB1375734A (en) 1970-11-13 1971-11-12
NLAANVRAGE7115666,A NL172590C (en) 1970-11-13 1971-11-15 DEVICE FOR DRAWING AN ULTRA-HIGH VACUUM AND A CRYO PUMP.
CA127,722A CA947990A (en) 1970-11-13 1971-11-15 Method of and apparatus for pumping gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (en) 1970-11-13 1970-11-13

Publications (1)

Publication Number Publication Date
FR2114039A5 true FR2114039A5 (en) 1972-06-30

Family

ID=9064083

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7040599A Expired FR2114039A5 (en) 1970-11-13 1970-11-13

Country Status (12)

Country Link
US (1) US3769806A (en)
JP (1) JPS56637B1 (en)
BE (1) BE775243A (en)
CA (1) CA947990A (en)
CH (1) CH550941A (en)
DE (1) DE2155994A1 (en)
FR (1) FR2114039A5 (en)
GB (1) GB1375734A (en)
IT (1) IT941125B (en)
LU (1) LU64250A1 (en)
NL (1) NL172590C (en)
SE (1) SE377830B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (en) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2949092A1 (en) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
IT1197069B (en) * 1986-08-06 1988-11-25 Sgs Microelettronica Spa REFRIGERANT FLUID TRAP FOR VACUUM EVAPORATORS FOR THE DEPOSITION OF THIN METAL FILMS
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4017213C1 (en) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3123126B2 (en) * 1991-07-15 2001-01-09 株式会社日立製作所 Vacuum container with cooler
US5653113A (en) * 1995-04-07 1997-08-05 Rigaku Corporation Cooling system
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
TWI639769B (en) 2011-02-09 2018-11-01 布魯克機械公司 Cryopump and second stage array for cryopump
US20140202174A1 (en) * 2013-01-24 2014-07-24 Cryomech, Inc. Closed Cycle 1 K Refrigeration System
JP6053552B2 (en) * 2013-02-18 2016-12-27 住友重機械工業株式会社 Cryo pump and cryopump mounting structure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
US3252652A (en) * 1963-01-24 1966-05-24 Bendix Balzers Vacuum Inc Process and apparatus for the production of high vacuums
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
FR2048253A5 (en) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
NL7115666A (en) 1972-05-16
US3769806A (en) 1973-11-06
NL172590B (en) 1983-04-18
CA947990A (en) 1974-05-28
JPS56637B1 (en) 1981-01-08
GB1375734A (en) 1974-11-27
IT941125B (en) 1973-03-01
LU64250A1 (en) 1972-06-02
SE377830B (en) 1975-07-28
BE775243A (en) 1972-05-12
DE2155994A1 (en) 1972-05-18
NL172590C (en) 1983-09-16
CH550941A (en) 1974-06-28

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Legal Events

Date Code Title Description
ST Notification of lapse