NL7115666A - - Google Patents

Info

Publication number
NL7115666A
NL7115666A NL7115666A NL7115666A NL7115666A NL 7115666 A NL7115666 A NL 7115666A NL 7115666 A NL7115666 A NL 7115666A NL 7115666 A NL7115666 A NL 7115666A NL 7115666 A NL7115666 A NL 7115666A
Authority
NL
Netherlands
Application number
NL7115666A
Other versions
NL172590B (nl
NL172590C (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7115666A publication Critical patent/NL7115666A/xx
Publication of NL172590B publication Critical patent/NL172590B/xx
Application granted granted Critical
Publication of NL172590C publication Critical patent/NL172590C/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
NLAANVRAGE7115666,A 1970-11-13 1971-11-15 Inrichting voor het trekken van een ultrahoog vacuum, alsmede een cryopomp. NL172590C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (enrdf_load_stackoverflow) 1970-11-13 1970-11-13

Publications (3)

Publication Number Publication Date
NL7115666A true NL7115666A (enrdf_load_stackoverflow) 1972-05-16
NL172590B NL172590B (nl) 1983-04-18
NL172590C NL172590C (nl) 1983-09-16

Family

ID=9064083

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7115666,A NL172590C (nl) 1970-11-13 1971-11-15 Inrichting voor het trekken van een ultrahoog vacuum, alsmede een cryopomp.

Country Status (12)

Country Link
US (1) US3769806A (enrdf_load_stackoverflow)
JP (1) JPS56637B1 (enrdf_load_stackoverflow)
BE (1) BE775243A (enrdf_load_stackoverflow)
CA (1) CA947990A (enrdf_load_stackoverflow)
CH (1) CH550941A (enrdf_load_stackoverflow)
DE (1) DE2155994A1 (enrdf_load_stackoverflow)
FR (1) FR2114039A5 (enrdf_load_stackoverflow)
GB (1) GB1375734A (enrdf_load_stackoverflow)
IT (1) IT941125B (enrdf_load_stackoverflow)
LU (1) LU64250A1 (enrdf_load_stackoverflow)
NL (1) NL172590C (enrdf_load_stackoverflow)
SE (1) SE377830B (enrdf_load_stackoverflow)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2949092A1 (de) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
IT1197069B (it) * 1986-08-06 1988-11-25 Sgs Microelettronica Spa Trappola a fluido refrigerante per evaporatori sotto vuoto per la deposizione di sottili pellicole metalliche
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4017213C1 (enrdf_load_stackoverflow) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3123126B2 (ja) * 1991-07-15 2001-01-09 株式会社日立製作所 冷却機付き真空容器
US5653113A (en) * 1995-04-07 1997-08-05 Rigaku Corporation Cooling system
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
TWI557320B (zh) * 2011-02-09 2016-11-11 布魯克機械公司 低溫泵、低溫泵的前隔板及製造低溫泵之前隔板的方法
US20140202174A1 (en) * 2013-01-24 2014-07-24 Cryomech, Inc. Closed Cycle 1 K Refrigeration System
JP6053552B2 (ja) * 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ及びクライオポンプ取付構造

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
US3252652A (en) * 1963-01-24 1966-05-24 Bendix Balzers Vacuum Inc Process and apparatus for the production of high vacuums
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
FR2048253A5 (enrdf_load_stackoverflow) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
NL172590B (nl) 1983-04-18
LU64250A1 (enrdf_load_stackoverflow) 1972-06-02
BE775243A (fr) 1972-05-12
NL172590C (nl) 1983-09-16
JPS56637B1 (enrdf_load_stackoverflow) 1981-01-08
DE2155994A1 (de) 1972-05-18
GB1375734A (enrdf_load_stackoverflow) 1974-11-27
SE377830B (enrdf_load_stackoverflow) 1975-07-28
FR2114039A5 (enrdf_load_stackoverflow) 1972-06-30
IT941125B (it) 1973-03-01
US3769806A (en) 1973-11-06
CH550941A (fr) 1974-06-28
CA947990A (en) 1974-05-28

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Legal Events

Date Code Title Description
BB A search report has been drawn up
BC A request for examination has been filed
V1 Lapsed because of non-payment of the annual fee