DE2138767A1 - Elektronenstrahlapparat mit Elektronen strahl stabihsierungssystem - Google Patents

Elektronenstrahlapparat mit Elektronen strahl stabihsierungssystem

Info

Publication number
DE2138767A1
DE2138767A1 DE19712138767 DE2138767A DE2138767A1 DE 2138767 A1 DE2138767 A1 DE 2138767A1 DE 19712138767 DE19712138767 DE 19712138767 DE 2138767 A DE2138767 A DE 2138767A DE 2138767 A1 DE2138767 A1 DE 2138767A1
Authority
DE
Germany
Prior art keywords
electron beam
electron
beam apparatus
diffraction
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712138767
Other languages
German (de)
English (en)
Inventor
Peter Jan Poole Jan Bart Le Kramer Johannes Delft Rus (Niederlande)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE2138767A1 publication Critical patent/DE2138767A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE19712138767 1970-08-28 1971-08-03 Elektronenstrahlapparat mit Elektronen strahl stabihsierungssystem Pending DE2138767A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012758A NL7012758A (enrdf_load_stackoverflow) 1970-08-28 1970-08-28

Publications (1)

Publication Number Publication Date
DE2138767A1 true DE2138767A1 (de) 1972-03-02

Family

ID=19810878

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712138767 Pending DE2138767A1 (de) 1970-08-28 1971-08-03 Elektronenstrahlapparat mit Elektronen strahl stabihsierungssystem

Country Status (6)

Country Link
US (1) US3767927A (enrdf_load_stackoverflow)
CA (1) CA943269A (enrdf_load_stackoverflow)
DE (1) DE2138767A1 (enrdf_load_stackoverflow)
FR (1) FR2106023A5 (enrdf_load_stackoverflow)
GB (1) GB1334767A (enrdf_load_stackoverflow)
NL (1) NL7012758A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (enrdf_load_stackoverflow) * 1971-04-30
NL7416395A (nl) * 1974-12-17 1976-06-21 Philips Nv Elektronenmikroskoop.
CN112996214B (zh) * 2021-02-19 2023-07-21 中国科学院近代物理研究所 一种磁场稳定性控制系统及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE509097A (enrdf_load_stackoverflow) * 1951-02-10
US3012139A (en) * 1960-03-24 1961-12-05 Merlyn L Hanson Automatic mass spectrometer
US3207982A (en) * 1961-04-19 1965-09-21 High Voltage Engineering Corp Apparatus for measuring and displaying the characteristics of beams of charged particles
US3191027A (en) * 1962-08-24 1965-06-22 Exxon Research Engineering Co Mass spectrometer with means to impress a fluctuating component upon the ion stream and means to detect the same
DE1498936B2 (de) * 1963-12-28 1971-01-14 Nihon Densht K K , Tokio Verfahren und Vorrichtung zur Steue rung der Expositionszeit in einem Massen spektrographen

Also Published As

Publication number Publication date
CA943269A (en) 1974-03-05
GB1334767A (en) 1973-10-24
NL7012758A (enrdf_load_stackoverflow) 1972-03-01
US3767927A (en) 1973-10-23
FR2106023A5 (enrdf_load_stackoverflow) 1972-04-28

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