DE69606515T2 - Elektrostatisch-magnetische Linsenanordnung - Google Patents

Elektrostatisch-magnetische Linsenanordnung

Info

Publication number
DE69606515T2
DE69606515T2 DE69606515T DE69606515T DE69606515T2 DE 69606515 T2 DE69606515 T2 DE 69606515T2 DE 69606515 T DE69606515 T DE 69606515T DE 69606515 T DE69606515 T DE 69606515T DE 69606515 T2 DE69606515 T2 DE 69606515T2
Authority
DE
Germany
Prior art keywords
electrostatic
lens arrangement
magnetic lens
magnetic
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69606515T
Other languages
English (en)
Other versions
DE69606515D1 (de
Inventor
Koshi Ueda
Toshimichi Iwai
Dr Schoenecker
Dr Frosien
Dr Feuerbaum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advanced Circuit Testing ACT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7785635&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69606515(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Advanced Circuit Testing ACT filed Critical Advanced Circuit Testing ACT
Priority to DE69606515T priority Critical patent/DE69606515T2/de
Publication of DE69606515D1 publication Critical patent/DE69606515D1/de
Application granted granted Critical
Publication of DE69606515T2 publication Critical patent/DE69606515T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2594—Measuring electric fields or potentials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69606515T 1996-02-16 1996-07-03 Elektrostatisch-magnetische Linsenanordnung Revoked DE69606515T2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE69606515T DE69606515T2 (de) 1996-02-16 1996-07-03 Elektrostatisch-magnetische Linsenanordnung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19605855A DE19605855A1 (de) 1996-02-16 1996-02-16 Detektorobjektiv für Korpuskularstrahlgeräte
DE69606515T DE69606515T2 (de) 1996-02-16 1996-07-03 Elektrostatisch-magnetische Linsenanordnung

Publications (2)

Publication Number Publication Date
DE69606515D1 DE69606515D1 (de) 2000-03-09
DE69606515T2 true DE69606515T2 (de) 2000-06-15

Family

ID=7785635

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19605855A Withdrawn DE19605855A1 (de) 1996-02-16 1996-02-16 Detektorobjektiv für Korpuskularstrahlgeräte
DE69606515T Revoked DE69606515T2 (de) 1996-02-16 1996-07-03 Elektrostatisch-magnetische Linsenanordnung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19605855A Withdrawn DE19605855A1 (de) 1996-02-16 1996-02-16 Detektorobjektiv für Korpuskularstrahlgeräte

Country Status (2)

Country Link
EP (1) EP0790634B1 (de)
DE (2) DE19605855A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59711915D1 (de) * 1997-09-29 2004-10-21 Advantest Corp Objektivlinse
WO1999046797A1 (de) 1998-03-10 1999-09-16 Erik Essers Rasterelektronenmikroskop
DE19845329C2 (de) * 1998-03-10 2001-09-27 Erik Essers Rasterelektronenmikroskop
EP0989583A1 (de) 1998-09-25 2000-03-29 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Verfahren und Vorrichtung zur Fokusierung eines Ladungsträgerstrahls
EP1022766B1 (de) * 1998-11-30 2004-02-04 Advantest Corporation Teilchenstrahlgerät
DE60236302D1 (de) * 2002-12-17 2010-06-17 Integrated Circuit Testing Mehrachsige Verbundlinse, Strahlvorrichtung und Verfahren zur Anwendung dieser kombinierten Linse
DE10317894B9 (de) 2003-04-17 2007-03-22 Leo Elektronenmikroskopie Gmbh Fokussiersystem für geladene Teilchen, Elektronenmikroskopiesystem und Elektronenmikroskopieverfahren
EP2629317B1 (de) 2012-02-20 2015-01-28 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Teilchenstrahlvorrichtung mit dynamischem Fokus und Verfahren zu deren Betrieb
US10504684B1 (en) * 2018-07-12 2019-12-10 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH High performance inspection scanning electron microscope device and method of operating the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2922325A1 (de) * 1979-06-01 1980-12-11 Philips Patentverwaltung Rasterelektronenmikroskop
ATE91822T1 (de) * 1986-04-24 1993-08-15 Integrated Circuit Testing Elektrostatisch-magnetische-linse fuer korpuskularstrahlgeraete.
NL8602177A (nl) * 1986-08-27 1988-03-16 Philips Nv Electronen detectie met energie discriminatie.
DE3766092D1 (de) * 1986-12-12 1990-12-13 Integrated Circuit Testing Detektoranordnung mit einem detektorobjektiv fuer korpuskularstrahlgeraete.
JPH0636346B2 (ja) * 1988-03-09 1994-05-11 セイコー電子工業株式会社 荷電粒子線装置及びこれによる試料観察方法
US4926054A (en) * 1988-03-17 1990-05-15 Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh Objective lens for focusing charged particles in an electron microscope
JP2777840B2 (ja) * 1990-11-30 1998-07-23 セイコーインスツルメンツ株式会社 電子線装置
EP0548573B1 (de) * 1991-11-27 1998-02-25 Hitachi, Ltd. Elektronenstrahlgerät
JP3081393B2 (ja) * 1992-10-15 2000-08-28 株式会社日立製作所 走査電子顕微鏡
DE4236273A1 (en) * 1992-10-27 1993-07-01 Siemens Ag Lens for focussing electrons for specimen inspection - has field generated by coils and cone-shaped electrode set into entry section

Also Published As

Publication number Publication date
DE19605855A1 (de) 1997-08-21
EP0790634A1 (de) 1997-08-20
EP0790634B1 (de) 2000-02-02
DE69606515D1 (de) 2000-03-09

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8327 Change in the person/name/address of the patent owner

Owner name: ADVANTEST CORP., TOKIO/TOKYO, JP

8328 Change in the person/name/address of the agent

Free format text: RA U. PA VOLKMAR TETZNER PA MICHAEL TETZNER RA THOMAS TETZNER, 81479 MUENCHEN

8331 Complete revocation