CA943269A - Electron beam apparatus with beam-stabilisation system - Google Patents

Electron beam apparatus with beam-stabilisation system

Info

Publication number
CA943269A
CA943269A CA121,297A CA121297A CA943269A CA 943269 A CA943269 A CA 943269A CA 121297 A CA121297 A CA 121297A CA 943269 A CA943269 A CA 943269A
Authority
CA
Canada
Prior art keywords
stabilisation system
electron beam
beam apparatus
electron
stabilisation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA121,297A
Other versions
CA121297S (en
Inventor
Pieter J. Rus
Johannes Kramer
Jan B. Lepoole
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA943269A publication Critical patent/CA943269A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA121,297A 1970-08-28 1971-08-25 Electron beam apparatus with beam-stabilisation system Expired CA943269A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012758A NL7012758A (en) 1970-08-28 1970-08-28

Publications (1)

Publication Number Publication Date
CA943269A true CA943269A (en) 1974-03-05

Family

ID=19810878

Family Applications (1)

Application Number Title Priority Date Filing Date
CA121,297A Expired CA943269A (en) 1970-08-28 1971-08-25 Electron beam apparatus with beam-stabilisation system

Country Status (6)

Country Link
US (1) US3767927A (en)
CA (1) CA943269A (en)
DE (1) DE2138767A1 (en)
FR (1) FR2106023A5 (en)
GB (1) GB1334767A (en)
NL (1) NL7012758A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (en) * 1971-04-30
NL7416395A (en) * 1974-12-17 1976-06-21 Philips Nv ELECTRONIC MICROSKOP.
CN112996214B (en) * 2021-02-19 2023-07-21 中国科学院近代物理研究所 Magnetic field stability control system and method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE509097A (en) * 1951-02-10
US3012139A (en) * 1960-03-24 1961-12-05 Merlyn L Hanson Automatic mass spectrometer
US3207982A (en) * 1961-04-19 1965-09-21 High Voltage Engineering Corp Apparatus for measuring and displaying the characteristics of beams of charged particles
US3191027A (en) * 1962-08-24 1965-06-22 Exxon Research Engineering Co Mass spectrometer with means to impress a fluctuating component upon the ion stream and means to detect the same
DE1498936B2 (en) * 1963-12-28 1971-01-14 Nihon Densht K K , Tokio Method and device for controlling the exposure time in a mass spectrograph

Also Published As

Publication number Publication date
DE2138767A1 (en) 1972-03-02
NL7012758A (en) 1972-03-01
GB1334767A (en) 1973-10-24
US3767927A (en) 1973-10-23
FR2106023A5 (en) 1972-04-28

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